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1. 发明专利

JPH05259260A 失效
公开(公告)号：JPH05259260A
公开(公告)日：1993-10-08
申请号：JP8990092
申请日：1992-03-12
IPC分类号： G05B1/08 , G06F17/40 , H01L21/205 , H01L21/677 , H01L21/68 , G06F15/74
摘要： PURPOSE:To continuously process a plurality of batches according to a wafer processing sequence without causing wait time or non-operating time between the batches. CONSTITUTION:An apparatus and method for controlling a vertical furnace comprises a batch cassette exchanging function 14 which replaces a processed batch cassette with an unprocessed batch cassette as soon as processing of one batch is completed, a processing control function 13 for starting next batch processing as soon as cassette replacement is completed and a process recipe reservation function 15 for storing in a memory wafer processing sequence names for making correspondence between a wafer processing sequence which is different for each of the batches and each batch whereby a plurality of batches can be continuously processed according to the wafer processing procedure.

6. 发明专利

JPH05290053A 失效
公开(公告)号：JPH05290053A
公开(公告)日：1993-11-05
申请号：JP8426092
申请日：1992-04-07
申请人： TOSHIBA CORP
发明人： KIRA EIJI
IPC分类号： B23Q41/08 , B65G61/00 , G05B1/08 , G05B19/418 , G06Q50/00 , G06Q50/04 , H01L21/02 , G06F15/21
摘要： PURPOSE:To provide information showing which lot is to preferentially be produced for manufacturing a semiconductor element by means of the production system of small scale many kinds. CONSTITUTION:A work plan 1 obtained by collecting information when the lot starting manufacture is to pass through respective processes is decided by considering the capacity of a manufacture process. A computer screen is used for deciding which work of the lot is to be proceeded among the elements which are not started yet by using a line and a manufacture equipment, which are not operated, as to the unstarted elements existing in a certain work process. Namely, efficient flowing information 3 is provided based on difference information 4 between a work plan master 1 and the progress advance degree of actual lot 2. Thus, a worker can instantaneously decide the lot and the manufacture equipment, with which the lot is proceeded by plan difference information 4 and work priority ranking information 5. Consequently, the system is a presently efficient method with which the production system of small scale many kinds is executed, and it is considerably efficient in a manufacture scene.

10. 发明专利

JPH08183497A FLYING BODY CONTROL METHOD AND CONTROL DEVICE 失效
公开(公告)号：JPH08183497A
公开(公告)日：1996-07-16
申请号：JP33927894
申请日：1994-12-30
申请人： KAWASAKI HEAVY IND LTD
发明人： TANAKA TAITARO , NAGATOME YOICHI
IPC分类号： B64C15/02 , F02K1/78 , G05B1/08
摘要： PURPOSE: To provide a flying body control method and a control device that can secure directional stability even when directional stability by a rudder cannot be secured due to the damage of the rudder. CONSTITUTION: Using a thrust deflecting means 4 formed of a thrust deflecting nozzle 41 for generating moment related to the yawing direction of an airframe by deflecting the direction of jet exhaust, and a driver 42 for the thrust deflecting nozzle 41, a control device adjusts the angle of the thrust deflecting nozzle 41 so as to correct the change of a yaw angle. Directional stability can therefore be secured even when a rudder 2 is out of function.

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