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1. 发明专利

AU2002249873C1 Pseudo-randomized infrared blurring array 未知
公开(公告)号：AU2002249873C1
公开(公告)日：2004-07-15
申请号：AU2002249873
申请日：2001-12-21
申请人： RAYTHEON CO
发明人： SACCKETTI NICHOLAS BERT , HEWITT ANTHONY VICTOR
IPC分类号： G01B11/00 , G01J5/02 , G02B3/00 , G02B5/00 , H04N5/33 , G02B003/00 , G02B027/48
摘要： An infrared blurring array is formed of a substrate having thereon a surface array of blurlets whose foci vary in distance from a nominal focal surface location, and/or whose optical phases at the nominal focal surface location vary, in a pseudorandom but deterministic manner. The substrate may be made of a material transmissive to a waveband of incident infrared energy, and the blurlets are refractive lenslets in the substrate, or the blurlets may be mirrorlets in a reflective substrate. The blurlets are surfaces each defined by a curvature and an axial offset from a nominal focal surface location. At least one, and preferably both, of the curvature and the axial offset of each blurlet is a value that is randomly selected from a set of values defined by a respective distribution, preferably a truncated distribution.

2. 发明专利

CZ7016U1 Optical element 未知
公开(公告)号：CZ7016U1
公开(公告)日：1998-03-18
申请号：CZ741297
申请日：1997-11-25
申请人： ECOGLASS SPOL S R O
发明人： KOCAREK JIRI ING
IPC分类号： G02B3/00 , G02B3/08 , G02B003/00 , G02B003/08

3. 发明专利

AU2001280157B2 Composition having refractive index sensitively changeable by radiation and method for forming refractive index pattern 未知
$Composition having refractive index sensitively changeable by radiation and method for forming refractive index pattern$
公开(公告)号：AU2001280157B2
公开(公告)日：2005-08-11
申请号：AU2001280157
申请日：2001-08-24
申请人： JSR CORP
发明人： SHIMOKAWA TSUTOMU , KUMANO ATSUSHI , BESSHO NOBUO , NISHIMURA ISAO , YAMADA KENJI
IPC分类号： C08L67/00 , C08L69/00 , C08L83/14 , G02B1/04 , G02B5/18 , G02B6/124 , G03F7/00 , G03F7/004 , G03F7/039 , G03F7/075 , G03F007/004 , G03H001/02 , G02B006/12 , G02B005/18 , G02B003/00 , C08L101/00 , C08L083/14 , G03F007/36
摘要： A radiation sensitive refractive index changing composition comprising (A) a decomposable compound, (B) a non-decomposable compound having a lower refractive index than the decomposable compound (A), (C) a radiation sensitive decomposer and (D) a stabilizer. By exposing the composition to radiation through a pattern mask, the above components (C) and (A) of an exposed portion are decomposed and a refractive index difference is made between the exposed portion and unexposed portion, thereby forming a pattern having different refractive indices.

4. 发明申请

US20040240075A1 Solid immersion lens and sample observation method using it 有权
标题翻译：固体浸没透镜和使用样品观察方法
公开(公告)号：US20040240075A1
公开(公告)日：2004-12-02
申请号：US10804193
申请日：2004-03-19
申请人： HAMAMATSU PHOTONICS K.K
发明人： Ikuo Arata , Hirotoshi Terada
IPC分类号： G02B003/00 , G02B009/00
CPC分类号： G02B21/02 , G02B3/00 , G02B21/33
摘要： Using a solid immersion lens (SIL) 1 having a spherical lens surface 10 with a radius of curvature RL from a material having a refractive index nL, an image of a sample 2 is observed. In this sample observation, a geometric aberration characteristic caused by the SIL 1 is evaluated by using a predetermined optical system. Using a coefficient k (0
摘要翻译：使用具有来自折射率nL的材料的具有曲率半径RL的球面透镜表面10的固体浸没透镜（SIL）1，观察样品2的图像。在该样本观察中，通过使用预定的光学系统评估由SIL 1引起的几何像差特性。使用系数k（0

5. 发明申请

US20040150896A1 Optical device, optical system, method of production of same, and mold for production of same 失效
公开(公告)号：US20040150896A1
公开(公告)日：2004-08-05
申请号：US10758184
申请日：2004-01-16
发明人： Masahiro Yamada , Akira Kouchiyama , Tetsu Watanabe
IPC分类号： G02B025/00 , G02B017/00 , G02B015/00 , G02B013/00 , G02B007/00 , G02B009/00 , G02B011/00 , G02B003/00
CPC分类号： G02B6/4214 , G02B3/0087 , G02B6/262 , G02B6/30 , G02B6/4203 , G02B6/4204 , G02B6/4246
摘要： A first optical device according to the present invention comprises a base made of a first optical material and a second optical material having a refractive index different from that of the first optical material, and the base has a concavity, and the second optical material is filled in this concavity. A second optical device according to the present invention comprises a base made of a first optical material and a second optical material having a refractive index different from the first optical material, and the base comprises first and second faces facing each other, a first concavity is formed in the first face and a second concavity is formed in the second face, and the second optical material is filled in the first and second concavities.

6. 发明申请

US20040145806A1 Correction of birefringence in cubic crystalline optical systems 有权
标题翻译：立方结晶光学系统双折射校正
公开(公告)号：US20040145806A1
公开(公告)日：2004-07-29
申请号：US10759699
申请日：2004-01-19
发明人： Jeffrey M. Hoffman , James P. McGuire
IPC分类号： G02F001/03 , G02B009/00 , G02F001/07 , G02B005/30 , G02B003/00 , G02B027/28
CPC分类号： G03F7/70075 , G02B1/02 , G02B27/0043 , G02B27/28 , G03F7/70216 , G03F7/70241 , G03F7/70966 , Y10S438/942
摘要： An optical system includes multiple cubic crystalline optical elements aligned along a common optical axis and having their crystal lattices oriented with respect to each other to minimize the effects of intrinsic birefringence and produce a system with reduced retardance. The optical system may be a refractive or catadioptric system having a high numerical aperture and using light with a wavelength at or below 248 nanometers. The net retardance of the system is less than the sum of the retardance contributions of the respective optical elements as the elements are oriented such that the intrinsic birefringences of the individual elements cancel each other out. In one embodiment, two null110null cubic crystalline optical elements are clocked with respect to one another and used in conjunction with a null100null cubic crystalline optical element to reduce retardance. Various birefringent elements, wave plates, and combinations thereof provide additional correction for residual retardance and wavefront aberrations. The optical system may be used in a photolithography tool to pattern substrates such as semiconductor substrates and thereby produce semiconductor devices.
摘要翻译：光学系统包括沿着公共光轴对准的多个立方晶体光学元件，并且使它们的晶格相对于彼此取向以最小化固有双折射的影响并产生具有减小的延迟的系统。光学系统可以是具有高数值孔径的折射或反射折射系统，并且使用具有或低于248纳米的波长的光。系统的净延迟小于各个光学元件的延迟贡献的总和，因为元件被定向成使得各个元件的固有双折射彼此抵消。在一个实施例中，两个[110]立方晶体光学元件相对于彼此计时，并与[100]立方晶体光学元件结合使用以减少延迟。各种双折射元件，波片及其组合为残余延迟和波前像差提供额外的校正。光学系统可以用于光刻工具中以图案化诸如半导体衬底的衬底，从而制造半导体器件。

7. 发明申请

US20040130798A1 Projection system for use in image display apparatus 审中-公开
标题翻译：用于图像显示装置的投影系统
公开(公告)号：US20040130798A1
公开(公告)日：2004-07-08
申请号：US10617880
申请日：2003-07-11
申请人： CHENGDU CRYSTAL TECHNOLOGY CO., LTD.
发明人： Zhiquan Zhang , Qiming Xin , Rui Zhao , Feng Gao , Wei Chang
IPC分类号： G02B003/00 , G02B009/00
CPC分类号： G02B27/4211 , G02B13/16 , G02B13/18 , G02B27/0037 , G02B27/42
摘要： An improved projection system uses a diffractive structure to provide improved image resolution. Display applications using red, green, and blue channel lenses to produce a fill-color image use different diffractive structures to optimize color correction for each of the individual color bands. The preferred location of the diffractive structure is chosen near the aperture stop of the lens to minimize the range of ray incidence angles on the diffractive structure so that diffraction efficiency is maximized for the full field of view. Aspheric surfaces that have both even-power and odd-power terms are used throughout the design. The substantial improvement in image quality provided by the diffractive structure and the novel aspheric surfaces allows shorter object to image distances so that smaller-volume products are made possible.
摘要翻译：改进的投影系统使用衍射结构来提供改进的图像分辨率。使用红色，绿色和蓝色通道透镜显示应用程序以产生填充彩色图像使用不同的衍射结构来优化每个单独色带的颜色校正。衍射结构的优选位置被选择在透镜的孔径光阑附近，以使得衍射结构上的射线入射角的范围最小化，从而使全衍射效率最大化。在整个设计中都使用具有均匀功率和奇数功率项的非球面。由衍射结构和新型非球面表面提供的图像质量的实质性改进允许较短的物体到图像距离，使得较小体积的产品成为可能。

8. 发明申请

US20040114250A1 Projection display device 失效
标题翻译：投影显示设备
公开(公告)号：US20040114250A1
公开(公告)日：2004-06-17
申请号：US10717710
申请日：2003-11-21
申请人： NEC VIEWTECHNOLOGY, LTD.
发明人： Atsushi Kato
IPC分类号： G02B027/10 , G02B003/00 , G02B009/00
CPC分类号： G02B3/0056 , G02B3/0062 , G02B27/1033 , G02B27/1053 , G02B27/149
摘要： In a projection display device, a plurality of light emitting diode elements are arranged to make up a light emitting diode element array, and a plurality of the light emitting diode element arrays are assembled to form a light source array. The device comprises a mechanism for moving the light source array; a light source driver circuit for turning on each of the light emitting diode elements within the light emitting diode element array; and a control circuit for controlling the lighting of each light emitting diode element. A first and a second fly-eye lens are each composed of a plurality of rectangular elemental lenses assembled in an array form, where the element lenses are identical in quantity to the light emitting diode element arrays. The light source moving mechanism reciprocates the overall light source array in a plane perpendicular to the optical axis of, the first fly-eye lens.
摘要翻译：在投影型显示装置中，配置有多个发光二极管元件来构成发光二极管元件阵列，并组装多个发光二极管元件阵列以形成光源阵列。该装置包括用于移动光源阵列的机构; 光源驱动电路，用于接通发光二极管元件阵列内的每个发光二极管元件; 以及用于控制每个发光二极管元件的点亮的控制电路。第一和第二复眼透镜各自由多个以阵列形式组装的矩形元件透镜组成，其中元件透镜的数量与发光二极管元件阵列相同。光源移动机构使整个光源阵列在垂直于第一复眼透镜的光轴的平面中往复运动。

9. 发明申请

US20040095573A1 Excimer laser inspection system 有权
标题翻译：准分子激光检查系统
公开(公告)号：US20040095573A1
公开(公告)日：2004-05-20
申请号：US10096318
申请日：2002-03-12
发明人： Bin-Ming Benjamin Tsai , Yung-Ho Chuang , J. Joseph Armstrong , David Lee Brown
IPC分类号： G02B003/00
CPC分类号： G02B17/0808 , G01N21/8806 , G01N21/9501 , G01N21/95607 , G01N2021/479 , G01N2021/8825 , G01N2021/95676 , G01N2201/06113 , G02B17/0856 , G02B17/0892 , G02B21/04 , G03F7/70225
摘要： A system and method for inspecting a specimen, such as a semiconductor wafer, including illuminating at least a portion of the specimen using an excimer source using at least one relatively intense wavelength from the source, detecting radiation received from the illuminated portion of the specimen, analyzing the detected radiation for potential defects present in the specimen portion.
摘要翻译：一种用于检查诸如半导体晶片的样本的系统和方法，包括使用来自所述源的至少一个相对较强的波长的准分子源照射所述样本的至少一部分，检测从所述被照射部分接收的辐射，分析检测到的辐射对于存在于样品部分中的潜在缺陷。

10. 发明申请

US20040047047A1 Lens with stain resistant surface layer 有权
标题翻译：镜片具有防污染表面层
公开(公告)号：US20040047047A1
公开(公告)日：2004-03-11
申请号：US10649875
申请日：2003-08-28
申请人： Shin-Etsu Chemical Co., Ltd.
发明人： Koichi Yamaguchi , Hirofumi Kishita
IPC分类号： G02B003/00 , G02B007/00 , G02B009/00 , G02B011/00 , G02B013/00 , G02B015/00 , G02B017/00 , G02B025/00 , G02B001/06 , G02B003/12
CPC分类号： G02B1/18 , G02B1/105 , G02B1/113 , G02B27/0006 , Y10T428/31663
摘要： A lens including a lens substrate, a surface layer, and a backing member provided beneath the surface layer, in which the backing member may be either the same as the lens substrate or a separate layer from the lens substrate, and wherein the surface layer includes a hydrolysis-condensation product of a perfluoropolyether modified silane with a hydrolysable functional group or a halogen atom X at both terminals, represented by a general formula (1) shown below: 1 (wherein, Rf is a bivalent group with a straight chain perfluoropolyether structure containing no branching, which incorporates a unit represented by a formula null(CkF2kO)null (wherein, k represents an integer from 1 to 6)) is resistant to the adhesion of contaminants to the surface thereof, can be easily wiped to remove any adhered contaminants, provides a slippery surface that is difficult to scratch, and moreover displays excellent durability and is capable of retaining the above properties over extended periods.
摘要翻译：一种透镜，包括透镜基板，表面层和设置在表面层下方的背衬元件，其中背衬元件可以与透镜基板相同或与透镜基板分开，并且其中表面层包括由下列通式（1）表示的全氟聚醚改性硅烷与两末端的可水解官能团或卤素原子X的水解缩合产物：（其中，Rf是含有直链全氟聚醚结构的二价基团，没有分支，其包含由式 - （CkF2kO） - （其中k表示1至6的整数）表示的单元）能够抵抗污染物与其表面的粘附，可以容易地擦去以除去任何附着的污染物提供难以划伤的光滑表面，并且还显示出优异的耐久性，并且能够在长时间内保持上述性能。

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