专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US07438851B2 Microsensor with a well having a membrane disposed therein 有权
标题翻译：具有设置在其中的膜的微量传感器
公开(公告)号：US07438851B2
公开(公告)日：2008-10-21
申请号：US10837067
申请日：2004-04-30
申请人： Robert W. Hower , Richard B. Brown
发明人： Robert W. Hower , Richard B. Brown
IPC分类号： G01N21/00 , G01N27/327 , G01N17/414
CPC分类号： B01L3/5085 , G01N2035/1037 , Y10T436/25
摘要： A micromachined device such as a solid-state liquid chemical sensor for receiving and retaining a plurality of separate liquid droplets at desired sites, a method of making the device and a method of using the device are provided. The technique works for both aqueous and solvent-based solutions. The device includes a substrate having an upper surface, and a first set of three-dimensional, thin film well rings patterned at the upper surface of the substrate. Each of the wells is capable of receiving and retaining a known quantity of liquid at one of the desired sites through surface tension. A method for patterning a membrane/solvent solution results in reproducibly-sized, uniformly-thick membranes. The patterning precision of this method allows one to place the membranes closer together, making the sensors smaller and less expensive, and the uniform film thickness imparts reproducibility to the sensors. The final film thickness can be controlled over a 3 to 50 micron range, and lateral dimensions can be as small as 20 microns using conventional materials. The simple patterning steps can be done on full wafers in a mass fabrication process. A second set of well rings may be photo-patterned at the same time as the first set of well rings to isolate functional groups on top of ion-selective membrane.
摘要翻译：提供了一种微机械装置，例如固态液体化学传感器，用于在期望的位置接收和保持多个分离的液滴，提供了制造该装置的方法和使用该装置的方法。该技术适用于水溶剂和溶剂型溶液。该器件包括具有上表面的衬底和在衬底的上表面上图案化的第一组三维薄膜阱环。每个孔能够通过表面张力接收和保留在期望位置之一处的已知量的液体。用于图案化膜/溶剂溶液的方法导致可再现尺寸的均匀厚的膜。该方法的图案精度允许将膜更靠近在一起，使得传感器更小和更便宜，并且均匀的膜厚赋予传感器再现性。最终的膜厚度可以控制在3至50微米的范围内，并且使用常规材料的横向尺寸可以小至20微米。简单的图案化步骤可以在大量制造工艺中在全晶片上进行。第二组阱环可以与第一组阱环同时进行光图案化，以隔离离子选择膜顶部的官能团。

IPRDB

热门服务

关于我们

友情链接

联系方式