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    • 2. 发明申请
    • SIMULTANEOUS MULTIPLE ANGLE/MULTIPLE WAVELENGTH ELLIPSOMETER AND METHOD
    • 同时多角度/多波长电位计和方法
    • WO1992012404A1
    • 1992-07-23
    • PCT/US1992000280
    • 1992-01-10
    • RUDOLPH RESEARCH CORPORATION
    • RUDOLPH RESEARCH CORPORATIONSPANIER, Richard, F.WOLF, Robert, G.LOITERMAN, Robert, M.HALLER, Mitchell, E.
    • G01J04/04
    • G01N21/211G01B11/065
    • The ellipsometer (1) and method involve directing polarized light for interaction with an optical system (2) under study at different angles of incidence from a single beam of light and detecting the light interacted with the optical system by reflection and/or transmission for each of a plurality of different angles of incidence. The simultaneous illumination of the optical system under study at a whole range of angles of incidence alpha from a single beam of light and the collection a large multiplicity of data from the different angles detected can be accomplished rapidly and easily and with accuracy without scanning and with only one ellipsometer. A lens (7) is used to focus the incoming light to provide the range of different angles of incidence alpha . The range of angles is at least one or two degrees and preferably thirty degrees or more. A second lens (8) refocuses the interacted light to a linear, multi-element detector array (6) which extends in the plane of the incidence. Each of the detector elements (9) detects a narrow range of angles of incidence within the relatively wider range of angles of incidence of the illuminating beam. If the incident illuminating rays are polychromatic and a wavelength dispersing element (10) acts on the reflected rays each detector element of a square array (11) detects a narrow range of wavelengths and angles of incidence.
    • 椭偏仪(1)和方法涉及将偏振光引导到与来自单个光束的不同入射角的研究中的光学系统(2)的相互作用,并且通过每个的反射和/或透射来检测与光学系统相互作用的光 具有多个不同的入射角。 在单光束的入射角α的整个范围内同时照射研究的光学系统,并且从检测到的不同角度收集大量数据可以快速且容易地并且准确地实现,而无需扫描和与 只有一个椭偏仪。 透镜(7)用于聚焦入射光,​​以提供不同入射角α的范围。 角度范围为至少一度或二度,优选三十度以上。 第二透镜(8)将相互作用的光重新聚焦到在入射平面中延伸的线性多元件检测器阵列(6)。 每个检测器元件(9)在照明光束的相对较宽的入射角范围内检测入射角的窄范围。 如果入射照明光线是多色的并且波长分散元件(10)作用在反射光线上,则方阵(11)的每个检测器元件检测波长和入射角的窄范围。
    • 3. 发明申请
    • MEASUREMENT OF POLARIZATION MODE DISPERSION
    • 极化模式分布的测量
    • WO1996036859A1
    • 1996-11-21
    • PCT/US1996007197
    • 1996-05-17
    • VOOTS, Terry, L.
    • G01J04/04
    • G01M11/336G01M11/331
    • A method is provided for high resolution measurement of Polarization Mode Dispersion (PMD) of an optic fiber (26), comprising the steps of: providing a Polarization Mode Dispersion measuring instrument with a light source (10); providing a test fiber (26); arranging the artefact (28) having a stable known Polarization Mode Dispersion value in series with the test fiber (26); transmitting light from the light source (10) through the artefact (28) and the test fiber (26); measuring a biased Polarization Mode Dispersion value with the Polarization Mode Dispersion measuring instrument biased away from a zero Polarization Mode Dispersion value; and determining the Polarization Mode Dispersion of the optic fiber from the biased measured Polarization Mode Dispersion value.
    • 提供了一种用于光纤(26)的偏振模色散(PMD)的高分辨率测量的方法,包括以下步骤:提供具有光源(10)的偏振模色散测量仪器; 提供测试光纤(26); 将具有稳定的已知极化模式色散值的人造物(28)与测试光纤(26)串联布置; 透射来自光源(10)的光穿过人造物(28)和测试光纤(26); 测量偏振极化模式色散值,偏振模色散测量仪偏离零极化模式色散值; 并从偏置的测量偏振模色散值确定光纤的偏振模色散。
    • 6. 发明申请
    • MEASUREMENT ARRANGEMENT FOR ANALYSING ELECTROMAGNETIC RADIATION
    • 用于分析电磁辐射的测量装置
    • WO1986002159A1
    • 1986-04-10
    • PCT/EP1985000498
    • 1985-09-25
    • DISTL, RichardSCHMIDT, Ulrich
    • G01J04/04
    • G01N21/21G01J4/00
    • The measurement arrangement for analysing electromagnetic radiation contains, in the radiation path, the following assemblies arranged one behind the other: (a) at least one linear polariser (2); (b) at least one optically active element (3) with a known optical activity, i.e. with a known frequency dependence of the rotation of the polarisation plane; and (c) at least one analyser (4), whose polarisation direction has a fixed pre-set orientation in relation to the emission direction of the linear polariser. The beam emerging from the analyser (4) is conveyed across a photosensitive sensor (7, 8) of a measurement circuit. The overall intensity of the radiation to be measured is determined by creating a reference signal in various ways, namely by direct measurement with an optically active element partly removed from the radiation path, by the decoupling of a partial beam or by a beam splitting analyser. The measurement arrangement enables a very rapid analysis (up to calibration time measurement) of electromagnetic beam with an extremely high resolution power, without any moving mechanical parts being necessary. The fields of application of the mesurement arrangement are the determination of the optical focus of the radiation, the determination of the special characteristic of the radiation and also spectrometric and/or photometric testing of specimens.
    • 用于分析电磁辐射的测量装置在辐射路径中包含一个彼此排列的以下组件:(a)至少一个线性偏振器(2); (b)具有已知光学活性的至少一种光学活性元件(3),即具有已知的偏振面旋转的频率依赖性; 和(c)至少一个分析器(4),其偏振方向相对于线性偏振器的发射方向具有固定的预置方位。 从分析器(4)出射的光束通过测量电路的光敏传感器(7,8)传送。 要测量的辐射的总体强度通过以各种方式产生参考信号来确定,即通过使用部分光束或光束分裂分析器的去耦合的部分从辐射路径部分去除的光学有源元件直接测量。 该测量装置能够以非常高的分辨率的功率非常快速地分析电磁束(直到校准时间测量),而不需要任何移动的机械部件。 测量装置的应用领域是确定辐射的光学焦点,确定辐射的特殊特性,以及样品的光谱测量和/或光度测试。