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    • 1. 发明申请
    • System for interferometric fit testing
    • 干涉测试系统
    • US20040174531A1
    • 2004-09-09
    • US10731697
    • 2003-12-09
    • Carl Zeiss SMT AG
    • Rolf Freimann
    • G01B009/021
    • G01M11/0271G01B11/2441G01M11/005G01M11/0242G01M11/025G01N21/8806G03F7/706
    • A system for interferometric fit testing of a specimen having an aspherical surface in reflection, the specimen being a segment (2) (footprint) of a rotationally symmetrical basic body (1) (parent), comprises an interferometer (3) and a diffractive optical element (DOE) (5). An optical axis of the interferometer (3) in the beam direction behind the diffractive optical element (5) and an axis of rotation of the basic body (1) form an angle that differs from zero. The diffractive optical element (5) is designed in such a way that the rays produced by the interferometer (3) and falling into the diffractive optical element (5) strike the specimen (2) perpendicularly and from there run back in themselves.
    • 一种用于干涉测试的系统,其具有反射中的非球面表面的样本,所述样本是旋转对称的基体(1)(母体)的段(2)(占据面积),包括干涉仪(3)和衍射光学 元素(DOE)(5)。 在衍射光学元件(5)后面的光束方向上的干涉仪(3)的光轴和基体(1)的旋转轴线形成不同于零的角度。 衍射光学元件(5)被设计成使得由干涉仪(3)产生并落入衍射光学元件(5)中的光线垂直地撞击到样品(2)并从其中自身返回。
    • 2. 发明申请
    • Direct-to-digital holography reduction of reference hologram noise and fourier space smearing
    • 参考全息图噪声的直接数字全息减少和四维空间拖尾
    • US20040145745A1
    • 2004-07-29
    • US10349579
    • 2003-01-23
    • Edgar Voelkl
    • G01B009/021
    • G03H1/0866G01B9/021G03H2001/0456
    • Systems and methods are described for reduction of reference hologram noise and reduction of Fourier space smearing, especially in the context of direct-to-digital holography (off-axis interferometry). A method of reducing reference hologram noise includes: recording a plurality of reference holograms; processing the plurality of reference holograms into a corresponding plurality of reference image waves; and transforming the corresponding plurality of reference image waves into a reduced noise reference image wave. A method of reducing smearing in Fourier space includes: recording a plurality of reference holograms; processing the plurality of reference holograms into a corresponding plurality of reference complex image waves; transforming the corresponding plurality of reference image waves into a reduced noise reference complex image wave; recording a hologram of an object; processing the hologram of the object into an object complex image wave; and dividing the complex image wave of the object by the reduced noise reference complex image wave to obtain a reduced smearing object complex image wave.
    • 描述了用于减少参考全息图噪声和降低傅里叶空间拖尾的系统和方法,特别是在直接数字全息术(离轴干涉测量)的上下文中。 减少参考全息图噪声的方法包括:记录多个参考全息图; 将所述多个参考全息图处理成相应的多个参考图像波; 以及将相应的多个参考图像波变换为降噪噪声参考图像波。 减少傅立叶空间中的拖尾的方法包括:记录多个参考全息图; 将所述多个参考全息图处理成相应的多个参考复合图像波; 将对应的多个参考图像波变换为降噪噪声参考复数图像波; 记录物体的全息图; 将物体的全息图处理成物体复杂图像波; 并且通过减小的噪声参考复数图像波分割对象的复杂图像波,以获得减少的拖尾对象复数图像波。
    • 3. 发明申请
    • Method for three-dimensionally, optically measuring measuring objects
    • 用于三维地光学测量测量对象的方法
    • US20020149778A1
    • 2002-10-17
    • US10081769
    • 2002-02-20
    • Jochen Straehle
    • G01B009/021
    • G01B9/023G01B11/2441
    • A method is for three-dimensionally, optically measuring measuring objects by comparison with a reference object, where image data of the measuring object are acquired and compared to image data of the reference object, and the measuring object is directly or indirectly assessed with regard to deviations from the reference object. A quick and, at the same time, reliable assessment of the measuring object is achieved in that the measuring object and/or the reference object or a holographic recording of the measuring object and/or of the reference object are/is rotated relative to one another about at least one axis, the image data of the measuring object being acquired and the comparison being performed in various, relative rotational positions, in that an evaluation regarding a maximum agreement of the measuring object with the reference object is performed in the different comparisons, and in that the deviation is assessed in the rotational position determined by the maximum agreement.
    • 一种方法是三维地光学测量测量对象,与参考对象进行比较,其中获取测量对象的图像数据并将其与参考对象的图像数据进行比较,并且测量对象直接或间接地被评估为关于 偏离参考对象。 测量对象和/或参考对象或测量对象和/或参考对象的全息记录相对于一个旋转的快速同时可靠地评估测量对象 另一个关于至少一个轴,所获取的测量对象的图像数据和在各种相对旋转位置中进行比较,因为在不同的比较中执行关于测量对象与参考对象的最大一致性的评估 ,并且由最大协议确定的旋转位置评估偏差。
    • 4. 发明申请
    • Faster processing of multiple spatially-heterodyned direct to digital holograms
    • 更快地处理多个空间外置直接数字全息图
    • US20040212807A1
    • 2004-10-28
    • US10607840
    • 2003-06-27
    • Gregory R. HansonPhilip R. Bingham
    • G01B009/021
    • G03H1/0406G03H1/0443G03H1/0866G03H1/265G03H1/28G03H2001/0456G03H2001/046G03H2001/0469G03H2226/11G03H2226/13
    • Systems and methods are described for faster processing of multiple spatially-heterodyned direct to digital holograms. A method includes of obtaining multiple spatially-heterodyned holograms, includes: digitally recording a first spatially-heterodyned hologram including spatial heterodyne fringes for Fourier analysis; digitally recording a second spatially-heterodyned hologram including spatial heterodyne fringes for Fourier analysis; Fourier analyzing the recorded first spatially-heterodyned hologram by shifting a first original origin of the recorded first spatially-heterodyned hologram including spatial heterodyne fringes in Fourier space to sit on top of a spatial-heterodyne carrier frequency defined as a first angle between a first reference beam and a first, object beam; applying a first digital filter to cut off signals around the first original origin and performing an inverse Fourier transform on the result; Fourier analyzing the recorded second spatially-heterodyned hologram by shifting a second original origin of the recorded second spatially-heterodyned hologram including spatial heterodyne fringes in Fourier space to sit on top of a spatial-heterodyne carrier frequency defined as a second angle between a second reference beam and a second object beam; and applying a second digital filter to cut off signals around the second original origin and performing an inverse Fourier transform on the result, wherein digitally recording the first spatially-heterodyned hologram is completed before digitally recording the second spatially-heterodyned hologram and a single digital image includes both the first spatially-heterodyned hologram and the second spatially-heterodyned hologram.
    • 描述了用于更快处理多空间外差直接数字全息图的系统和方法。 一种包括获得多空间外差全息图的方法,包括:数字记录包括用于傅立叶分析的空间外差条纹的第一空间外差全息图; 数字记录包括用于傅立叶分析的空间外差条纹的第二空间外差全息图; 通过将所记录的第一空间外差全息图的第一原始原始位置(包括傅立叶空间中的空间外差条纹)移位到位于第一参考点之间的第一角度的空间外差载波频率之上,从而傅里叶分析所记录的第一空间外差全息图 光束和第一个物体光束; 施加第一数字滤波器以切断围绕第一原始原点的信号,并对该结果执行逆傅里叶变换; 通过将所记录的第二空间外差全息图的第二原始原点移动到傅立叶空间中的空间外差条纹,以置于空间外差载波频率的顶部上来对第二空间外差全息图进行傅立叶分析,该空间外差载波频率定义为第二参考 光束和第二物体光束; 以及施加第二数字滤波器以截断所述第二原始原点周围的信号并对所述结果执行逆傅里叶变换,其中在对所述第二空间外差全息图和单个数字图像进行数字记录之前完成数字记录所述第一空间外差全息图 包括第一空间外差全息图和第二空间外差全息图。
    • 6. 发明申请
    • Holographic particle-measuring apparatus
    • 全息粒子测量仪器
    • US20020167672A1
    • 2002-11-14
    • US10142909
    • 2002-05-10
    • Yukinobu AnezakiAtsuya OkamotoJun YamadaKenji Kanehara
    • G01B009/021
    • G01N15/0227G01N2015/0294G03H2001/0033
    • A holographic particle-measuring apparatus is provided that can improve the precision of measurement by photographing only particles through the elimination of noise. In an off-axis holographic optical image pick-up device (100), object beams (L1) that is a flux of parallel beams are irradiated onto particles (114) as a subject. At the same time, reference beams (L2) are incident, with an inclination, onto the object beams (L1) after being irradiated onto the particles (114). An interference fringe generated as a result of the interference between the object beams (L1) and the reference beams (L2) is recorded onto a recording material Noise elimination relay lenses (116a and 116b) are installed between the particles (114) and the recording material (115). Further, a noise elimination pinhole plate (117) having a pinhole (118) is installed between the lenses (116a and 116b) constituting the relay lens.
    • 提供一种全息粒子测量装置,其可以通过消除噪声仅仅拍摄颗粒来提高测量的精度。 在离轴全息光学图像拾取装置(100)中,作为对象的粒子(114)照射作为平行光束的物体束(L1)。 同时,在照射到颗粒(114)上之后,参考光束(L2)倾斜入射到物体光束(L1)上。 作为目标光束(L1)和参考光束(L2)之间的干涉产生的干涉条纹被记录在记录材料上,噪声消除中继透镜(116a和116b)安装在颗粒(114)和记录 材料(115)。 此外,在构成中继透镜的透镜(116a和116b)之间安装有具有针孔(118)的噪声消除针孔板(117)。
    • 8. 发明申请
    • Method and apparatus for testing objects
    • 用于测试物体的方法和装置
    • US20030038945A1
    • 2003-02-27
    • US09931183
    • 2001-08-17
    • Bernward Mahner
    • G01B009/021
    • G01B11/2441
    • 1. Method and apparatus for testing objects. 2.1 With interferometric test systems, the test object is frequently measured over several sections in order to realize a complete test. If special structural features are found, in particular defects, it is usually difficult to localize the structural features shown on the result images on the object. 2.2 It is the object of the new method to transfer the interferometrically measured data from the various sections to a joint object coordinate system. To achieve this object, the shape of the object is measured and the spatial coordinates for the deformation data on the object surface are determined from this. 2.3 Thus, a method is realized with the invention, which permits determining the exact spatial orientation and position of the discovered structural features on the object. On the one hand, the defects on the object can thus be localized precisely while, on the other hand, an exact quantitative evaluation of the results is possible.
    • 1.用于测试物体的方法和装置。 2.1使用干涉测试系统,测试对象经常在几个部分进行测量,以实现完整的测试。 如果发现特殊的结构特征,特别是缺陷,通常很难将结果图像上显示的结构特征定位在物体上。 2.2新方法的目的是将干涉测量数据从各个部分传递到联合对象坐标系。 为了实现该目的,测量对象的形状,并根据此确定物体表面上的变形数据的空间坐标。 2.3因此,通过本发明实现了一种方法,其允许确定所发现的结构特征在物体上的准确的空间取向和位置。 一方面,物体上的缺陷因此可以精确地定位,而另一方面,可以精确地定量评估结果。
    • 9. 发明申请
    • Method and apparatus for measuring pressure
    • 用于测量压力的方法和装置
    • US20020186377A1
    • 2002-12-12
    • US10121009
    • 2002-04-11
    • Modern Optical Technologies LLC.
    • Igor KuskovskyMark L. Kuskovsky
    • G01B009/021
    • G01L9/0076G03H1/0248G03H2001/0033
    • In one embodiment, an apparatus for measuring pressure is provided including a holographic element containing at least one volume hologram; a reference member; a sensing member coupled to the pressure being measured, and at least one light source; wherein the device operates by passing a reference light beam between the reference member and the holographic element, the reference beam having a constant optical path, and passing a sensing light beam between the sensing member and the holographic element, the sensing beam having optical path that varies as a function of the pressure; the volume hologram converting the reference beam and the sensing beam into an information light beam the intensity of which is a measure of the pressure. Preferably, the reference member and the sensing member are made from the same material.
    • 在一个实施例中,提供了一种用于测量压力的装置,包括包含至少一个体积全息图的全息元件; 参考成员; 耦合到被测量的感测构件和至少一个光源; 其中所述装置通过在参考构件和全息元件之间通过参考光束而进行操作,所述参考光束具有恒定的光程,并且将感测光束在感测构件和全息元件之间通过,所述感测光束具有光路, 随压力而变化; 体积全息图将参考光束和感测光束转换成其强度是压力测量的信息光束。 优选地,参考构件和感测构件由相同的材料制成。
    • 10. 发明申请
    • Hyper-resolution, topographic, holographic imaging apparatus and method
    • 超分辨率,地形,全息成像设备和方法
    • US20020085207A1
    • 2002-07-04
    • US09753502
    • 2000-12-27
    • John N. HaitMaran C. Pate
    • G01B009/021
    • G01B9/021
    • Multi-domain, phase-compensated, differential-coherence detection of photonic signals for interferometric processes and devices may be manufactured holographically and developed in situ or with an automatic registration between holograms and photonic sources in a single frame. Photonic or electronic post processing may include outputs from a cycling or rotation between differently phased complementary outputs of constructive and destructive interference. A hyper-selective, direct-conversion, expanded-bandpass filter may rely on an expanded bandpass for ease of filtering, with no dead zones for zero beat frequency cases. A hyper-heterodyning, expanded bandpass system may also provide improved filtering and signal-to-noise ratios. An ultra-high-resolution, broadband spectrum analyzer may operate in multiple domains, including complex nullfingerprintsnull of phase, frequency, and other parameters. The associated technologies of the invention may be used to produce extreme precision in multi-domain locking of sophisticated waveforms varying in several domains. Phase-masking techniques may provide phased arrays of complementary outputs over a broad band, such as may be implemented in a projected phase-mask, multiple phase interferometer. Topographic holographic imaging and projection techniques are enabled at very fine resolutions, while minimizing required information for systems such as holographic television. Phase-stabilization, modulation, compensation and the like are enabled by devices and methods in accordance with the invention, and may be servo-controlled.
    • 用于干涉测量过程和器件的光子信号的多域,相位补偿,差分相干检测可以全息地制造并且在原位或在单个帧中的全息图和光子源之间的自动配准下开发。 光子或电子后处理可以包括来自建设性和破坏性干扰的不同相位互补输出之间的循环或旋转的输出。 超选择性,直接转换,扩展带通滤波器可以依靠扩展的带通以便于滤波,对于零拍频率情况没有死区。 超外差扩展带通系统还可以提供改进的滤波和信噪比。 超高分辨率宽带频谱分析仪可以在多个领域进行操作,包括相位,频率和其他参数的复杂“指纹”。 本发明的相关技术可以用于在多域锁定中产生在多个域中变化的复杂波形的极高精度。 相位掩蔽技术可以在宽带上提供互补输出的相控阵列,例如可以在投影相位掩模,多相干涉仪中实现。 地形全息成像和投影技术能够以非常精细的分辨率实现,同时最小化诸如全息电视等系统的所需信息。 通过根据本发明的装置和方法实现相位稳定,调制,补偿等,并且可以被伺服控制。