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    • 5. 发明授权
    • Apparatus for indexing and registering a selected deposition mask to a
substrate and method therefor
    • 用于将选定的沉积掩模分选和对准衬底的设备及其方法
    • US4492180A
    • 1985-01-08
    • US243825
    • 1981-03-16
    • Richard T. Martin
    • Richard T. Martin
    • C23C14/04C23C14/56G03F9/00C23C13/08C23C13/06
    • C23C14/568C23C14/042G03F9/00
    • Apparatus for indexing and accurately registering a selected one of a plurality of deposition masks in operative relationship to a substrate comprising carriage means for supporting a plurality of deposition masks in an aligned spaced relationship relative to each other wherein each of the deposition masks has a selected number of prealigned registration members located thereon in a predetermined pattern and which are adapted to co-act with reference registration members loaded thereagainst, gantry means for supporting a substrate at a deposition station above the surface of the deposition masks having the prealigned registration members located thereon, reference registration members which are located on the substrate or around the periphery of the gantry means and which are directed towards and adapted to be loaded against the prealigned registration members to position the gantry means and the substrate relative to the selected one of said plurality of deposition masks, indexing means for transporting the carriage means including one or more deposition masks supported thereby or gantry means along a predetermined path and to index a selected one of the plurality of deposition masks to a deposition station, and gantry loading means which moves the carriage means and gantry means having the substrate and reference registration members toward each other to accurately register the substrate at a predetermined space and position relative to an indexed selected one of the plurality of deposition masks is shown. A method for indexing and accurately registering a substrate to a deposition mask is also shown.
    • 用于将与多个沉积掩模中选定的一个沉积掩模进行索引和精确对准的装置,所述沉积掩模具有可操作的关系,该基板包括用于相对于彼此以对准的间隔关系支撑多个沉积掩模的托架装置,其中每个沉积掩模具有选定数量 以预定图案位于其上的预对准登记构件,其适于与加载在其上的参考登记构件共同作用,用于在位于其上的预对准登记构件的沉积掩模的表面上方的沉积站处支撑基板的台架装置, 参考对准构件,其位于基板上或围绕台架装置的周边,并且朝向并适于相对于预对准配准构件加载以相对于所选择的多个沉积物中的所选择的一个沉积物定位台架装置和衬底 面具,索引mea 用于传送包括由其支撑的一个或多个沉积掩模的托架装置或沿着预定路径的台架装置并将多个沉积掩模中的所选一个索引到沉积站;以及台架装载装置,其移动托架装置和龙门架装置 使基板和基准对准元件彼此朝向彼此精确地对准衬底至预定的空间和相对于多个沉积掩模中选定的一个索引的位置的位置。 还示出了用于将衬底分度和精确地配准到沉积掩模的方法。
    • 6. 发明授权
    • Method for controlling the edge gradient of a layer of deposition
material
    • 用于控制沉积材料层的边缘梯度的方法
    • US4469719A
    • 1984-09-04
    • US332497
    • 1981-12-21
    • Richard T. Martin
    • Richard T. Martin
    • C23C14/04C23C13/06
    • C23C14/044
    • A method for controlling the slope of the edge gradient of a layer of vapor deposition material onto a substrate from an evaporation source of vapor deposition material comprising the steps of forming a flux of vapor deposition material having an effective source cross-sectional area and shape from an evaporation source of a vapor deposition material located at a known position, indexing a deposition mask having a plurality of apertures extending therethrough such that the mask is in a spaced relationship from the source defining a source-to-mask distance and positioned in the flux of vapor deposition material to permit the flux of vapor deposition to pass through the apertures, registering a substrate in a spaced relationship from the deposition mask defining a mask-to-substrate distance to permit the flux of the vapor deposition material passing through the apertures in the deposition mask to impinge onto the substrate forming a layer of vapor deposit material thereon, controlling at least one of the effective source cross-sectional area and shape of the flux of vapor deposition material, position of the evaporation source of a deposition material relative to the deposition mask, the magnitude of the substrate-to-mask distance and the magnitude of the mask-to-source distance to produce an edge onto the deposited layer of the vapor deposition material having the desired gradient is shown. A product produced by the process is also shown.
    • 一种用于从气相沉积材料的蒸发源控制蒸镀材料层到衬底上的边缘梯度斜率的方法,包括以下步骤:形成具有有效源截面积和形状的气相沉积材料焊剂 位于已知位置的气相沉积材料的蒸发源,对沉积掩模进行分度,所述沉积掩模具有延伸穿过其中的多个孔,使得所述掩模与所述源间隔开,所述源限定了源到掩模的距离,并定位在所述焊剂中 的气相沉积材料以允许气相沉积的通量穿过孔,以与隔离掩模成间隔的关系将衬底对准,其限定掩模到衬底的距离,以允许气相沉积材料的通量穿过孔中的孔 沉积掩模冲击到衬底上,在其上形成一层气相沉积材料,控制在其上 气相沉积材料的通量的有效源截面积和形状中的至少一个,沉积材料的蒸发源相对于沉积掩模的位置,衬底对掩模距离的大小以及 示出了掩模到源距离以产生具有期望梯度的气相沉积材料的沉积层上的边缘。 还显示了通过该方法生产的产品。
    • 7. 发明公开
    • Verfahren und Herstellung von metallfreien Streifen bei der Metallbedampfung eines Isolierstoffbandes und Vorrichtung zur Durchführung des Verfahrens
    • 一种用于执行该方法的方法和一个绝缘带的金属化过程中的无金属条带制造,和设备。
    • EP0073949A2
    • 1983-03-16
    • EP82107330.1
    • 1982-08-12
    • SIEMENS AKTIENGESELLSCHAFT
    • Neuwald, Anselm, Dipl.-Phys.
    • C23C13/06
    • C23C14/042
    • Das Verfahren zur Herstellung von metallfreien Streifen (18) bei der Metallbedampfung eines für den Einsatz in elektrischen Kondensatoren bestimmten Isolierstoffbandes (12) sieht vor, daß das zu metallisierende Isolierstoffband (12) und ein mit gleicher Geschwindigkeit mitlaufendes Abdeckband (13) zunächst in Kontakt gebracht werden, daß dann durch Aufdampfen von ÖI ein Film (15) hergestellt wird, der auch die seitlichen Flächen (16) des Abdeckbandes (13) sowie geringfügig auch angrenzende Flächenbereiche (14) des Isolierstoffbandes (12) bedeckt. Die Vorrichtung für dieses Verfahren enthält eine Kühlwalze, einen Metallverdampfer, einen Ölverdampfer, der in Laufrichtung des Abdeckbandes vor dem Metallverdampfer angeordnet ist, Vorratsrollen für die zu metallisierenden Bänder und eine Reinigungsvorrichtung, die in Laufrichtung des Abdeckbandes vor dem Ölverdampfer angeordnet ist.
    • 用于产生在一个特定的金属化无金属条带(18),用于在电电容器用绝缘带(12)的方法,提供了待金属化的材料绝缘带(12)和空转速度相同覆盖条(13)被第一接触 是,其然后被油(15)的膜的气相沉积法制备覆盖和绝缘带(12)的盖条(13),并且还稍微相邻表面区域(14)的侧表面(16)。 该方法的装置包括一个冷却辊,金属蒸发器,设置在金属蒸发器之前运行盖条的方向上的油蒸发器,供应辊待金属带以及设置在油蒸发器之前遮蔽胶带的运行方向的清洁装置。