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1. 发明授权

US06332372B1 Arm structure for man type working robots 有权
标题翻译：人型工作机器人臂结构
公开(公告)号：US06332372B1
公开(公告)日：2001-12-25
申请号：US09581220
申请日：2000-06-22
申请人： Toru Takenaka , Takayuki Kawai , Tadaaki Hasegawa , Takashi Matsumoto , Hiroshi Gomi , Hideaki Takahashi
发明人： Toru Takenaka , Takayuki Kawai , Tadaaki Hasegawa , Takashi Matsumoto , Hiroshi Gomi , Hideaki Takahashi
IPC分类号： B25J906
CPC分类号： B25J9/06 , B25J17/025 , Y10T74/20329
摘要： An arm structure for anthropomorphic robots minimizes the occurrence of a singularity state of a shoulder joint assembly while the arm of the anthropomorphic robot is normally working, for thereby allowing the arm to operate smoothly. The position and posture of first through third joints (11), (13), (15) of a shoulder joint assembly (5) and the position of an elbow joint assembly (6) with respect to the third joint (15) are established such that the elbow joint assembly (6) is located above a horizontal plane lying through the point of intersection of the axes (10), (12), (14) of the first through third joints (11), (13), (15), while the shoulder joint assembly (5) is operated into a singularity state wherein the first axis (10) of the first joint (11) and the third axis (14) of the third joint (15) are aligned with each other and the elbow joint assembly (6) is positioned laterally of a torso (1).
摘要翻译：用于拟人机器人的臂结构使人形机器人的臂正常工作时，使肩关节组件的奇点状态的发生最小化，从而允许手臂平稳地操作。建立肩关节组件（5）的第一至第三关节（11），（13），（15）和肘关节组件（6）相对于第三关节（15）的位置和姿势使得肘关节组件（6）位于通过第一至第三关节（11），（13），（13），（13）的轴线（10），（12），（14） 15），而肩关节组件（5）被操作成其中第一关节（11）的第一轴线（10）和第三关节（15）的第三轴线（14）彼此对准的奇点状态并且肘关节组件（6）位于躯干（1）的侧面。

2. 发明授权

US06516681B1 Four-degree-of-freedom parallel robot 有权
标题翻译：四自由度并联机器人
公开(公告)号：US06516681B1
公开(公告)日：2003-02-11
申请号：US09662743
申请日：2000-09-15
申请人： Francois Pierrot , Olivier Company , Tetsuro Shibukawa , Koji Morita
发明人： Francois Pierrot , Olivier Company , Tetsuro Shibukawa , Koji Morita
IPC分类号： B25J906
CPC分类号： B25J17/0266 , A61B2034/304 , B25J9/0051 , Y10T74/20305 , Y10T74/20317
摘要： A four-degree-of-freedom parallel robot capable of displacing a traveling plate with four degrees of freedom at a high speed and a high acceleration and positioning the traveling plate with high rigidity and high precision. The four-degree-of-freedom parallel robot has four actuators fixed to a base, four parallel linkages each of which is coupled at its upper end to a tip end of an arm of each of the actuators through a kinematic element such as a universal joint, and a traveling plate whose four corners are coupled to lower ends of the parallel linkages through kinematic elements. By controlling the actuators, a main member of the traveling plate is displaced with four degrees of freedom, i.e., translated in all directions and rotated around a predetermined axis. Only axial forces are applied to rods constituting the parallel linkages. Thus, the traveling plate can be positioned at a high speed and with high rigidity as well as high precision.
摘要翻译：一种四自由度平行机器人，能够以高速和高加速度的四自由度移动行驶板，并且以高刚性和高精度定位行进板。四自由度并联机器人具有固定在基座上的四个致动器，四个平行连杆，每个致动器的上端通过诸如通用的运动元件联接到每个致动器的臂的末端接头和行星板，其四个角通过运动元件联接到平行连杆的下端。通过控制致动器，行进板的主要构件以四个自由度移位，即在所有方向上平移并围绕预定轴线旋转。只有轴向力施加到构成平行连杆的杆上。因此，移动板可以高速，高刚性和高精度地定位。

3. 发明授权

US06585476B1 Surface mounting device 失效
标题翻译：表面贴装装置
公开(公告)号：US06585476B1
公开(公告)日：2003-07-01
申请号：US09442762
申请日：1999-11-18
申请人： Yun Hyung Yi
发明人： Yun Hyung Yi
IPC分类号： B25J906
CPC分类号： H05K13/0413 , H05K13/0406 , Y10T29/4913 , Y10T29/49131
摘要： A surface mounting device is provided on which work can be performed more efficiently and correctly by providing one or more moving means movable together or independently to a predetermined portion of a X-Y gantry. The surface mounting device includes one or more X frames configured to be driven in a predetermined direction together or independently; main driving means for driving the one or more X frames; one or more moving means disposed on a selected portion of the X frames and having one or more manipulators movable in a predetermined direction together or independently; sub driving means configured to drive the one or more manipulators together or independently; one or more head and vision portions disposed on the one or more moving means; and a component supplying portion configured to supply a component to the head.
摘要翻译：提供一种表面安装装置，通过提供一个或多个移动装置可以与X-Y机架的预定部分一起或独立地移动，可以更有效和更正确地进行作业。所述表面安装装置包括被配置为一起或独立地沿预定方向驱动的一个或多个X框架; 用于驱动所述一个或多个X帧的主驱动装置; 一个或多个移动装置，设置在所述X个框架的选定部分上，并具有一个或多个可沿预定方向一起或独立移动的操纵器; 辅助驱动装置，被配置为将所述一个或多个操纵器一起驱动或独立地驱动; 设置在一个或多个移动装置上的一个或多个头部和视觉部分; 以及部件供给部，构成为向头部供给部件。

4. 发明授权

US06450757B1 Conveyor system 失效
标题翻译：输送系统
公开(公告)号：US06450757B1
公开(公告)日：2002-09-17
申请号：US09856097
申请日：2001-05-17
申请人： Hiroaki Saeki , Keisuke Kondoh
发明人： Hiroaki Saeki , Keisuke Kondoh
IPC分类号： B25J906
CPC分类号： H01L21/687 , B25J9/1065 , B25J9/107 , H01L21/67742 , Y10S414/13 , Y10T74/20305 , Y10T74/20329
摘要： In most cases, a hot, corrosive atmosphere is created in, for example, a semiconductor wafer processing chamber. When an arm including belts, such as steel belts, is moved into such a semiconductor wafer processing chamber, the belts are exposed to the hot, corrosive atmosphere. Belts, such as steel belts, have limited heat resistance and corrosion resistance and the hot, corrosive atmosphere in the processing chamber shortens the life of the belts. A carrying device of the present invention has a frog leg type arm (3) and a wafer holder (4) connected to the frog leg type arm (3). The wafer holder (4) is pivotally connected to front end parts of a first front arm (8A) and a second front arm (8B) by coaxial joints (10). The wafer holder (4) is linked to the first front arm (8A) and the second front arm (8B) by a posture maintaining linkage (5) including two antiparallel linkages capable of controlling the turning of the wafer holder (4) relative to the first and the second front arms (8A, 8B).
摘要翻译：在大多数情况下，在例如半导体晶片处理室中产生热的腐蚀性气体。当包括诸如钢带的带的臂移动到这种半导体晶片处理室中时，带暴露于热的腐蚀性气氛中。皮带，如钢带，具有有限的耐热性和耐腐蚀性，加工室内的热腐蚀性气氛缩短了皮带的使用寿命。本发明的携带装置具有连接到青蛙腿型臂（3）的蛙腿式臂（3）和晶片保持架（4）。晶片保持架（4）通过同轴接头（10）枢转地连接到第一前臂（8A）和第二前臂（8B）的前端部分。晶片保持器（4）通过包括两个能够控制晶片保持器（4）的相对转动的两个反平行连杆的姿态保持连杆（5）连接到第一前臂（8A）和第二前臂（8B）第一和第二前臂（8A，8B）。

5. 发明授权

US06382902B1 Method for controlling handling robot 有权
标题翻译：控制机器人的控制方法
公开(公告)号：US06382902B1
公开(公告)日：2002-05-07
申请号：US09402397
申请日：1999-10-05
申请人： Shunsuke Sugimura
发明人： Shunsuke Sugimura
IPC分类号： B25J906
CPC分类号： H01L21/68707 , B25J9/107 , H01L21/67742 , Y10S414/137 , Y10S414/139 , Y10S414/141
摘要： A handling robot control method is disclosed for a handling robot disposed in a transfer chamber (1) having a plurality of process chamber stations (2e) arranged around it in communication therewith via respective gates (6), the robot having a first and a second carrier tables (8a, 8b) that are deviated in turning angular position from one to the other about a center of turning, the robot performing an operation to move the first and second carrier tables to turn jointly in the transfer chamber and also an operation to move the first and second carrier tables individually either to project through a said gate into a said process chamber station or to retract into the transfer chamber. The method comprises: overlapping the operation to move the carrier tables to project and to retract with the operation to move the first and second carrier tables to turn jointly.
摘要翻译：公开了一种处理机器人控制方法，用于设置在具有经由各个门（6）与其连通的多个处理室站（2e）的传送室（1）中的处理机器人控制方法，所述机器人具有第一和第二承载台（8a，8b），其围绕转动中心从一个转动角度位置偏离，所述机器人执行使所述第一和第二承载台在所述传送室中共同转动的操作，以及操作将第一和第二承载台单独移动以通过所述门突出到所述处理室站中或者缩回到传送室中。该方法包括：使操作重叠以使承载台移动并且随着操作移动第一和第二承载台以共同转动的操作而缩回。

6. 发明授权

US06322312B1 Mechanical gripper for wafer handling robots 有权
标题翻译：用于晶片处理机器人的机械夹具
公开(公告)号：US06322312B1
公开(公告)日：2001-11-27
申请号：US09272658
申请日：1999-03-18
申请人： Satish Sundar
发明人： Satish Sundar
IPC分类号： B25J906
CPC分类号： H01L21/68707 , B25J15/0206
摘要： The present invention generally provides a robot that can transfer workpieces, such as silicon wafers, at increased speeds and accelerations and decelerations. More particularly, the present invention provides a robot wrist associated with the robot arm for mechanically clamping a workpiece to a workpiece handling member attached to the arm. The workpiece clamp selectively applies sufficient force to hold the workpiece and prevent slippage and damage to the workpiece during rapid rotation and linear movement of the handling member. In one embodiment, a clamp for securing silicon wafers uses two clamp fingers connected to a single flexure member to position and hold the wafer with minimal particle generation and wafer damage. The clamp is designed so that wafers are normally clamped except near full extension of the workpiece handling member to deliver or pick up a wafer.
摘要翻译：本发明通常提供一种能够以增加的速度和加速度和减速度传送诸如硅晶片的工件的机器人。更具体地，本发明提供了一种与机器人臂相关联的机械手，用于将工件机械地夹持到附接到臂的工件处理构件。工件夹具选择性地施加足够的力来保持工件，并且在处理构件的快速旋转和线性移动期间防止滑动和损坏工件。在一个实施例中，用于固定硅晶片的夹具使用连接到单个挠曲构件的两个夹钳指状件，以最小的颗粒产生和晶片损坏来定位和保持晶片。夹具被设计成使得晶片通常被夹紧，除了工件处理构件的完全延伸以便递送或拾取晶片。

7. 发明授权

US06178842B2 Industrial robot 失效
标题翻译：工业机器人
公开(公告)号：US06178842B2
公开(公告)日：2001-01-30
申请号：US09197667
申请日：1998-11-23
申请人： Yuji Murata , Isao Arai , Nobutaka Fukayama , Kiyoshi Kanitani
发明人： Yuji Murata , Isao Arai , Nobutaka Fukayama , Kiyoshi Kanitani
IPC分类号： B25J906
CPC分类号： B25J9/047 , B25J18/005 , Y10T74/20305 , Y10T74/20317
摘要： An industrial robot is provided which has a compact and of low height body operable within an operating range not exceed the height of the robot during operation, and yet is able to secure a wide operating range of the near front side of the robot. The robot has a fixed base, a rotary base mounted on the fixed base rotatably around a vertical swing axis, a first arm mounted on the rotary base rotatably around a horizontal first rotational axis, a second arm mounted on the first arm rotatably around a horizontal second rotational axis and a wrist mounted on the distal end of the second arm rotatably around a longitudinal axis thereof. The first arm is made operable to hang down in a position where the axis of the first arm is perpendicular to the installation surface of the robot and outwardly offset from the outer surface of the fixed base, the operating range of the first arm which interfere with the fixed base is made so small and the operating range of the front side of the robot is much enlarged.
摘要翻译：提供了一种工业机器人，其具有紧凑且低度高的身体，其操作范围在操作范围内不超过机器人的高度，并且能够确保机器人近前侧的宽工作范围。所述机器人具有固定基座，旋转基座，其可旋转地围绕垂直摆动轴线安装在所述固定基座上;第一臂部，其围绕水平第一旋转轴线可旋转地安装在所述旋转基座上;第二臂部，其可旋转地围绕水平第二旋转轴线和安装在第二臂的远端上的手腕围绕其纵向轴线可旋转。第一臂可操作地悬挂在第一臂的轴线垂直于机器人的安装表面并向外偏离固定基座的外表面的位置，第一臂的操作范围与固定底座变小，机器人前侧的工作范围大大扩大。

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