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1. 发明授权

US06319102B1 Capacitor coupled chuck for carbon dioxide snow cleaning system 有权
标题翻译：电容耦合卡盘，用于二氧化碳除雪系统
公开(公告)号：US06319102B1
公开(公告)日：2001-11-20
申请号：US09350776
申请日：1999-07-09
申请人： Jih-Shiuan (Sam) Luo
发明人： Jih-Shiuan (Sam) Luo
IPC分类号： B24C504
CPC分类号： H01L21/67051 , B24C1/003 , B24C3/322
摘要： The cryogenic aerosol substrate cleaning system of the present invention includes a substrate support system that is disposed within a cleaning enclosure. A wafer, or other article to be cleaned is disposed upon the substrate support system. A cryogenic aerosol spray cleaning device is disposed within the enclosure to direct a cryogenic aerosol spray upon the surface of the wafer. The substrate support system includes an electrically floating chuck which supports the wafer, such that the chuck is separated from a grounded plane by an insulator. The chuck is capacitance-coupled to the grounded plane, and in alternative embodiments the chuck is also electrically coupled to the grounded plane. The substrate support system of the present invention acts to reduce the creation of tribocharges on the wafer, such that damage to wafers caused by such tribocharges is reduced and a cleaner wafer surface is created.
摘要翻译：本发明的低温气溶胶基板清洗系统包括设置在清洁外壳内的基板支撑系统。将要清洁的晶片或其它制品设置在基板支撑系统上。低温气溶胶喷雾清洁装置设置在外壳内以将低温气溶胶喷雾引导到晶片的表面上。基板支撑系统包括支撑晶片的电浮动卡盘，使得卡盘通过绝缘体与接地平面分离。卡盘电容耦合到接地平面，并且在替代实施例中，卡盘也电耦合到接地平面。本发明的基板支撑系统用于减少晶片上的摩擦电荷的产生，从而减少由这种摩擦带电引起的对晶片的损坏，并且产生更清洁的晶片表面。

2. 发明授权

US06755725B2 Method and apparatus for fluid jet formation 失效
公开(公告)号：US06755725B2
公开(公告)日：2004-06-29
申请号：US09919666
申请日：2001-07-31
申请人： Mohamed A. Hashish , Steven J. Craigen , Felice M. Sciulli , Yasuo Baba
发明人： Mohamed A. Hashish , Steven J. Craigen , Felice M. Sciulli , Yasuo Baba
IPC分类号： B24C504
CPC分类号： B26F3/004 , B24C5/04 , Y10T83/0591 , Y10T83/2109
摘要： A method and apparatus for controlling the coherence of a high-pressure fluid jet directed toward a selected surface. In one embodiment, the coherence is controlled by manipulating a turbulence level of the fluid forming the fluid jet. The turbulence level can be manipulated upstream or downstream of a nozzle orifice through which the fluid passes. For example, in one embodiment, the fluid is a first fluid and a secondary fluid is entrained with the first fluid. The resulting fluid jet, which includes both the primary and secondary fluids, can be directed toward the selected surface so as to cut, mill, roughen, peen, or otherwise treat the selected surface. The characteristics of the secondary fluid can be selected to either increase or decrease the coherence of the fluid jet. In other embodiments, turbulence generators, such as inverted conical channels, upstream orifices, protrusions and other devices can be positioned upstream of the nozzle orifice to control the coherence of the resulting fluid jet.

3. 发明授权

US06626738B1 Performance fan nozzle 有权
标题翻译：性能风扇喷嘴
公开(公告)号：US06626738B1
公开(公告)日：2003-09-30
申请号：US10155729
申请日：2002-05-28
申请人： James Shank
发明人： James Shank
IPC分类号： B24C504
CPC分类号： B24C1/086 , B24C1/003 , B24C5/04 , B24C11/00
摘要： A blast nozzle is provided with a converging inlet portion, a venturi orifice and a diverging fan-shaped outlet portion. The converging inlet portion and orifice have a round cross section and the diverging fan-shaped outlet portion has an elliptical cross section from beyond the orifice to an outlet.
摘要翻译：鼓风喷嘴设有会聚入口部分，文丘里孔口和发散的扇形出口部分。会聚入口部分和孔口具有圆形横截面，并且发散的扇形出口部分具有从孔口到出口的椭圆形横截面。

4. 发明授权

US06464567B2 Method and apparatus for fluid jet formation 有权
公开(公告)号：US06464567B2
公开(公告)日：2002-10-15
申请号：US09919634
申请日：2001-07-31
申请人： Mohamed A. Hashish , Steven J. Craigen , Felice M. Sciulli , Yasuo Baba
发明人： Mohamed A. Hashish , Steven J. Craigen , Felice M. Sciulli , Yasuo Baba
IPC分类号： B24C504
CPC分类号： B26F3/004 , B24C5/04 , Y10T83/0591 , Y10T83/2109
摘要： A method and apparatus for controlling the coherence of a high-pressure fluid jet directed toward a selected surface. In one embodiment, the coherence is controlled by manipulating a turbulence level of the fluid forming the fluid jet. The turbulence level can be manipulated upstream or downstream of a nozzle orifice through which the fluid passes. For example, in one embodiment, the fluid is a first fluid and a secondary fluid is entrained with the first fluid. The resulting fluid jet, which includes both the primary and secondary fluids, can be directed toward the selected surface so as to cut, mill, roughen, peen, or otherwise treat the selected surface. The characteristics of the secondary fluid can be selected to either increase or decrease the coherence of the fluid jet. In other embodiments, turbulence generators, such as inverted conical channels, upstream orifices, protrusions and other devices can be positioned upstream of the nozzle orifice to control the coherence of the resulting fluid jet.

5. 发明授权

US06827637B2 Waterjet cutting system and method of operation 失效
标题翻译：水刀切割系统及其操作方法
公开(公告)号：US06827637B2
公开(公告)日：2004-12-07
申请号：US10075002
申请日：2002-02-13
申请人： David M. Lewin , Timothy D. O'Keeffe
发明人： David M. Lewin , Timothy D. O'Keeffe
IPC分类号： B24C504
CPC分类号： B24C7/0023 , B24C1/045
摘要： A waterjet cutting system and method of operating such system are disclosed. The waterjet cutting system includes an inflatable and deflatable diaphragm to control the mixing of abrasive particulate material and liquid in a stream used to abrade a target object.
摘要翻译：公开了一种水射流切割系统和操作该系统的方法。水刀切割系统包括可充气和可放气的隔膜，以控制用于磨擦目标物体的流中的磨料颗粒材料和液体的混合。

6. 发明授权

US06280302B1 Method and apparatus for fluid jet formation 有权
公开(公告)号：US06280302B1
公开(公告)日：2001-08-28
申请号：US09275520
申请日：1999-03-24
申请人： Mohamed A. Hashish , Steven J. Craigen , Felice M. Sciulli , Yasuo Baba
发明人： Mohamed A. Hashish , Steven J. Craigen , Felice M. Sciulli , Yasuo Baba
IPC分类号： B24C504
CPC分类号： B26F3/004 , B24C5/04 , Y10T83/0591 , Y10T83/2109
摘要： A method and apparatus for controlling the coherence of a high-pressure fluid jet directed toward a selected surface. In one embodiment, the coherence is controlled by manipulating a turbulence level of the fluid forming the fluid jet. The turbulence level can be manipulated upstream or downstream of a nozzle orifice through which the fluid passes. For example, in one embodiment, the fluid is a first fluid and a secondary fluid is entrained with the first fluid. The resulting fluid jet, which includes both the primary and secondary fluids, can be directed toward the selected surface so as to cut, mill, roughen, peen, or otherwise treat the selected surface. The characteristics of the secondary fluid can be selected to either increase or decrease the coherence of the fluid jet. In other embodiments, turbulence generators, such as inverted conical channels, upstream orifices, protrusions and other devices can be positioned upstream of the nozzle orifice to control the coherence of the resulting fluid jet.

7. 发明授权

US06193589B1 Hand piece apparatus for abrasive cleaning devices 失效
标题翻译：用于研磨清洁装置的手动装置
公开(公告)号：US06193589B1
公开(公告)日：2001-02-27
申请号：US09336581
申请日：1999-06-21
申请人： Ben M. Khalaj
发明人： Ben M. Khalaj
IPC分类号： B24C504
CPC分类号： B24C7/0046 , B24C3/065 , B24C9/003
摘要： An improved hand piece apparatus for use with abrasive cleaning devices uses a control switch that can be controlled manually by an operator to controllably regulate the amount a mixture of a pressurized air with abrasive particles at the nozzle head inlet port of the nozzle head assembly.
摘要翻译：用于研磨清洁装置的改进的手持式装置使用可由操作者手动控制的控制开关，以可控制地调节加压空气与喷嘴头组件的喷嘴头入口处的磨料颗粒的混合量。

8. 发明授权

US06695686B1 Method and device for generating a two-phase gas-particle jet, in particular containing CO2 dry ice particles 失效
标题翻译：用于产生两相气体颗粒射流的方法和装置，特别是含有二氧化碳干冰颗粒
公开(公告)号：US06695686B1
公开(公告)日：2004-02-24
申请号：US09622708
申请日：2000-12-04
申请人： Hans Frohlich , Sabine Gebhardt , Berthold Trampusch
发明人： Hans Frohlich , Sabine Gebhardt , Berthold Trampusch
IPC分类号： B24C504
CPC分类号： B24C5/04 , B24C1/003
摘要： The present invention relates to a method and a device for generating a two-phase gas-particle jet for treating surfaces by means of particles, in particular CO2 dry ice particles (22), using a two-phase gas-particle jet. To this end, the CO2 dry ice particles (22) are fed with a, tangential flow to a blasting chamber (30) in such a manner that the CO2 dry ice particles (22) are forced into a rotational movement about an axis of flow (50), the angular velocity of this rotational movement then being increased in the direction of flow by means of a blasting nozzle (40), so that maximum speeds occur in the blasting-nozzle outlet (42). The two-phase gas-particle jet emerging from the blasting-nozzle outlet (42) is formed in such a way that the solid-phase CO2 dry ice particles (22) are arranged in a uniform ring shape with an enlarged external diameter. The invention achieves in particular a considerable rise in the surface power when cleaning surfaces by means of CO2 dry ice particles (22).
摘要翻译：本发明涉及使用两相气体 - 颗粒射流产生用于通过颗粒，特别是CO 2干冰颗粒（22）处理表面的两相气体 - 颗粒射流的方法和装置。为此，CO 2干冰颗粒（22）以这样的方式进料到切向腔（30）的切向流，使得CO 2干冰颗粒（22）被迫进入围绕流动轴线的旋转运动（50）中，所述旋转运动的角速度随后通过喷砂喷嘴（40）在流动方向上增加，从而在喷丸嘴出口（42）中出现最大速度。从爆破喷嘴出口（42）出射的两相气体 - 微粒喷射形成为使得固相CO 2干冰颗粒（22）以扩大的外径排列成均匀的环状。当通过CO 2干冰颗粒（22）清洁表面时，本发明特别实现了表面功率的显着提高。

9. 发明授权

US06464570B1 Omnidirectional shot nozzle 失效
标题翻译：全方位喷嘴
公开(公告)号：US06464570B1
公开(公告)日：2002-10-15
申请号：US09906976
申请日：2001-07-17
申请人： James Stephen Shaw , Mark Joseph Rechtsteiner , William Douglas Rouse
发明人： James Stephen Shaw , Mark Joseph Rechtsteiner , William Douglas Rouse
IPC分类号： B24C504
CPC分类号： B24C1/083 , B24C1/04 , B24C1/086 , B24C3/22 , B24C5/04
摘要： A nozzle includes a tube and a flared deflector extending coaxially from an outlet thereof. A stream of abrasive pliant shot is discharged through the nozzle and deflected radially outwardly from the deflector for abrading a shifting edge along an aperture in a workpiece surface.
摘要翻译：喷嘴包括管和从其出口同轴延伸的扩口偏转器。磨料流喷射通过喷嘴排出并从偏转器径向向外偏转，用于沿工件表面的孔研磨移动边缘。

10. 发明授权

US06386949B1 Method for cleansing/scraping and apparatus therefor 有权
标题翻译：清洗/刮刮方法及其设备
公开(公告)号：US06386949B1
公开(公告)日：2002-05-14
申请号：US09527532
申请日：2000-03-16
申请人： Koichi Hagiwara , Jiro Watanabe , Kazuo Kishimoto , Hiroyuki Nakano
发明人： Koichi Hagiwara , Jiro Watanabe , Kazuo Kishimoto , Hiroyuki Nakano
IPC分类号： B24C504
CPC分类号： B24C7/0092 , B24C1/086 , B24C5/04 , B24C7/0046 , B24C7/0076 , B24C11/005
摘要： A water pump is connected to a mixer so as to blast high pressure water at a high speed in the mixer. The air and powder are supplied to the blast flow of the high pressure water through an air supply pipe and a powder supply pipe respectively so that a mixture flow composed of the gas, the droplet-like fluid, and powder is formed. The mixture flow is blasted from a nozzle at a high speed so as to be sprayed onto a surface to be treated. Thus, impact actions held by the powder and the droplet-like fluid as cleansing/scraping media are given to the surface to be treated. Thus, a cleansing/scraping operation is achieved. Then, if the fluid, gas or the like supplied to the mixer is heated, the cleansing/scraping operation can be further accelerated.
摘要翻译：将水泵连接到混合器，以便在混合器中高速喷射高压水。空气和粉末分别通过供气管和粉末供应管供应到高压水的吹风流中，从而形成由气体，液滴状流体和粉末组成的混合流。将混合物流从喷嘴中高速喷射喷射到待处理的表面上。因此，将粉末和液滴状流体作为清洁/刮擦介质的冲击作用施加到待处理的表面。因此，实现了清洁/刮擦操作。然后，如果供给到混合器的流体，气体等被加热，则可以进一步加速清洗/刮擦操作。

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