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    • 9. 发明公开
    • Chuck assembly
    • Spanndorn
    • EP0728551A1
    • 1996-08-28
    • EP96301088.9
    • 1996-02-16
    • XEROX CORPORATION
    • Swain, Eugene A.Petropoulos, Mark C.Pietrzykowski, Stanley J.Smith, Alan D.
    • B23B31/40B65B21/12B65G47/90
    • B65G47/908Y10T279/1066Y10T279/1087
    • A chuck assembly (2) which may be inserted into and engage the inner surface of a hollow substrate has a housing (6) having a first open end (8) and a passageway (12) in communication with the first open end, a partially hollow elastic boot (4) having an entry hole which engages the housing and an inner surface which is in communication with the passageway, and a movable, boot stretching member (32) disposed in the passageway and adapted to engage the inner surface of the boot. Movement of the member in a direction to stretch the boot decreases the cross-sectional dimension of the boot, thereby permitting insertion of the boot into the substrate, and movement of the member in the opposite direction increases the cross-sectional dimension of the boot, thereby permitting engagement of the boot against the inner surface of the substrate.
    • 可以插入并接合中空基板的内表面的卡盘组件(2)具有壳体(6),其具有与第一开口端连通的第一开口端(8)和通道(12),部分 具有与所述壳体接合的入口孔和与所述通道连通的内表面的中空弹性靴(4)和设置在所述通道中并适于接合所述靴子的内表面的可移动的靴子拉伸构件(32) 。 构件在拉伸套管的方向上的移动减小了护罩的横截面尺寸,从而允许将靴子插入衬底中,并且构件沿相反方向的移动增加了护罩的横截面尺寸, 从而允许护罩与衬底的内表面接合。