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1. 发明公开

CN104882778A 用于减少外腔激光器中模式跳转产生的噪声的方法和装置有权
公开(公告)号：CN104882778A
公开(公告)日：2015-09-02
申请号：CN201510080016.2
申请日：2015-02-13
申请人：安捷伦科技有限公司
发明人： M·朱 , C·霍克
IPC分类号： H01S3/13
CPC分类号： H01S5/141 , H01S3/1055 , H01S3/1398 , H01S5/0652
摘要：一种用于减少外腔激光器中模式跳转产生的噪声的方法和装置。公开了一种外腔激光器以及用于操作所述外腔激光器的方法。所述外腔激光器包括增益芯片、光栅、致动器和致动器驱动器。所述光栅将波长带中离开所述增益芯片的光衍射回到所述增益芯片，所述光栅由相对于离开所述增益芯片的光的角度以及距所述增益芯片的距离表征，所述角度和所述距离受控于所述致动器。一部分所述衍射后的光受所述增益芯片放大。所述激励器驱动器使得所述角度在由幅度和平均频率表征的运动中相对于平衡角度抖动。选取所述抖动运动幅度，以激励所述增益芯片的多个相邻激光模式或提供用于将光栅角度保持在目标值的伺服信号。

2. 发明公开

CN1839523A 外腔可调谐激光器的波长控制失效
公开(公告)号：CN1839523A
公开(公告)日：2006-09-27
申请号：CN200380110477.5
申请日：2003-11-07
申请人：皮雷利&C.有限公司 , 意大利电信股份公司
发明人：苏珊娜·M.·凯特兰 , 安德瑞·罗马诺 , 玛库·德多诺 , 奥锐利奥·皮安奇奥拉
IPC分类号： H01S5/14
CPC分类号： H01S5/141 , G02F2203/055 , H01S3/105 , H01S3/1065 , H01S3/1398 , H01S5/02216 , H01S5/02284 , H01S5/0617 , H01S5/0622 , H01S5/0683 , H01S5/101
摘要：本发明涉及控制外腔可调谐激光器的方法，该激光器包括波长选择性可调谐镜，其中波长灵敏度是通过由交流电压提供的电气信号实现的。本发明的可调谐镜包括液晶材料，衍射光栅和与其光学作用的平面波导。衍射光栅和波导形成共振结构，其仅反射所有碰撞到其上的波长中选择的共振波长。根据施加在可调谐镜上的振幅和电压VTM，可调谐镜仅反射给定波长λTM的辐射。通过可调谐镜进行的可调谐激光器的辐射波长(频率)的精确选择可从由施加在可调谐镜上的AC电压引起的信号调制分析中获得。

3. 发明公开

CN1839522A 外腔可调谐激光器中的相位控制失效
公开(公告)号：CN1839522A
公开(公告)日：2006-09-27
申请号：CN03827146.X
申请日：2003-09-30
申请人：皮雷利&C.有限公司 , 意大利电信股份公司
发明人：安德瑞·罗马诺 , 玛库·德多诺 , 奥锐利奥·皮安奇奥拉
IPC分类号： H01S5/14
CPC分类号： H01S5/141 , G02F2203/055 , H01S3/105 , H01S3/1065 , H01S3/1398 , H01S5/02216 , H01S5/02284 , H01S5/0617 , H01S5/0622 , H01S5/0683 , H01S5/101
摘要：本发明涉及一种单模外腔可调谐激光器，其包括增益介质、可调谐元件和信道分配栅格元件。所述信道分配栅格元件最好是FP标准具，其被构建和配置以定义对应于ITU信道栅格的多个等间隔透射峰值，例如，200、100、50或25GHz。可调谐元件最好是可调谐镜，用作鉴别栅格标准件的峰值的粗调元件。本发明的可调谐激光器具有相对短腔长度，即，不大于15mm，最好是不大于12mm。已经发现，FP标准具在外腔中引入相位非线性，引起空腔谐振模的压缩，即，对应于标准具透射峰值的空腔谐振模间隔的缩小。随着栅格FP标准具的FWHM带宽，以下称为(FWHM)FP的减小，模压缩增加。(FWHM)FP应当处于从大约2GHz到大约8GHz的范围内。最好是，(FWHM)FP近似地处于3和6GHz之间。

4. 发明公开

CN1763557A 减少AC斯塔克移位的光抽运频率标准无效
公开(公告)号：CN1763557A
公开(公告)日：2006-04-26
申请号：CN200510109425.7
申请日：2005-10-18
申请人：安捷伦科技有限公司
发明人：朱淼 , 来纳德·S·卡特勒 , 约翰·埃德温·伯伯里恩
IPC分类号： G01R33/00
CPC分类号： H01S3/1392 , H01S3/1394 , H01S3/1398
摘要：本发明公开了一种用于产生稳定的频率信号的装置(20)。该装置(20)包括具有第一、第二和第三能态的量子吸收体(13)。量子吸收体(13)被第一辐射源(21)照射，第一辐射源(21)产生具有频率νL的电磁辐射，该电磁辐射激发第一和第三能态之间的跃迁。量子吸收体(13)还被第二辐射源(18)照射，第二辐射源(18)产生具有频率νM的电磁辐射，该电磁辐射激发第一和第二能态之间的跃迁。检测器被多个伺服回路使用，所述检测器产生检测器信号，该信号指示出离开量子吸收体(13)的辐射在包括νL在内的频率范围中的辐射水平。伺服回路之一确定νL的值，该值使检测器信号最小化或最大化，并且第二伺服回路(31)确定偏移信号，该偏移信号降低了νM对第一辐射源(21)的强度的依赖性。

5. 发明公开

KR1020020095718A 레이저빔의 보정장치를 장착한 레이저 장치 无效
标题翻译：包含激光束的修正装置的激光装置
公开(公告)号：KR1020020095718A
公开(公告)日：2002-12-28
申请号：KR1020010033901
申请日：2001-06-15
申请人： 주식회사 이오테크닉스
发明人： 이재신 , 정해세
IPC分类号： H01S3/10
CPC分类号： H01S5/02248 , G02B13/0005 , H01S3/1398
摘要： PURPOSE: A laser device incorporating thereinto a correction apparatus for a laser beam is provided to easily correct the intensity of the laser beam by utilizing the correction apparatus. CONSTITUTION: A laser device incorporating thereinto a correction apparatus for a laser beam includes a laser oscillator(10) for generating a laser beam, a beam expander(20) for expanding the laser beam, a beam splitter(34) for splitting the expanded laser beam passing through a first and a second mirrors(30,32), a pair of correction mounts(40) for removably mounting windows capable of reflecting the laser beam impinged thereonto with a predetermined ratio, a pair of variable beam expanders(50), a pair of scanner blocks(60) for scanning the laser beam, a pair of f-theta lenses(70) for maintaining the linearity of the laser beam transmitted through the scanner blocks(60) and a workpiece(80) impinging thereonto the laser beam maintaining the linearity.
摘要翻译：目的：提供一种其中包含用于激光束的校正装置的激光装置，以便通过利用校正装置来容易地校正激光束的强度。构成：其中结合有用于激光束的校正装置的激光装置包括用于产生激光束的激光振荡器（10），用于使激光束扩展的扩束器（20），用于将扩大激光器分离的分束器（34）光束通过第一和第二反射镜（30,32），一对校正支架（40），用于可拆卸地安装能够以预定比例反射激光束的窗口，一对可变光束扩展器（50），用于扫描激光束的一对扫描器块（60），用于保持透射通过扫描器块（60）的激光束的线性的一对f-theta透镜（70）和撞击到激光器的工件（80）梁保持线性。

6. 发明专利

JP2013152146A Water quality inspection device and water quality inspection method 审中-公开
标题翻译：水质检验装置和水质检验方法
公开(公告)号：JP2013152146A
公开(公告)日：2013-08-08
申请号：JP2012013138
申请日：2012-01-25
申请人： Techno Echo Kk , テクノエコー株式会社
发明人： YAMANAKA NORIYUKI
IPC分类号： G01N33/18
CPC分类号： G01N21/17 , H01S3/10069 , H01S3/13 , H01S3/1305 , H01S3/1392 , H01S3/1398
摘要： PROBLEM TO BE SOLVED: To provide a water quality inspection device capable of performing water quality measurement at a low installation cost even for an electrode having large flow rate characteristics, and a water quality inspection method.SOLUTION: When air 5 is continuously sent from an air source such as an air compressor or air pump to an air diffuser port 7 via an air supply pipe 6, the air 5 is diffused becoming air bubbles in test water in a lifting pipe 2 during water, rises in the lifting pipe 2 and flows out from a test water outlet 4 to the outside of the lifting pipe. In this case, because a specific gravity difference occurs between the inside and outside of the lifting pipe 2, a liquid of a low specific gravity in the inside of the lifting pipe rises along with the air bubbles and flows out from the test water outlet 4 to the outside of the lifting pipe. Because a test water flow from a test water inlet 3 toward the test water outlet 4 is formed in the lifting pipe on the basis of the above-described principle, an electrode having large flow rate characteristics such as an oxidation-reduction current measurement electrode using an electrochemical sensor can be used as a water quality testing electrode 8. A signal detected by the water quality testing electrode 8 is transmitted to a water quality indication part 10 through a signal transmission cable 9.
摘要翻译：要解决的问题：提供即使对于具有大流量特性的电极和水质检查方法也能以低安装成本执行水质测量的水质检查装置。解决方案：当空气5从空气压缩机或空气泵等空气源通过空气供给管6进入空气扩散口7，空气5在水中扩散成在升降管2的试验水中成为气泡，在起重管2中上升并流动从测试出水口4到提升管的外部。在这种情况下，由于在提升管2的内外产生比重差，所以起重管内侧的低比重液体与气泡一起上升，从试验水出口4流出到提升管的外部。由于基于上述原理，在提升管中形成从试验水入口3向试验水出口4的试验水的流量特性的电极，例如使用氧化还原电流测定用电极可以使用电化学传感器作为水质检测电极8.由水质检测电极8检测出的信号通过信号传输电缆9传输到水质指示部10。

7. 发明专利

JPS59168686A Frequency control laser device 失效
标题翻译：频率控制激光器件
公开(公告)号：JPS59168686A
公开(公告)日：1984-09-22
申请号：JP4262183
申请日：1983-03-15
申请人： Mitsubishi Electric Corp
发明人： WAKABAYASHI SATOSHI , TAJIME TOORU , TAKEI TOSHIO
IPC分类号： H01S3/131 , H01S3/139
CPC分类号： H01S3/1398
摘要： PURPOSE:To make a cheaper and delayed-response detector suffice a detector required for the titled control while miniaturizing signal processing circuit by a method wherein either oscillation frequency of a main laser oscillator or resonance frequency of a sub laser oscillator is frequency-modulated by a low frequency. CONSTITUTION:Output beams of a main laser oscillator 1 are emitted into a sub laser oscillator 7 to make transmitting light thereof enter into a detector 5 after being reflected by a polarized wave separator 14. The output beams of the main oscillator 1 are amplitude-modulated by transmission characteristics depending upon a resonator of the sub laser oscillator 7. The modulated frequency of the amplitude modulation becomes fs since the resonance frequency fpx of the resonator is modulated by a frequency fs. When this modulated frequency fs converted into electric signal by the detector 5 is input into a lock-in amplifier 15 to be synchronously detected by signal of a reference signal source 12, an error signal to tune fpx to fm is received making fpx=fm. Consequently, the oscillation frequency fm of the main laser oscillator 1 and the other oscillation frequency of the sub laser oscillator 7 may be controlled subject to specified frequency difference since the frequency difference may be decided by thickness and refractive index of a double refractive crystal 11.
摘要翻译：目的：为了使成本低廉的延迟响应检测器能够满足标准控制器所需的检测器，同时通过以下方法使信号处理电路小型化，其中主激光振荡器的振荡频率或副激光振荡器的谐振频率由低频率构成：将主激光振荡器1的输出光束发射到副激光振荡器7中，使其透射光在被偏振波分离器14反射之后进入检测器5.主振荡器1的输出光束被调幅通过传输特性取决于子激光振荡器7的谐振器。由于谐振器的谐振频率fpx被频率fs调制，因此幅度调制的调制频率变为fs。当由检测器5将该调制频率fs转换成电信号时，输入到锁定放大器15中，以通过参考信号源12的信号同步地检测，接收fpx至fm的误差信号，使fpx = fm。因此，主激光振荡器1的振荡频率fm和副激光振荡器7的振荡频率可以受到规定的频率差的控制，因为频率差可以由双折射晶体11的厚度和折射率决定。

8. 发明专利

JPS5766684A Frequency stabilizing device for gas laser 失效
标题翻译：用于气体激光的频率稳定装置
公开(公告)号：JPS5766684A
公开(公告)日：1982-04-22
申请号：JP14218080
申请日：1980-10-11
申请人： Kyoichi Deki
发明人： DEKI KIYOUICHI
IPC分类号： H01S3/139
CPC分类号： H01S3/1398
摘要： PURPOSE:To enable the use of a gas laser in a wide pressure range by providing an electrostrictive element on one mirror forming a laser resonator and negatively feeding back the output of a laser light detector through a synchronous detector and a phase sensitive detector to the electrostrictive element. CONSTITUTION:A gas laser tube 1 having Brewster window 2 is disposed in a magnetic field generator composed of an air core solemoid 13 driven by a DC magnetic field generating power source 4 and an AC magnetic field generating AC oscillator 5. An Ac is applied from a low frequency oscillator 10 to one electrostrictive element 9 of a mirror 8 forming a laser resonator. The output of a laser light detector 6 is applied to a synchronous detector 7 receiving the output of the oscillator 5 as a reference signal. The output of the detector 7 is applied as a reference signal of the oscillator 10 to a phase sensitive detector 11, which thus produces a primary differentiation signal for the laser frequency of a magnetic field modulation component. This is further amplified by a DC amplifier 12, is negatively fed back to an electrostrictive element 9 as a laser frequency control signal, and the laser frequency is stabilized to doppler center frequency.
摘要翻译：目的：为了在宽压力范围内使用气体激光器，在一个反射镜上形成激光谐振器，并将激光检测器的输出通过同步检测器和相敏检测器负反馈给电致伸缩器元件。构成：具有布鲁斯特窗口2的气体激光管1设置在由直流磁场发生电源4和交流磁场产生交流振荡器5驱动的空气气球底板13组成的磁场发生器中.Ac由将低频振荡器10连接到形成激光谐振器的反射镜8的一个电致伸缩元件9。激光检测器6的输出被施加到接收振荡器5的输出作为参考信号的同步检测器7。将检测器7的输出作为振荡器10的参考信号施加到相位敏感检测器11，由此产生用于磁场调制分量的激光频率的初级微分信号。这由DC放大器12进一步放大，作为激光频率控制信号负反馈到电致伸缩元件9，激光频率稳定为多普勒中心频率。

9. 发明授权

EP1668752B1 WAVELENGTH CONTROL OF AN EXTERNAL-CAVITY TUNEABLE LASER 有权转让
标题翻译：波长控制可调谐外腔式激光器
公开(公告)号：EP1668752B1
公开(公告)日：2009-10-07
申请号：EP03775324.1
申请日：2003-11-07
申请人： PGT Photonics S.p.A. , Telecom Italia S.p.A.
发明人： CATTELAN, Susanna Maria, Pirelli Labs S.p.A. , ROMANO, Andrea, Pirelli Labs S.p.A. , DE DONNO, Marco, Pirelli Labs S.p.A. , PIANCIOLA, Aurelio, Pirelli Labs S.p.A.
IPC分类号： H01S5/14
CPC分类号： H01S5/141 , G02F2203/055 , H01S3/105 , H01S3/1065 , H01S3/1398 , H01S5/02216 , H01S5/02284 , H01S5/0617 , H01S5/0622 , H01S5/0683 , H01S5/101
摘要： The present invention relates to a method of controlling an external-cavity tuneable laser that comprises a wavelength-elective tuneable mirror, in which wavelength selectivity is achieved by an electrical signal provided by an alternating voltage. The tuneable mirror of the present invention comprises a liquid crystal material, a diffraction grating and a planar waveguide optically interacting with the grating. The diffraction grating and the waveguide form a resonant structure that reflects only a selected resonance wavelength from among all the other wavelengths impinging thereon. Depending on the amplitude of the voltage applied to the tunable mirror, VTM , the tuneable mirror reflects radiation only at a given wavelength λTM. The lasing output wavelength of the laser is selected to correspond to the resonance wavelength λTM of the tuneable mirror. Accurate selection of the emission wavelength (frequency) of the tuneable laser by the tuneable mirror can be derived from the analysis of the signal modulation induced by the AC voltage applied to the tuneable mirror.

10. 发明公开

EP1921721A1 Injection-locked laser, interferometer, exposure apparatus, and device manufacturing method 审中-公开
标题翻译：注入锁定激光干涉仪，照明设备和方法，用于制造器件
公开(公告)号：EP1921721A1
公开(公告)日：2008-05-14
申请号：EP07120069.5
申请日：2007-11-06
申请人： Canon Kabushiki Kaisha
发明人： Kuramoto, Yoshiyuki
IPC分类号： H01S3/139 , H01S3/23 , G03F7/20 , H01S3/083 , H01S3/13
CPC分类号： H01S3/1394 , G03F7/706 , H01S3/005 , H01S3/083 , H01S3/094038 , H01S3/10092 , H01S3/1305 , H01S3/1392 , H01S3/1398
摘要： An injection-locked laser is disclosed. The injection-locked laser comprises a seed laser (1), an oscillator (O) into which a certain component of light output from the seed laser is injected as seed laser light, a frequency converter (6) which shifts a frequency of the remaining component of the light output from the seed laser, a photodetector (9) which detects light obtained by synthesizing the light output from the oscillator and the light output from the frequency converter, and a controller (5) which controls an optical path length of the oscillator based on a beat signal component contained in the signal output from the photodetector.
摘要翻译：注入锁定激光是游离缺失盘。注入锁定激光包括在振荡器（O）种子激光器（1）的合成向一个从所述种子激光器输出的光的某些成分被注入作为种子激光，频率转换器（6），该转移的剩余的频率从种子激光器输出的光的部件，光检测器（9），其检测通过合成从振荡器输出的光以及从所述频率转换器输出的光获得的光，以及一个控制器（5），该上的光路长度控制基于包含在从光检测器输出的信号的差拍信号分量上振荡器。

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