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1. 发明授权

US06194705B1 Method and apparatus for detection position deviation of electron gun 失效
标题翻译：电子枪检测位置偏差的方法和装置
公开(公告)号：US06194705B1
公开(公告)日：2001-02-27
申请号：US09163480
申请日：1998-09-30
申请人： Satoshi Nakada , Koji Ichida , Yuzuru Watanabe
发明人： Satoshi Nakada , Koji Ichida , Yuzuru Watanabe
IPC分类号： H01J944
CPC分类号： H01J9/42 , H01J2203/02
摘要： A method and apparatus for detecting position deviation of an electron gun in which, by increasing the light utilization efficiency to render the field of sight lighter and by reducing the amount of reflected light from the grid surface, the reflected light from the electron beam emitting surface is lighter to enable an edge of an electron beam transmitting hole to be discerned accurately to detect the position deviation of the electron gun accurately. The linear polarized light is illuminated on the electron gun and the light reflected by this electron gun is observed by a light polarization unit to detect the position deviation between grids of the electron gun.
摘要翻译：一种用于检测电子枪的位置偏差的方法和装置，其中通过增加光利用效率以使视野更亮，并且通过减少来自栅格表面的反射光的量，来自电子束发射表面的反射光较轻以使电子束透过孔的边缘能够准确辨别，以便精确地检测电子枪的位置偏差。在电子枪上照射线性偏振光，并通过光偏振单元观察由该电子枪反射的光，以检测电子枪格栅之间的位置偏差。

2. 发明公开

US20240128042A1 AN ELECTRON GUN CATHODE MOUNT 审中-公开
公开(公告)号：US20240128042A1
公开(公告)日：2024-04-18
申请号：US18547556
申请日：2022-02-22
申请人： TWI Limited
发明人： Colin RIBTON
IPC分类号： H01J37/065 , H01J1/18 , H01J1/88 , H01J3/02
CPC分类号： H01J37/065 , H01J1/18 , H01J1/88 , H01J3/024 , H01J2201/19 , H01J2203/02
摘要： The present invention relates to an electron gun cathode mount adapted at one end to secure a thermionic cathode and at the other end to be connected to an attachment member, wherein the electron gun cathode mount is structured so as to be capable of, when in use, reducing heat transfer from the thermionic cathode to the attachment member, and the material forming the electron gun cathode mount has a thermal conductivity of less than 10 Wm−1K−1 at the operating temperature of the thermionic cathode in a direction from the thermionic cathode to the attachment member. The present invention also relates to an electron gun assembly having the electron gun cathode mount installed therein.

3. 发明授权

US12132411B2 Power supply module and charged particle beam device 有权
公开(公告)号：US12132411B2
公开(公告)日：2024-10-29
申请号：US17763840
申请日：2019-10-07
申请人： Hitachi High-Tech Corporation
发明人： Ryo Kadoi , Wen Li , Naoya Ishigaki
IPC分类号： H02M7/10 , H01J19/02 , H01J37/24 , H02M1/14 , H02M7/06 , H05H5/04
CPC分类号： H02M7/103 , H01J19/02 , H01J37/241 , H02M1/14 , H02M7/062 , H02M7/10 , H05H5/045 , H01J2203/02
摘要： The invention provides a power supply module and a charged particle beam device that are capable of reducing ripple noise. A high-voltage generation circuit 101 includes booster circuits CPa and CPb of two systems that are configured to be symmetrical to each other, and performs a boosting operation by using a capacitive element and a diode in the booster circuits CPa and CPb of the two systems. The high-voltage generation circuit is housed in a housing and a reference power supply voltage is applied thereto. A left electrode 102a is fixedly provided in the vicinity of one of the booster circuits CPa and CPb of the two systems in the housing, and a right electrode 102b is fixedly provided in the vicinity of the other of the booster circuits CPa and CPb of the two systems in the housing. A stray capacitance adjustment circuit 100a adjusts capacitance values of stray capacitances of the booster circuits CPa and CPb of the two systems by electrically controlling an electrical connection characteristic between the left electrode 102a and the reference power supply voltage 104 and an electrical connection characteristic between the right electrode 102b and the reference power supply voltage 104.

4. 发明申请

US20110084590A1 ELECTRON-EMITTING DEVICE, ELECTRON BEAM APPARATUS AND IMAGE DISPLAY APPARATUS 审中-公开
标题翻译：电子发射装置，电子束装置和图像显示装置
公开(公告)号：US20110084590A1
公开(公告)日：2011-04-14
申请号：US12897338
申请日：2010-10-04
申请人： Hideyasu Tashiro , Yohei Hashizume , Taro Hiroike , Fumikazu Kobayashi
发明人： Hideyasu Tashiro , Yohei Hashizume , Taro Hiroike , Fumikazu Kobayashi
IPC分类号： H01J1/02
CPC分类号： H01J1/3046 , H01J3/021 , H01J31/127 , H01J2201/30423 , H01J2203/02 , H01J2329/0423
摘要： An electron-emitting device according to the present invention, comprises: an insulating member having a top face, a side face and a recess portion formed between the top face and the side face; a cathode electrode which is disposed on the side face and has an electron emitting portion located in a boundary portion between the side face and the recess portion; and a gate electrode which is disposed on the top face and of which an edge faces the electron emitting portion, wherein the boundary portion in which the electron emitting portion is located has concavity and convexity in a direction parallel to the top face.
摘要翻译：根据本发明的电子发射器件包括：绝缘构件，其具有形成在顶面和侧面之间的顶面，侧面和凹部; 阴极，其设置在所述侧面上，并且具有位于所述侧面和所述凹部之间的边界部分中的电子发射部分; 以及栅电极，其设置在所述顶面上并且其边缘面向所述电子发射部分，其中所述电子发射部分所在的所述边界部分在与所述顶面平行的方向上具有凹凸。

5. 发明专利

JP2011082071A Electron-emitting device, electron beam apparatus and image display apparatus 审中-公开
标题翻译：电子发射装置，电子束装置和图像显示装置
公开(公告)号：JP2011082071A
公开(公告)日：2011-04-21
申请号：JP2009234523
申请日：2009-10-08
申请人： Canon Inc , キヤノン株式会社
发明人： TASHIRO HIDEYASU , HASHIZUME YOHEI , HIROIKE TARO , KOBAYASHI FUMIKAZU
IPC分类号： H01J1/304 , H01J29/04 , H01J31/12
CPC分类号： H01J1/3046 , H01J3/021 , H01J31/127 , H01J2201/30423 , H01J2203/02 , H01J2329/0423
摘要： PROBLEM TO BE SOLVED: To provide an electron-emitting device capable of restraining reduction in an amount of electron emission and reducing electrostatic capacity, to provide an electron beam apparatus having the electron-emitting device, and to provide an image display apparatus. SOLUTION: In the electron-emitting device including an insulating member having an upper surface, a side surface, and a recessed section formed between the upper surface and the side surface, a cathode electrode having an electron emission section arranged on the side surface and located at a boundary section between the side surface and the recessed section, and a gate electrode arranged on the upper surface and making an end opposite to the electron emission section, the boundary section where the electron emission section is located has unevenness in a direction parallel to the upper surface. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：解决的问题：提供能够抑制电子发射量减少和降低静电电容的电子发射器件，以提供具有电子发射器件的电子束装置，并提供一种图像显示装置。解决方案：在包括形成在上表面和侧表面之间的具有上表面，侧表面和凹陷部分的绝缘构件的电子发射器件中，具有布置在侧面上的电子发射部分的阴极表面并且位于侧表面和凹陷部分之间的边界部分处，并且栅电极设置在上表面上并且形成与电子发射部分相对的端部，电子发射部分所在的边界部分具有不均匀性方向平行于上表面。版权所有（C）2011，JPO＆INPIT

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