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    • 5. 发明公开
    • Positioning control method and apparatus
    • Methode und Vorrichtung zur Positionsregelung。
    • EP0515970A1
    • 1992-12-02
    • EP92108510.6
    • 1992-05-20
    • MITSUBISHI JUKOGYO KABUSHIKI KAISHAAGENCY OF INDUSTRIAL SCIENCE AND TECHNOLOGY
    • Okazaki, Yuichi, c/o Mechanical Eng. Lab. AgencyAsano, Shin, c/o Advanced Technological Res. Cent.Goto, Takayuki, c/o Advanced Technological Res.
    • G05B19/39G05D3/14
    • G05B19/39G05D3/1436
    • A positioning control method and apparatus in which a fine movement mechanism can be always moved without exceeding a movable area so that positioning of a large amount of displacement can be attained with high accuracy and high-speed positioning from a point to a point can be attained with the same control method are disclosed.
      The positioning control apparatus including a coarse movement mechanism 101 having a large amount of movement and low positioning accuracy and a fine movement mechanism 102 having a small amount of movement and high positioning accuracy supplies to the fine movement mechanism 101 a signal E4 based on a difference signal C4 of a movement command signal A4 and a displacement signal B4 representative of a displacement of an object to be positioned with respect to a fixed position detected by absolute position detecting means 105 and supplies to the coarse movement mechanism 101 a coarse movement command signal M4 produced by adding a signal representative of a relative displacement of the fine movement mechanism 102 with respect to the coarse movement mechanism 101 detected by relative position detecting means 133 to the difference signal C4 to thereby control respective movements.
    • 一种定位控制方法和装置,其中微动机构可以始终在不超过可移动区域的情况下移动,从而能够以高精度实现大量位移的定位,并且可以实现从一点到一点的高速定位 公开了相同的控制方法。 定位控制装置包括具有大量移动和低定位精度的粗动机构101和具有少量运动和高定位精度的微动机构102向微动机构101提供基于差异的信号E4 运动指令信号A4的信号C4和代表由绝对位置检测装置105检测到的相对于固定位置定位的物体的位移的位移信号B4,并向粗略移动机构101提供粗略移动指令信号M4 通过将表示微动机构102相对于由相对位置检测装置133检测的粗动机构101的相对位移的信号添加到差信号C4,从而控制各自的运动而产生。
    • 6. 发明专利
    • Transfer device for precision sample
    • 用于精密样品的转移装置
    • JPS6162110A
    • 1986-03-31
    • JP18256584
    • 1984-09-03
    • Canon Inc
    • TAKAHASHI KAZUO
    • H01L21/68B23Q1/34B23Q1/60B23Q5/40G05D3/00G05D3/14G12B5/00H01L21/67
    • B23Q1/34B23Q1/601B23Q5/40G05D3/1436
    • PURPOSE:To reduce the weight of transfer stage to realize the rapid motion and to improve the speed and accuracy of position alignment by incorporating a micro motion device with micro positioning device between the transmission device of drive system and moving table. CONSTITUTION:When the amount of motion for a moving table 12 is commanded from outside, a main control device 24 detects the signal issued from position a detector 21, and obtain the information of present position of the table 12, and at the same time starts up the first control device 22. When the table 12 moves to the specified position, the device 24 again calculates the amount of actual movement by the signal sent from device 21, and commands the amount of deviation between the command from outside and the actual movement to the second control device 23. According to the command, the device 23 drives the micro positioning device 3. Subsequently, the device 3 relocate the table 12 slightly against the nut 7, by extending or compressing the elastic substance 15. Thus by providing the device 3, rapid motion of movable stage is realized by reducing its weight, resulting in enhancing rapidness and accuracy of position alignment.
    • 目的:通过在驱动系统的传动装置和移动台之间结合具有微定位装置的微动装置,减少转移阶段的重量,实现快速运动,提高位置对准的速度和精度。 构成:当从外部指示移动台12的运动量时,主控制装置24检测从位置检测器21发出的信号,并获取表12的当前位置的信息,同时开始 第一控制装置22.当台12移动到指定位置时,装置24再次通过从装置21发送的信号计算实际移动量,并且命令外部命令与实际移动之间的偏差量 根据该命令,装置23驱动微型定位装置3.随后,装置3通过延伸或压缩弹性物质15将表12略微靠近螺母7定位。因此,通过提供 装置3,通过减轻其重量实现可移动台的快速运动,从而提高位置对准的快速性和精度。