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    • 10. 发明公开
    • Transport system with electrostatic substrate retention device
    • 运输系统电子信号处理器(Substrathalterungsvorrichtung)。
    • EP0671263A1
    • 1995-09-13
    • EP95300898.4
    • 1995-02-14
    • KUEHNLE, Manfred R.
    • KUEHNLE, Manfred R.
    • B41F21/00B65H5/00
    • B41F21/005B65H5/004B65H2404/251
    • A transport system comprises a carrier in the form of a belt, drum or reciprocating member (10) having a surface and arrays of first and second conductors (34, 36) extending under that surface generally parallel to one another, each second conductor being spaced close to a first conductor to define a narrow gap between them. A voltage source (42) applies a potential difference between the conductors to produce electrostatic fields at said gaps which can attract and hold a substrate to said carrier surface. Switching is provided so that a potential difference is applied only between selected ones of the first and second conductors so as to control the areas of the carrier surface to which the substrate is held. In the case of a transport with a belt-type carrier, indicia (52, 56) may be applied to the belt enabling the longitudinal and lateral positions of the belt to be monitored to achieve predictive positioning of the substrate relative to successive work stations serviced by the transport.
    • 传送系统包括带状,滚筒或往复运动构件(10)形式的托架,该托架或往复运动构件(10)具有在该表面下延伸的大致平行的第一和第二导体(34,36)的表面和阵列,每个第二导体间隔开 靠近第一个导体来限定它们之间的狭窄间隙。 电压源(42)施加导体之间的电位差,以在所述间隙处产生可吸引并保持衬底至所述载体表面的静电场。 提供开关,使得仅在第一和第二导体的选定的导体之间施加电位差,以便控制保持衬底的载体表面的面积。 在具有带式载体的运输的情况下,可以将标记(52,56)施加到带上,使得能够监测带的纵向和横向位置,以实现衬底相对于所服务的连续工作站的预测定位 由运输。