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1. 发明授权

US07569124B2 Anodic oxidation apparatus 失效
标题翻译：阳极氧化装置
公开(公告)号：US07569124B2
公开(公告)日：2009-08-04
申请号：US10924830
申请日：2004-08-25
申请人： Yasushi Yagi , Mitsuru Ushijima , Yoshifumi Watabe , Takuya Komoda , Koichi Aizawa
发明人： Yasushi Yagi , Mitsuru Ushijima , Yoshifumi Watabe , Takuya Komoda , Koichi Aizawa
IPC分类号： C25D17/00 , C25D11/02
CPC分类号： C25D11/02 , C25D11/005 , C25D11/32 , C25F3/12 , C25F3/14 , C25F7/00 , H01L21/02203 , H01L21/02238 , H01L21/02258 , H01L21/3167 , H01L21/31675 , Y10S204/07
摘要： In an anodic oxidation apparatus and an anodic oxidation method and a panel for a display device manufactured by them, a large target substrate is treated by a smaller component. The anodic oxidation apparatus includes a lamp which emits light; a treatment bath which has a stage capable of mounting a target substrate thereon with a treatment part thereof directed upward and is provided at a position where the emitted light reaches and a frame located on the stage; a cathode electrode which is provided on the way of the emitted light to reach the mounted target substrate and includes an opening to allow the light to pass therethrough; a seal member which establishes a liquid sealing property between the frame and the mounted target substrate; a conductive contact member which is provided to be contactable with a plurality of electrode patterns formed on the target substrate outside an annular shape of the seal member and moves along side of the target substrate; and a current source which is electrically connected to the contact member and sets an output current value in accordance with the number of electrode patterns of the mounted target substrate in contact as the contact member moves.
摘要翻译：在阳极氧化装置和阳极氧化法以及由它们制造的显示装置的面板中，通过较小的成分处理大的靶基板。阳极氧化装置包括发光的灯; 处理槽，其具有能够在其上安装目标基板的台阶，其处理部分向上指向并设置在发射光到达的位置和位于台上的框架; 阴极，其设置在所发射的光的路上，以到达所安装的目标基板，并且包括允许光通过的开口; 密封构件，其在所述框架和所安装的目标基板之间建立液体密封性; 导电接触构件，其设置成可与形成在所述目标基板上的多个电极图案接触，所述多个电极图案位于所述密封构件的环形形状的外侧，并且沿着所述目标基板的侧面移动; 以及电流源，其电连接到所述接触构件，并且当所述接触构件移动时，根据所接触的安装的目标衬底的电极图案的数量设定输出电流值。

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