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    • 4. 发明授权
    • X-ray fluorescence inspection apparatus
    • X射线荧光检查仪
    • US5528647A
    • 1996-06-18
    • US277768
    • 1994-07-20
    • Robin J. AndersonTrevor A. Nunn
    • Robin J. AndersonTrevor A. Nunn
    • G01N23/223
    • G01N23/223G01N2223/076
    • X-ray Fluorescence Inspection Apparatus comprises an X-ray tube (1) for generating X-rays having a range of energies which are directed towards a sample position. A first filter assembly (3) is mounted between the X-ray tube (1) and the sample position and is movable between at least two positions to enable the energy band of X-rays reaching the sample position to be controlled in two different ways. An X-ray monitor (8) monitors X-rays from the sample position; and a second filter assembly (6) mounted between the sample position and the monitor (8) is movable between at least two positions to enable the energy band of X-rays reaching the monitor to be controlled in two different ways.
    • X射线荧光检查装置包括用于产生具有朝向样品位置的能量范围的X射线的X射线管(1)。 第一过滤器组件(3)安装在X射线管(1)和样品位置之间,并且可在至少两个位置之间移动,以使得能够以两种不同的方式控制到达样品位置的X射线能带 。 X射线监视器(8)监视来自样本位置的X射线; 并且安装在采样位置和监视器(8)之间的第二过滤器组件(6)可在至少两个位置之间移动,以使得能够以两种不同的方式控制到达监视器的X射线能带。
    • 6. 发明公开
    • X-ray fluorescence inspection apparatus and method
    • Verfahren und Vorrichtung zur Inspektion mittelsRöntgenstrahlenfluoreszenz
    • EP0766083A2
    • 1997-04-02
    • EP96306909.1
    • 1996-09-23
    • OXFORD ANALYTICAL INSTRUMENTS LIMITED
    • Anderson, Robin JohnEllis, Andrew TimothyField, Kenneth Malcolm
    • G01N23/223
    • G01N23/223G01N2223/076G01N2223/30G01N2223/313
    • X-ray fluorescence inspection apparatus comprises an X-ray source (1) for generating X-rays having a range of energies which are directed towards a sample position (3). A filter assembly (30) is mounted between the X-ray source (1) and the sample position (3) and is movable between at least two positions to enable the energy band of X-rays reaching the sample position to be controlled in two different ways. At least one wavelength dispersive monitor (17) is tuned to detect fluorescent X-rays within a predetermined wavelength range from a sample at the sample position (3) and an energy dispersive monitor (16) monitors fluorescent X-rays from a sample at the sample position. A variable size aperture (26) is provided through which fluorescent X-rays from a sample at the sample position pass to reach the energy dispersive monitor (16).
    • X射线荧光检查装置包括用于产生具有朝向样本位置(3)的能量范围的X射线的X射线源(1)。 过滤器组件(30)安装在X射线源(1)和样品位置(3)之间,并且可在至少两个位置之间移动,以使得能够将X射线的能带达到样品位置,控制在两个 不同的方式。 调谐至少一个波长色散监视器(17)以检测来自样本位置(3)处的样本的预定波长范围内的荧光X射线,并且能量分散监视器(16)监视来自样品处的样品的荧光X射线 样品位置。 提供可变尺寸的孔(26),通过该可变尺寸的孔(26)通过样品位置处的样品的荧光X射线通过其到达能量色散监测器(16)。
    • 9. 发明公开
    • X-ray fluorescence inspection apparatus
    • X射线荧光检查装置
    • EP0639766A1
    • 1995-02-22
    • EP94304943.7
    • 1994-07-05
    • OXFORD ANALYTICAL INSTRUMENTS LIMITED
    • Anderson, Robin JohnNunn, Trevor Anthony
    • G01N23/223
    • G01N23/223G01N2223/076
    • X-ray Fluorescence Inspection Apparatus comprises an X-ray tube (1) for generating X-rays having a range of energies which are directed towards a sample position. A first filter assembly (3) is mounted between the X-ray tube (1) and the sample position and is movable between at least two positions to enable the energy band of X-rays reaching the sample position to be controlled in two different ways. An X-ray monitor (8) monitors X-rays from the sample position; and a second filter assembly (6) mounted between the sample position and the monitor (8) is movable between at least two positions to enable the energy band of X-rays reaching the monitor to be controlled in two different ways.
    • X射线荧光检查装置包括用于产生具有朝向样本位置的能量范围的X射线的X射线管(1)。 第一过滤器组件(3)安装在X射线管(1)和样本位置之间并且可以在至少两个位置之间移动,以使X射线的能量带到达样本位置以两种不同的方式被控制 。 X射线监视器(8)监视来自样本位置的X射线; 和安装在样品位置和监测器(8)之间的第二过滤器组件(6)可在至少两个位置之间移动,以使得到达监测器的X射线的能量带以两种不同的方式被控制。