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    • 8. 发明申请
    • FLUID DISPENSING SYSTEM
    • 流体分配系统
    • WO2016111848A3
    • 2016-11-24
    • PCT/US2015067300
    • 2015-12-22
    • NORDSON CORP
    • DES JARDINS STEPHEN RLEWIS ALAN RSUHININ YURIY
    • G05D7/06
    • B05C5/0225B05B12/006B05B12/087B05C5/02B05C9/08B05C11/02B05C11/1002B05C11/101B05C11/1013B05C11/1034G01F1/76G01K13/02G01K2013/024G05D7/0676
    • Systems and methods related to dispensing fluid and controlling a dispensing operation. The system includes a fluid dispenser including an inlet and an outlet, the dispenser being operable to start and stop the flow of the fluid from the outlet onto a substrate. A fluid supply reservoir adapted to hold the fluid, and having an outlet coupled in fluid communication with the inlet of the fluid dispenser to establish a flow path for the fluid between the fluid supply reservoir and the outlet of the fluid dispenser. The fluid supply reservoir further includes a pneumatic input coupled to an air flow path adapted to receive pressurized air for forcing the fluid from the outlet of the reservoir. An electronic air mass flow meter device is operatively coupled to the air flow path to produce electrical output signals proportional to the mass flow rate of the air flowing through the pneumatic input. Components and methods are provided to accurately determine the volume of the fluid in the reservoir, and to set the stroke length of a valve used in the system.
    • 与分配流体相关的系统和方法以及控制分配操作。 该系统包括流体分配器,其包括入口和出口,分配器可操作以启动和停止流体从出口流到基底上。 流体供应储存器,其适于保持流体,并且具有与流体分配器的入口流体连通的出口,以建立用于流体供应储存器和流体分配器的出口之间的流体的流动路径。 流体供应储存器还包括联接到适于接收加压空气的气流路径的气动输入,用于迫使来自储存器的出口的流体。 电子空气质量流量计装置可操作地耦合到空气流动路径以产生与流过气动输入的空气的质量流量成比例的电输出信号。 提供组件和方法以准确地确定储存器中的流体的体积,并设定系统中使用的阀的行程长度。
    • 9. 发明申请
    • X-RAY INSPECTION APPARATUS FOR INSPECTING SEMICONDUCTOR WAFERS
    • 用于检查半导体波形的X射线检测装置
    • WO2015153980A9
    • 2016-05-26
    • PCT/US2015024261
    • 2015-04-03
    • NORDSON CORP
    • TINGAY JOHNWALKER WILLIAM TSTEWART KATE
    • G01N23/083G01N23/02G01N23/04
    • G01N23/04G01N2223/309G01N2223/6113G01N2223/6116G01N2223/6462H01L21/67288H01L21/681H01L21/6838H01L22/12
    • An x-ray inspection system comprising: a cabinet (110), the cabinet (110) containing an x-ray source (100), a sample support (200) for supporting a sample to be inspected, and an x-ray detector (300); and an air mover (130) configured to force air into the cabinet (110) through an air inlet (132) in the cabinet (100) above the sample support (200), wherein the air mover (130) and cabinet (110) are configured to force air through the cabinet (110) from the air inlet (132) past the sample support (200) to an air outlet (150) in the cabinet (110) below the sample support (200). The cabinet (110) may be constructed to provide an x-ray shield. An x-ray system of this type can be used in a clean room environment to inspect items such as semiconductor wafers (20).
    • 一种x射线检查系统,包括:机壳(110),所述机壳(110)包含x射线源(100),用于支撑待检查样品的样品支撑件(200)和x射线检测器 300); 以及空气推动器(130),其构造成通过所述样品支撑件(200)上方的所述机壳(100)中的空气入口(132)将空气强制进入所述机壳(110),其中所述鼓风机(130)和机壳(110) 被配置成迫使来自空气入口(132)的机壳(110)经过样品支撑件(200)到样品支架(200)下方的机壳(110)中的空气出口(150)。 机柜(110)可以构造成提供x射线屏蔽。 这种类型的x射线系统可用于洁净室环境中以检查诸如半导体晶片(20)的物品。
    • 10. 发明申请
    • DEVICE AND METHOD FOR DISPENSING FREE-FLOWING MATERIALS IN PARTICULAR FOR INJECTING HIGHLY VISCOUS MATERIALS BETWEEN WORKPIECES
    • APPARATUS AND METHOD FOR DISPENSING流动的物料,尤其是注入部件之间的高粘度材料
    • WO2010097283A3
    • 2010-12-23
    • PCT/EP2010051483
    • 2010-02-08
    • NORDSON CORPBUERGER RONALDHALL MARKUSQUINT THOMAS
    • BUERGER RONALDHALL MARKUSQUINT THOMAS
    • B29C47/54B05C17/01B29C45/53
    • B29C47/54B29C45/531B29C47/0021
    • The invention relates to a device and a method for dispensing free-flowing materials in particular for injecting highly viscous materials between workpieces, comprising a cylinder (14), with an inlet (66) for introduction of the material and an outlet (70) for dispensing the material, a piston (16) arranged to move within the cylinder for pumping the material in the cylinder (14) a drive device (10), cooperating with the piston (16) to drive the same and a nozzle arrangement (18), which can accept material dispensed from the outlet of the cylinder (14) with an outlet opening (120) for dispensing the material. According to the invention, the drive device (10) has a motor (11) with an output shaft (22) and the output shaft (22) is coupled to the piston (16) by means of a gear (12) such that the piston (16) may be driven axially.
    • 本发明涉及一种装置和方法,用于分配可流动材料,特别是用于注射的工件之间的高粘度的材料,包括:具有用于分配所述材料包括:将材料和出口(70)的入口(66)的气缸(14) 位于,一个可移动地布置在气缸活塞(16)的内部的筒(14)中的材料,驱动装置传送(10),其配合,用于从驱动活塞与之(16),和一个喷嘴组件(18) 气缸(14)的出口处可以接收分配的材料和用于排出所述材料的至少一个出口开口(120)。 根据本发明的驱动装置(10)包括具有输出轴(22)和输出轴(22)的电动机(11)通过传动装置(12)(16)的装置连接到所述活塞,使得所述活塞(16)是轴向地驱动 ,