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    • 7. 发明专利
    • Large area microwave plasma apparatus with adaptable applicator
    • 大面积微波等离子体设备与适应适应器
    • JP2010045037A
    • 2010-02-25
    • JP2009211797
    • 2009-09-14
    • Energy Conversion Devices Incエナージー コンバーション デバイセス インコーポレイテッドEnergy Conversion Devices, Inc.
    • DOEHLER JOACHIM
    • H05H1/46C23C16/511H01J37/32H01L21/205H01L21/302H01L21/3065H01L21/31
    • H01J37/32229H01J37/32192
    • PROBLEM TO BE SOLVED: To provide a microwave plasma apparatus for sustaining substantially uniform plasma over a relatively large area, easily adaptable for usage in a various microwave frequencies. SOLUTION: The large area microwave plasma apparatus is composed of: a vacuum vessel 12 for sustaining plasma in plasma regions 20, 20a; a means in the vacuum vessel 12 for supporting a substrate in parallel with the plasma regions 20, 20a; a means for sustaining the vacuum vessel 12 at a desired pressure; means 18, 18a for introducing action gas into the vacuum vessel 12; a non-evanescent microwave applicator 40 with a means for controlling cutoff wavelength, wherein at least part of the microwave applicator 40 extends into the vacuum vessel 12 and irradiates microwave energy from a power source into the vacuum vessel 12; and a means 60 for gas-insulating the applicator 40 from the plasma regions 20, 20a. COPYRIGHT: (C)2010,JPO&INPIT
    • 要解决的问题:提供一种微波等离子体装置,用于在相对较大的区域上维持基本上均匀的等离子体,容易适用于各种微波频率的使用。 解决方案:大面积微波等离子体装置包括:用于在等离子体区域20,20a中维持等离子体的真空容器12; 在真空容器12中用于与等离子体区域20,20a平行地支撑衬底的装置; 用于在期望压力下维持真空容器12的装置; 用于将动作气体引入真空容器12的装置18,18a; 具有用于控制截止波长的装置的非消逝微波施加器40,其中微波施加器40的至少一部分延伸到真空容器12中并将来自电源的微波能量照射到真空容器12中; 以及用于将施涂器40从等离子体区域20,20a进行气体绝缘的装置60。 版权所有(C)2010,JPO&INPIT