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1. 发明申请

WO2007070566A3 OPTICAL FIBER-DELIVERED REFERENCE BEAM FOR INTERFEROMETRIC IMAGING 审中-公开
标题翻译：光纤传输参考光束进行干涉成像
公开(公告)号：WO2007070566A3
公开(公告)日：2009-01-08
申请号：PCT/US2006047521
申请日：2006-12-12
申请人： COHERIX INC , KLOOSTER ALEX , ALEKSOFF CARL
发明人： KLOOSTER ALEX , ALEKSOFF CARL
IPC分类号： G01B11/02
CPC分类号： G01B11/2441 , G01B9/02007
摘要： The present invention includes an interferometric imaging system including a paraboloid mirror defining an axis and an illumination source adapted to radiate light from an illumination point of an illumination optical fiber at an off-axis portion of the paraboloid mirror. The present invention also includes a reference illumination source adapted to illuminate the surface of an image receiver through a reference optical fiber with a reference beam having a selectable, variable, or predetermined phase with respect to the illumination source. The from the reference illumination source and light from the optical system cooperate to form a phase image of object on the image receiver.
摘要翻译：本发明包括一种干涉成像系统，其包括限定轴的抛物面镜和适于在抛物面镜的离轴部分处辐射来自照明光纤的照明点的光的照明源。本发明还包括参考照明源，其适于通过参考光纤照射图像接收器的表面，所述参考光纤具有相对于照明源具有可选择，可变或预定相位的参考光束。来自参考照明源和来自光学系统的光合作以在图像接收器上形成物体的相位图像。

2. 发明申请

WO2008070810A2 SYSTEM AND METHOD OF IMAGING IN AN INTERFEROMETRIC IMAGING SYSTEM 审中-公开
标题翻译：在成像系统中成像的系统和方法
公开(公告)号：WO2008070810A2
公开(公告)日：2008-06-12
申请号：PCT/US2007/086699
申请日：2007-12-06
申请人： COHERIX, INC. , KLOOSTER, Alex
发明人： KLOOSTER, Alex
IPC分类号： G01J9/02
CPC分类号： G01B9/02007 , G01B2290/45
摘要： In one embodiment of the invention, a detector subsystem for an interferometric imaging system includes a parabolic mirror, a light source located at an optically significant distance from the focus point of the parabolic mirror and oriented such that light is reflected off of the parabolic mirror onto an object, a primary beam splitter that receives light reflected from the object onto the parabolic mirror and produces a first beam output and a second beam output, a first detection unit for each beam output of the beam splitter, a second detection unit for each beam output of the beam splitter, a processor that processes images from each detection unit. Another embodiment of the invention is a method of imaging in an interferometric imaging system.
摘要翻译：在本发明的一个实施例中，用于干涉成像系统的检测器子系统包括抛物面反射镜，位于离抛物面镜的焦点的光学显着距离处的光源，并定向为使得光从抛物面镜反射到一个对象，一个主分束器，其将从物体反射的光接收到抛物面反射镜上并产生第一光束输出和第二光束输出，用于分束器的每个光束输出的第一检测单元，每个光束的第二检测单元分束器的输出，处理来自每个检测单元的图像的处理器。本发明的另一实施例是在干涉成像系统中成像的方法。

3. 发明申请

WO2007070565A3 OFF-AXIS PARABOLOID INTERFEROMETER WITH OFF-AXIS ILLUMINATION 审中-公开
公开(公告)号：WO2007070565A3
公开(公告)日：2007-06-21
申请号：PCT/US2006/047520
申请日：2006-12-12
申请人： COHERIX, INC. , KLOOSTER, Alex , ALEKSOFF, Carl
发明人： KLOOSTER, Alex , ALEKSOFF, Carl
IPC分类号： G01B11/02
摘要： The present invention includes an interferometric imaging system including a paraboloid mirror defining an axis and an illumination source adapted to radiate light from an illumination point at an off-axis portion of the paraboloid mirror- wherein the illumination point is disposed remotely from the axis of the paraboloid mirror. The illumination point is disposed relative to the axis of the paraboloid mirror such that light diverges from the illumination point and proceeds to the paraboloid mirror. The paraboloid mirror reflects light from the illumination source into a substantially parallel beam of light for illumination of an object. The paraboloid mirror of the present invention functions as both a collimator of light from the illumination point as well as a collector of light reflected from the object under examination.

4. 发明申请

WO2007070565A2 OFF-AXIS PARABOLOID INTERFEROMETER WITH OFF-AXIS ILLUMINATION 审中-公开
标题翻译：带离轴照明的离轴PARABOLOID干涉仪
公开(公告)号：WO2007070565A2
公开(公告)日：2007-06-21
申请号：PCT/US2006047520
申请日：2006-12-12
申请人： COHERIX INC , KLOOSTER ALEX , ALEKSOFF CARL
发明人： KLOOSTER ALEX , ALEKSOFF CARL
IPC分类号： G01B11/02 , G01B9/02
CPC分类号： G01B11/2441 , G01B9/02007
摘要： The present invention includes an interferometric imaging system including a paraboloid mirror defining an axis and an illumination source adapted to radiate light from an illumination point at an off-axis portion of the paraboloid mirror- wherein the illumination point is disposed remotely from the axis of the paraboloid mirror. The illumination point is disposed relative to the axis of the paraboloid mirror such that light diverges from the illumination point and proceeds to the paraboloid mirror. The paraboloid mirror reflects light from the illumination source into a substantially parallel beam of light for illumination of an object. The paraboloid mirror of the present invention functions as both a collimator of light from the illumination point as well as a collector of light reflected from the object under examination.
摘要翻译：本发明包括一种干涉成像系统，其包括限定轴的抛物面镜和适于辐射来自抛物面镜的离轴部分处的照明点的光的照明源，其中照明点远离该抛物面的轴线抛物面镜照明点相对于抛物面反射镜的轴线布置，使得光从照明点发散并进入抛物面反射镜。抛物面镜将来自照明源的光反射成基本上平行的光束，以照射物体。本发明的抛物面镜作为来自照明点的光的准直仪以及从检查对象反射的光的收集器起作用。

5. 发明申请

WO2008080161A2 STABILIZING SYSTEM FOR A VIBRATION ISOLATION PLATFORM 审中-公开
标题翻译：用于振动隔离平台的稳定系统
公开(公告)号：WO2008080161A2
公开(公告)日：2008-07-03
申请号：PCT/US2007/088771
申请日：2007-12-23
申请人： COHERIX, INC. , KLOOSTER, Alex , MATER, Michael, J.
发明人： KLOOSTER, Alex , MATER, Michael, J.
IPC分类号： F16F7/00
CPC分类号： F16F15/04 , F16F7/10
摘要： The system, according to a first preferred embodiment of the invention, includes a vibration isolation platform, means for producing tension (such as a weight, a spring, or a piston), a first tension member attached to the means for producing tension and attached at a first point on the vibration isolation platform, a second tension member attached at substantially the same point on the means for producing tension as the first tension member, and attached at a second point, which is a distance from the first point, on the vibration isolation platform, and a support member that supports the vibration isolation platform against gravity and against tension produced by the means for producing tension.
摘要翻译：根据本发明的第一优选实施例的系统包括振动隔离平台，用于产生张力的装置（例如重物，弹簧或活塞），附接到用于产生张力和附接的装置的第一张力构件在隔振平台的第一点处，第二张力构件附接在用于产生与第一张力构件的张力的装置上的基本相同的点处，并且在与第一点相距一定距离的第二点处隔振平台和支撑构件，其支撑隔振平台以抵抗重力和由产生张力的装置产生的张力。

6. 发明申请

WO2008070746A2 SYSTEM AND METHOD FOR SHIFTING PHASE IN A MULTI-WAVELENGTH INTERFEROMETRIC IMAGING SYSTEM 审中-公开
标题翻译：用于在多波长干涉成像系统中移相的系统和方法
公开(公告)号：WO2008070746A2
公开(公告)日：2008-06-12
申请号：PCT/US2007/086556
申请日：2007-12-05
申请人： COHERIX, INC. , KLOOSTER, Alex
发明人： KLOOSTER, Alex
IPC分类号： G06T7/40
CPC分类号： G01B9/0201 , G01B9/02007 , G01B9/02067
摘要： The optical subsystem of a first preferred embodiment may be used for a multi- wavelength interferometric imaging system outputting an object beam having a first phase and a reference beam having a second phase. The optical subsystem preferably includes an optical element; a sensor that measures movement of the optical element and relates the movement to a phase difference of the first phase of the object beam and the second phase of the reference beam; and a piezo that changes the position of the optical element to change the phase difference of the first phase of the object beam and the second phase of the reference beam.
摘要翻译：第一优选实施例的光学子系统可以用于输出具有第一相位的物体光束和具有第二相位的参考光束的多波长干涉成像系统。光学子系统优选地包括光学元件; 测量光学元件的运动的传感器，并将移动与目标光束的第一相位和参考光束的第二相位的相位差相关联; 以及改变光学元件的位置以改变对象光束的第一相位和参考光束的第二相位的相位差的压电体。

7. 发明申请

WO2008070635A3 METHOD AND SYSTEM FOR DETERMINING A CRITICAL DIMENSION OF AN OBJECT 审中-公开
公开(公告)号：WO2008070635A3
公开(公告)日：2008-06-12
申请号：PCT/US2007/086310
申请日：2007-12-03
申请人： COHERIX, INC. , MATER, Michael, J.
发明人： MATER, Michael, J.
IPC分类号： G01B11/02
摘要： The present invention includes systems and method of measuring a critical dimension of an object. The system of the present invention includes a multiwavelength interferometric imaging system having an image receiver that is adapted to receive reflected light and calculate a critical dimension of an object in response thereto. The system can also include a gage block defining a known dimension that is disposed at a predetermined distance from the multiwavelength interferometric imaging system. The gage block can define a surface that at least partially reflects incident light, and can be adapted to hold the object in a predetermined position during an imaging operation. During the imaging operation at least a portion of the light incident on the image receiver is reflected from the gage block, thereby allowing the image receiver to calculate a critical dimension of the object in response to the received image.

8. 发明申请

WO2006135898A2 LIGHTING SUBSYSTEM FOR A MACHINE VISION SYSTEM 审中-公开
标题翻译：用于机器视觉系统的照明子系统
公开(公告)号：WO2006135898A2
公开(公告)日：2006-12-21
申请号：PCT/US2006023030
申请日：2006-06-13
申请人： COHERIX INC , DAVIDSON DOUGLAS , UPHAM JON
发明人： DAVIDSON DOUGLAS , UPHAM JON
IPC分类号： G01N21/00
CPC分类号： G01N21/8806 , G01N21/89 , G01N21/95684
摘要： According to one of the preferred embodiments, the invention includes a machine vision system 110 for inspecting a moving object. The machine vision system 110 includes a camera subsystem 30 to capture the image of a moving object when the object moves into a viewing area, a lighting subsystem 12 to illuminate the moving object, and a controller 14 to control the camera subsystem and the lighting subsystem to effectively freeze and inspect the reflectance of the illumination by the moving object. The lighting subsystem includes light sources 16 arranged around the viewing area.
摘要翻译：根据优选实施例之一，本发明包括用于检查移动物体的机器视觉系统110。机器视觉系统110包括摄像机子系统30，用于当对象移动到观看区域中时拍摄移动物体的图像，照明子系统12照亮移动物体;以及控制器14，以控制照相机子系统和照明子系统有效地冻结和检查由移动物体照射的反射率。照明子系统包括布置在观看区域周围的光源16。

9. 发明申请

WO2008112021A3 SYSTEM FOR ILLUMINATING AND IMAGING AN OBJECT WITH A SPECULAR REFLECTING SURFACE 审中-公开
标题翻译：用于用具有反射表面的物体照射和成像物体的系统
公开(公告)号：WO2008112021A3
公开(公告)日：2008-12-24
申请号：PCT/US2007081560
申请日：2007-10-16
申请人： COHERIX INC , KLOOSTER ALEX , DAVIDSON DOUGLAS , UPHAM JON
发明人： KLOOSTER ALEX , DAVIDSON DOUGLAS , UPHAM JON
IPC分类号： G03B21/28
CPC分类号： H04N5/2256
摘要： A system for illuminating and imaging an object with a specular reflecting surface, including a reflector and an imaging-receiving device. The reflector provides substantially uniform diffusivity and substantially uniform reflectance of the light from an illumination source, and defines an aperture. The image-receiving device is located with a particular position behind the aperture of the reflector, and the aperture is sized with a particular dimension, such that the narcissus effect of the system is reduced to a single point and the object with the specular reflecting surface can be imaged with high accuracy.
摘要翻译：一种用于用包括反射器和成像接收装置的镜面反射表面照射和成像物体的系统。反射器提供来自照明源的光的基本上均匀的扩散率和基本均匀的反射率，并且限定孔。图像接收装置位于反射器的孔的后面的特定位置，并且孔径具有特定尺寸，使得系统的水仙效应降低到单个点，并且具有镜面反射表面的物体可以高精度成像。

10. 发明申请

WO2007070566A2 OPTICAL FIBER-DELIVERED REFERENCE BEAM FOR INTERFEROMETRIC IMAGING 审中-公开
标题翻译：光纤传输参考光束用于干涉成像
公开(公告)号：WO2007070566A2
公开(公告)日：2007-06-21
申请号：PCT/US2006/047521
申请日：2006-12-12
申请人： COHERIX, INC. , KLOOSTER, Alex , ALEKSOFF, Carl
发明人： KLOOSTER, Alex , ALEKSOFF, Carl
IPC分类号： G01B11/02 , G01B9/02
CPC分类号： G01B11/2441 , G01B9/02007
摘要： The present invention includes an interferometric imaging system including a paraboloid mirror defining an axis and an illumination source adapted to radiate light from an illumination point of an illumination optical fiber at an off-axis portion of the paraboloid mirror. The present invention also includes a reference illumination source adapted to illuminate the surface of an image receiver through a reference optical fiber with a reference beam having a selectable, variable, or predetermined phase with respect to the illumination source. The from the reference illumination source and light from the optical system cooperate to form a phase image of object on the image receiver.
摘要翻译：本发明包括一种干涉成像系统，其包括限定轴的抛物面镜和适于在抛物面镜的离轴部分处辐射来自照明光纤的照明点的光的照明源。本发明还包括参考照明源，其适于通过参考光纤照射图像接收器的表面，所述参考光纤具有相对于照明源具有可选择，可变或预定相位的参考光束。来自参考照明源和来自光学系统的光合作以在图像接收器上形成物体的相位图像。

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