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1. 发明申请

WO2007022213A3 SPECTROPHOTOMETER WITH LIGHT GUIDING ELEMENT 审中-公开
标题翻译：具有光引导元件的光谱仪
公开(公告)号：WO2007022213A3
公开(公告)日：2007-04-12
申请号：PCT/US2006031892
申请日：2006-08-15
申请人： X RITE INC , NISPER JON K , MATER MICHAEL J , BERG BERNARD J
发明人： NISPER JON K , MATER MICHAEL J , BERG BERNARD J
IPC分类号： G01J3/50
CPC分类号： G01J3/10 , G01J3/02 , G01J3/0213 , G01J3/0264 , G01J3/0272 , G01J3/0275 , G01J3/0289 , G01J3/0291 , G01J3/26 , G01J3/28 , G01J3/50 , G01J3/501 , G01J3/51 , G01J3/513 , G01J3/524 , G01J2003/1213 , G01J2003/1282 , G01J2003/2866 , G01J2003/467
摘要： An optical assembly for use with a spectrophotometer. The optical assembly may comprise an illumination source, a detection sensor, a monitor sensor, and an optical piece having a first side adapted to face a sample. The optical piece may define an illumination channel extending from the illumination source toward the first side. The optical piece may also define a detection channel extending from the first side toward the detection sensor, hi addition, the optical piece may define a monitor channel extending from the illumination channel toward the monitor sensor. Also, a light emitting diode (LED) assembly for use with an optical measurement device. The LED assembly may comprise a substrate having a top surface and a bottom surface and a plurality of LED dies positioned on the substrate to emit light in a first direction normal to the bottom surface of the substrate. The LED assembly may also comprise a plurality of leads in electrical contact with the plurality of LED dies. The plurality of leads may be positioned on the bottom surface of the substrate, and may be configured to surface-mount to a board.
摘要翻译：用于分光光度计的光学组件。光学组件可以包括照明源，检测传感器，监视器传感器和具有适于面向样品的第一侧的光学片。光学片可以限定从照明源向第一侧延伸的照明通道。光学片还可以限定从第一侧向检测传感器延伸的检测通道。此外，光学片可以限定从照明通道延伸到监视器传感器的监视器通道。另外，与光学测量装置一起使用的发光二极管（LED）组件。 LED组件可以包括具有顶表面和底表面的基板和位于基板上的多个LED管芯，以在垂直于基板的底表面的第一方向上发光。 LED组件还可以包括与多个LED管芯电接触的多个引线。多个引线可以位于基板的底表面上，并且可以被配置为表面安装到基板。

2. 发明申请

WO2008070635A9 METHOD AND SYSTEM FOR DETERMINING A CRITICAL DIMENSION OF AN OBJECT 审中-公开
标题翻译：用于确定对象的临界尺寸的方法和系统
公开(公告)号：WO2008070635A9
公开(公告)日：2008-09-12
申请号：PCT/US2007086310
申请日：2007-12-03
申请人： COHERIX INC , MATER MICHAEL J
发明人： MATER MICHAEL J
IPC分类号： G01B11/02
CPC分类号： G06T7/0006 , G01B11/06 , G06T7/521 , G06T2207/30148 , G06T2207/30164
摘要： The present invention includes systems and method of measuring a critical dimension of an object. The system of the present invention includes a multiwavelength interferometric imaging system having an image receiver that is adapted to receive reflected light and calculate a critical dimension of an object in response thereto. The system can also include a gage block defining a known dimension that is disposed at a predetermined distance from the multiwavelength interferometric imaging system. The gage block can define a surface that at least partially reflects incident light, and can be adapted to hold the object in a predetermined position during an imaging operation. During the imaging operation at least a portion of the light incident on the image receiver is reflected from the gage block, thereby allowing the image receiver to calculate a critical dimension of the object in response to the received image.
摘要翻译：本发明包括测量物体的临界尺寸的系统和方法。本发明的系统包括具有图像接收器的多波长干涉成像系统，该图像接收器适于接收反射光并且响应于此而计算物体的临界尺寸。该系统还可以包括限定与多波长干涉成像系统相距预定距离的已知尺寸的量具块。量块可以限定至少部分地反射入射光的表面，并且可以适于在成像操作期间将物体保持在预定位置。在成像操作期间，入射在图像接收器上的光的至少一部分从量块反射，由此允许图像接收器响应于接收到的图像来计算对象的临界尺寸。

3. 发明申请

WO2007022212A3 SPECTROPHOTOMETER WITH TEMPERATUR CORRECTED SYSTEM RESPONSE 审中-公开
公开(公告)号：WO2007022212A3
公开(公告)日：2007-02-22
申请号：PCT/US2006/031891
申请日：2006-08-15
申请人： X-RITE, INCORPORATED , NISPER, Jon, K. , MATER, Michael, J.
发明人： NISPER, Jon, K. , MATER, Michael, J.
IPC分类号： G01J3/28 , G01J3/46
摘要： An optical system comprising an optical instrument and a processing unit. The optical instrument may comprise an illumination source and a sensor. The processing unit may comprise a data storage having stored thereon a characterization of the illumination source and a characterization of the sensor. The processing unit may also comprise a computer configured to calculate a system response of the illumination source and the receiving element considering the characterization of the illumination source and the characterization of the receiving element.

4. 发明申请

WO2007022212A2 IMPROVED OPTICAL INSTRUMENT 审中-公开
标题翻译：改进的光学仪器
公开(公告)号：WO2007022212A2
公开(公告)日：2007-02-22
申请号：PCT/US2006031891
申请日：2006-08-15
申请人： X RITE INC , NISPER JON K , MATER MICHAEL J
发明人： NISPER JON K , MATER MICHAEL J
IPC分类号： G01J3/28 , G01J3/46
CPC分类号： G01J3/28 , G01J3/0275 , G01J3/0289 , G01J3/10 , G01J3/50 , G01J3/501 , G01J3/51 , G01J3/513 , G01J3/524 , G01J2003/1282 , G01J2003/2866 , G01J2003/467
摘要： An optical system comprising an optical instrument and a processing unit. The optical instrument may comprise an illumination source and a sensor. The processing unit may comprise a data storage having stored thereon a characterization of the illumination source and a characterization of the sensor. The processing unit may also comprise a computer configured to calculate a system response of the illumination source and the receiving element considering the characterization of the illumination source and the characterization of the receiving element.
摘要翻译：一种光学系统，包括光学仪器和处理单元。光学仪器可以包括照明源和传感器。处理单元可以包括其上存储有照明源的表征和传感器的表征的数据存储器。处理单元还可以包括计算机，其被配置为考虑照明源的特征和接收元件的表征来计算照明源和接收元件的系统响应。

5. 发明申请

WO2008070635A2 METHOD AND SYSTEM FOR DETERMINING A CRITICAL DIMENSION OF AN OBJECT 审中-公开
公开(公告)号：WO2008070635A2
公开(公告)日：2008-06-12
申请号：PCT/US2007086310
申请日：2007-12-03
申请人： COHERIX INC , MATER MICHAEL J
发明人： MATER MICHAEL J
IPC分类号： G06T7/40
CPC分类号： G06T7/0006 , G01B11/06 , G06T7/521 , G06T2207/30148 , G06T2207/30164
摘要： The present invention includes systems and method of measuring a critical dimension of an object. The system of the present invention includes a multiwavelength interferometric imaging system having an image receiver that is adapted to receive reflected light and calculate a critical dimension of an object in response thereto. The system can also include a gage block defining a known dimension that is disposed at a predetermined distance from the multiwavelength interferometric imaging system. The gage block can define a surface that at least partially reflects incident light, and can be adapted to hold the object in a predetermined position during an imaging operation. During the imaging operation at least a portion of the light incident on the image receiver is reflected from the gage block, thereby allowing the image receiver to calculate a critical dimension of the object in response to the received image.

6. 发明申请

WO2008020841A1 SENSING TEMPERATURE OF A LIGHT EMITTING DIODE 审中-公开
标题翻译：发光二极管的感应温度
公开(公告)号：WO2008020841A1
公开(公告)日：2008-02-21
申请号：PCT/US2006/031890
申请日：2006-08-15
申请人： X-RITE, INCORPORATED , NISPER, Jon, K. , MATER, Michael, J.
发明人： NISPER, Jon, K. , MATER, Michael, J.
IPC分类号： G01J5/60
CPC分类号： G01J5/602
摘要： A system (100) for sensing a temperature of a light emitting diode (LED). The system may comprise an LED having a spectral output centered at a first wavelength, a first filter (104) that transitions from attenuation to transmission at about the first wavelength, and a second filter (106) that transitions from transmission to attenuation at about the first wavelength. The system may also comprise a first sensor (108) positioned to sense a first intensity of the LED through the first filter and a second sensor (110) positioned to sense a second intensity of the LED through the second filter. It will be appreciated that a single sensor may be substituted instead of the first and second sensors, provided that the single sensor is capable of selectively viewing the LED through the first and the second filters. The system may also comprise a computer (112) configured to derive a temperature of the LED considering the first intensity and the second intensity.
摘要翻译：一种用于感测发光二极管（LED）的温度的系统（100）。该系统可以包括具有以第一波长为中心的频谱输出的LED，从衰减到大约第一波长的传输的第一滤波器（104）以及在大约第一波长处从传输转变为衰减的第二滤波器（106）第一波长。该系统还可以包括第一传感器（108），其定位成通过第一过滤器感测LED的第一强度;以及第二传感器（110），其定位成通过第二过滤器感测LED的第二强度。应当理解，单个传感器可以代替第一和第二传感器代替，只要单个传感器能够通过第一和第二过滤器选择性地观察LED。该系统还可以包括被配置为考虑第一强度和第二强度导出LED的温度的计算机（112）。

7. 发明申请

WO2006015262A3 METHOD FOR PROCESSING MULTIWAVELENGTH INTERFEROMETRIC IMAGING DATA 审中-公开
标题翻译：用于处理多波长干涉成像数据的方法
公开(公告)号：WO2006015262A3
公开(公告)日：2007-02-01
申请号：PCT/US2005027089
申请日：2005-07-29
申请人： COHERIX INC , MATER MICHAEL J , NISPER JON , PAWLANTA BRETT ALLEN , FURTWANGLER STEVEN CLAIR
发明人： MATER MICHAEL J , NISPER JON , PAWLANTA BRETT ALLEN , FURTWANGLER STEVEN CLAIR
IPC分类号： G01B11/02
CPC分类号： G01B9/02087 , G01B9/02007 , G01B11/2441 , G01B11/306
摘要： Data from an imaging interferometer producing at least three interferometric images of a surface of an object using at least three different frequencies of light illuminating the surface of the object is processed through a software data processing pipeline architecture which uses data processed by a plurality of data processors to generate a three dimensional surface profile of the surface of the object.
摘要翻译：使用通过使用由多个数据处理器处理的数据的软件数据处理流水线架构来处理使用至少三个不同的照射对象的表面的光的至少三个不同的光的频率来产生物体表面的至少三个干涉图像的成像干涉仪的数据以产生物体表面的三维表面轮廓。

8. 发明申请

WO2008080161A2 STABILIZING SYSTEM FOR A VIBRATION ISOLATION PLATFORM 审中-公开
标题翻译：用于振动隔离平台的稳定系统
公开(公告)号：WO2008080161A2
公开(公告)日：2008-07-03
申请号：PCT/US2007/088771
申请日：2007-12-23
申请人： COHERIX, INC. , KLOOSTER, Alex , MATER, Michael, J.
发明人： KLOOSTER, Alex , MATER, Michael, J.
IPC分类号： F16F7/00
CPC分类号： F16F15/04 , F16F7/10
摘要： The system, according to a first preferred embodiment of the invention, includes a vibration isolation platform, means for producing tension (such as a weight, a spring, or a piston), a first tension member attached to the means for producing tension and attached at a first point on the vibration isolation platform, a second tension member attached at substantially the same point on the means for producing tension as the first tension member, and attached at a second point, which is a distance from the first point, on the vibration isolation platform, and a support member that supports the vibration isolation platform against gravity and against tension produced by the means for producing tension.
摘要翻译：根据本发明的第一优选实施例的系统包括振动隔离平台，用于产生张力的装置（例如重物，弹簧或活塞），附接到用于产生张力和附接的装置的第一张力构件在隔振平台的第一点处，第二张力构件附接在用于产生与第一张力构件的张力的装置上的基本相同的点处，并且在与第一点相距一定距离的第二点处隔振平台和支撑构件，其支撑隔振平台以抵抗重力和由产生张力的装置产生的张力。

9. 发明申请

WO2008070635A3 METHOD AND SYSTEM FOR DETERMINING A CRITICAL DIMENSION OF AN OBJECT 审中-公开
公开(公告)号：WO2008070635A3
公开(公告)日：2008-06-12
申请号：PCT/US2007/086310
申请日：2007-12-03
申请人： COHERIX, INC. , MATER, Michael, J.
发明人： MATER, Michael, J.
IPC分类号： G01B11/02
摘要： The present invention includes systems and method of measuring a critical dimension of an object. The system of the present invention includes a multiwavelength interferometric imaging system having an image receiver that is adapted to receive reflected light and calculate a critical dimension of an object in response thereto. The system can also include a gage block defining a known dimension that is disposed at a predetermined distance from the multiwavelength interferometric imaging system. The gage block can define a surface that at least partially reflects incident light, and can be adapted to hold the object in a predetermined position during an imaging operation. During the imaging operation at least a portion of the light incident on the image receiver is reflected from the gage block, thereby allowing the image receiver to calculate a critical dimension of the object in response to the received image.

10. 发明申请

WO2007022213A2 IMPROVED OPTICAL INSTRUMENT AND COMPONENTS THEREOF 审中-公开
标题翻译：改进的光学仪器及其组件
公开(公告)号：WO2007022213A2
公开(公告)日：2007-02-22
申请号：PCT/US2006/031892
申请日：2006-08-15
申请人： X-RITE, INCORPORATED , NISPER, Jon, K. , MATER, Michael, J. , BERG, Bernard, J.
发明人： NISPER, Jon, K. , MATER, Michael, J. , BERG, Bernard, J.
IPC分类号： G01J3/50
CPC分类号： G01J3/10 , G01J3/02 , G01J3/0213 , G01J3/0264 , G01J3/0272 , G01J3/0275 , G01J3/0289 , G01J3/0291 , G01J3/26 , G01J3/28 , G01J3/50 , G01J3/501 , G01J3/51 , G01J3/513 , G01J3/524 , G01J2003/1213 , G01J2003/1282 , G01J2003/2866 , G01J2003/467
摘要： An optical assembly for use with a spectrophotometer. The optical assembly may comprise an illumination source, a detection sensor, a monitor sensor, and an optical piece having a first side adapted to face a sample. The optical piece may define an illumination channel extending from the illumination source toward the first side. The optical piece may also define a detection channel extending from the first side toward the detection sensor, hi addition, the optical piece may define a monitor channel extending from the illumination channel toward the monitor sensor. Also, a light emitting diode (LED) assembly for use with an optical measurement device. The LED assembly may comprise a substrate having a top surface and a bottom surface and a plurality of LED dies positioned on the substrate to emit light in a first direction normal to the bottom surface of the substrate. The LED assembly may also comprise a plurality of leads in electrical contact with the plurality of LED dies. The plurality of leads may be positioned on the bottom surface of the substrate, and may be configured to surface-mount to a board.
摘要翻译：用于分光光度计的光学组件。光学组件可以包括照明源，检测传感器，监视器传感器和具有适于面向样品的第一侧的光学片。光学片可以限定从照明源向第一侧延伸的照明通道。光学片还可以限定从第一侧向检测传感器延伸的检测通道。此外，光学片可以限定从照明通道延伸到监视器传感器的监视器通道。另外，与光学测量装置一起使用的发光二极管（LED）组件。 LED组件可以包括具有顶表面和底表面的衬底和位于衬底上的多个LED管芯，以在垂直于衬底的底表面的第一方向上发光。 LED组件还可以包括与多个LED管芯电接触的多个引线。多个引线可以定位在基板的底表面上，并且可以被配置为表面安装到基板。

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