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1. 发明专利

JP2001287178A AUTOMATIC CALIBRATION EQUIPMENT AND AUTOMATIC CALIBRATION METHOD FOR WAFER TRANSFER ROBOT 失效
公开(公告)号：JP2001287178A
公开(公告)日：2001-10-16
申请号：JP2000108883
申请日：2000-04-11
申请人： BERKELEY PROCESS CONTROL INC
发明人： SAGUES PAUL , JOHN T PYUURACCHI , SANJEI D AGGAAWARU
IPC分类号： B25J9/10 , B25J9/18 , B25J13/08 , H01L21/677 , H01L21/68
摘要： PROBLEM TO BE SOLVED: To provide automatic calibration equipment that can reproducibly and reliably operate a wafer handling robot. SOLUTION: A controller 24 in the automatic calibration equipment has a memory and a logic circuit, and is connected to a robot 22. The robot has an articulated arm 36 movable vertically Z, horizontally θ and radially R, and a wafer holding plate 42 at the end of the arm. The memory of the controller stores the dimensional characteristics of enclosures forming process stations 32 and of the wafer holding plate. Each enclosure and the wafer holding plate of the robot have sensors 44, 48 and 68, which send signals about the position of the wafer holding plate to the controller. The controller is programmed to execute, at the enclosures of the process stations, a series of sequential movements of the robot controlled by a combination of the signals from the sensors and the dimensional characteristic values.

2. 发明专利

JP2013061998A System for programmed control of signal input and output to and from cable conductors 审中-公开
标题翻译：信号输入和输出到电缆导体的编程控制系统
公开(公告)号：JP2013061998A
公开(公告)日：2013-04-04
申请号：JP2013002396
申请日：2013-01-10
申请人： Berkeley Process Control Inc , バークレー・プロセス・コントロール・インコーポレーテッド
发明人： PAUL SAGUES , LARRY BRASFIELD
IPC分类号： G05B19/05
CPC分类号： G05B19/0423 , G05B19/054 , G05B2219/1105 , G05B2219/1138 , G05B2219/1144 , G05B2219/21116 , G05B2219/25258 , G05B2219/25321
摘要： PROBLEM TO BE SOLVED: To provide an input/output module for implementing directions from a controller for sending and receiving signals to and from devices.SOLUTION: An input/output module includes a microprocessor for communicating with and receiving programs from a controller. The input/output module further includes device communication connectors, each having a number of pins, and each of the pin is interconnected with a cable conductor connected to a device. The input/output module has an ASIC for each of the pins, which provides a controlled interface with the corresponding pin. Each ASIC has an interconnection apparatus selectable by the microprocessor for providing a particular interface with the pin by which the ASIC functions.
摘要翻译：要解决的问题：提供用于实现来自控制器的方向的输入/输出模块，用于向设备发送和接收信号。解决方案：输入/输出模块包括用于与控制器进行通信和接收程序的微处理器。输入/输出模块还包括每个具有多个引脚的设备通信连接器，并且每个引脚与连接到设备的电缆导体互连。输入/输出模块具有针对每个引脚的ASIC，其提供与相应引脚的受控接口。每个ASIC具有可由微处理器选择的互连装置，用于提供与ASIC功能的引脚的特定接口。版权所有（C）2013，JPO＆INPIT

3. 发明专利

JP2000340639A ALIGNMENT DEVICE AND ALIGNMENT METHOD FOR DISK-LIKE ELEMENT 失效
公开(公告)号：JP2000340639A
公开(公告)日：2000-12-08
申请号：JP2000115348
申请日：2000-04-17
申请人： BERKELEY PROCESS CONTROL INC
发明人： SAGUES PAUL , GAUDIO STEPHEN A , WONG TIM K
IPC分类号： G01B11/00 , B65G49/07 , H01L21/68
摘要： PROBLEM TO BE SOLVED: To quickly and accurately provide an alignment device for a wafer operating. SOLUTION: This device is equipped with a controller 38, a rotary vacuum chuck 26 which supports a semiconductor wafer 12, a motor 30 which is connected to the controller and rotates the rotary vacuum chuck, an aligner 14 which has a light source 32 for generating the image of the figure of a wafer supported by the rotary vacuum chuck, a sensor 50 which lies under the light source and receives the image of the figure of the wafer, a logic circuit 52 which processes the output from this sensor and generates quadrature signal data concerning the outer edge of the wafer, and an arithmetic unit 46 which is provided within the controller so as to synchronize a motor for driving the rotary vacuum chuck for deciding the position of the datum point of the wafer to the rotary vacuum chuck and the geometric center of the wafer and the quadrature signal data from the sensor 50. Hereby, the chain of wafers are transferred separately to a station by a robot 10 and are disposed accurately in a prescribed direction.

4. 发明申请

WO2004024606A2 AUTOMATIC SPOOL PACKAGE EDGE QUALITY ASSESSMENT AND CORRECTION ALGORITHM FOR WINDING APPLICATIONS 审中-公开
标题翻译：用于卷绕应用的自动SPOOL封装边缘质量评估和校正算法
公开(公告)号：WO2004024606A2
公开(公告)日：2004-03-25
申请号：PCT/US2003/029525
申请日：2003-09-16
申请人： BERKELEY PROCESS CONTROL, INC.
发明人： WHITE, Alexander, Charles , KRAFT, Steven, Michael , SANDLER, Reuben
IPC分类号： B65H
CPC分类号： B65H54/2857
摘要： A method wherein nominal spool edge positions for each winding are calculated and used to initiate winding. During winding, the shape of the winding surface near the spool edges is calculated automatically. Preferably, an average spool radius is calculated over every two revolutions near the spool edge. The spool radii are then automatically plotted as a function of position along the spool axis, and a linear regression is performed to fit a line to the radii data. The shape is then used to correct the spool edge/turnaround points. If the shape is negative, indicating a reduced spool radius at the spool edge, the turnaround point is incremented outward toward the flanges an amount proportional to the slope. If the slope is positive, indicating a greater spool radius at the edges, the turnaround points are incremented inward, away from the flanges.
摘要翻译：计算每个绕组的标称卷轴边缘位置并用于启动卷绕的方法。在卷绕期间，自动计算卷轴边缘附近卷绕表面的形状。优选地，在卷轴边缘附近每两转计算平均卷轴半径。然后将线轴半径作为沿着线轴的位置的函数被自动绘制，并且执行线性回归以将线适合于半径数据。然后使用形状来校正阀芯边缘/周转点。如果形状为负，表示阀芯边缘处的阀芯半径减小，则周转点朝向凸缘向外增加与斜率成比例的量。如果斜率为正，则指示边缘处的较大的线轴半径，转向点向内增加，远离法兰。

5. 发明申请

WO2007135485A2 SYSTEM FOR PROGRAMMED CONTROL OF SIGNAL INPUT AND OUTPUT TO OR FROM CABLE CONDUCTORS 审中-公开
标题翻译：用于编程控制信号输入和输出到电缆导体的系统
公开(公告)号：WO2007135485A2
公开(公告)日：2007-11-29
申请号：PCT/IB2006004277
申请日：2006-12-05
申请人： BERKELEY PROCESS CONTROL INC , SAGUES PAUL , BRASFIELD LARRY
发明人： SAGUES PAUL , BRASFIELD LARRY
IPC分类号： G06F13/38
CPC分类号： G05B19/0423 , G05B19/054 , G05B2219/1105 , G05B2219/1138 , G05B2219/1144 , G05B2219/21116 , G05B2219/25258 , G05B2219/25321
摘要： An input/output module for implementing directions from a controller for sending and receiving signals to and from devices. The input/output module includes a microprocessor for communication with, and receiving programming from the controller. The input/output module further includes device communication connectors, each having number of pins, each pin for interconnection with a cable conductor to a device. The input/output module has an ASIC for each of the pins, providing a controlled interface with the corresponding pin. Each ASIC has interconnection apparatus, selectable by the microprocessor for providing a particular interface with the pin served by the ASIC.
摘要翻译：一个输入/输出模块，用于实现来自控制器的方向，用于向设备发送和接收信号。输入/输出模块包括用于与控制器进行通信和从控制器接收编程的微处理器。输入/输出模块还包括每个具有多个引脚的设备通信连接器，每个引脚用于将电缆导体与设备互连。输入/输出模块具有针对每个引脚的ASIC，为相应引脚提供受控接口。每个ASIC具有互连装置，可由微处理器选择，以提供由ASIC服务的引脚的特定接口。

6. 发明申请

WO2004095520A3 SYSTEM OF PATH PLANNING FOR ROBOTIC MANIPULATORS BASED ON MAXIMUM ACCELERATION AND FINITE JERK CONSTRAINTS 审中-公开
公开(公告)号：WO2004095520A3
公开(公告)日：2004-11-04
申请号：PCT/US2004/012639
申请日：2004-04-22
申请人： BERKELEY PROCESS CONTROL, INC.
发明人： ROGERS, John , PADMANABHAN, Prasad , SAGUES, Paul
IPC分类号： G06F7/00
摘要： A system for wafer handling employing a complex numerical method for calculating a path of wafer travel that controls wafer acceleration and jerk, and results in maximum safe speed of wafer movement from a first point to a second point. Motion is begun along a straight line segment while accelerating to a first path velocity. During this acceleration, the system computer calculates a series of straight line segments and interconnecting sinusiodally shaped paths over which the wafer is to be guided to the second point. The straight line segments and sinusiodally shaped paths are calculated so as to minimize total path length and the time required to move the wafer from the first point to the second point. The system computes the point of entrance and exit to and from each straight and sinusoidal path.

7. 发明申请

WO2003062114A1 HIGH SPEED TRANSFER TAKEUP 审中-公开
标题翻译：高速传输
公开(公告)号：WO2003062114A1
公开(公告)日：2003-07-31
申请号：PCT/US2003/001857
申请日：2003-01-21
申请人： BERKELEY PROCESS CONTROL, INC.
发明人： ANGOLD, Russ , BURNS, Jon , LYNCH, Brian , HARDING, Nathan , VAN WERT, Chris , CHEN, Yu-Han
IPC分类号： B65H54/22
CPC分类号： B65H67/052 , B65H65/00 , B65H67/0405 , B65H2701/32 , Y10T83/9292
摘要： An apparatus for transferring material (12) winding between spools (28, 30). The apparatus includes spindels for positioning first and second spools (28, 30) in a co-planar arrangement with parallel axes of rotation. With the material (12) initially secured to the base (38) of a first spool (30) with tape (78), a winding mechanism is energized to turn the spools (28, 30). When the first spool (30) is filled, a first sheave (34, 36) directs the incoming material (12) to the second spool (28) which is rotated at the rate of material (12) supply. A tape applicator (42, 43) is then directed to apply a section of tape (78, 94, 110) over the material (12), pressing it against the base (40) of the second spool (28). A small wire (79, 91, 112) is included on the base (38, 40, 96, 102) of the tape (78, 94, 110) being applied. The applicator force on the wire (79, 91, 112) against the material (12) is designed to be sufficient to sever the material (12). Separating the material (12) on the first spool (30) from the material (12) being wound on the second spool (28).
摘要翻译：一种用于转移卷绕在卷轴（28,30）之间的材料（12）的装置。该装置包括用于将第一和第二卷轴（28,30）定位成具有平行旋转轴线的共面布置的弹簧。当材料（12）最初用带（78）固定到第一卷轴（30）的基部（38）时，通过绕线机构来转动卷轴（28,30）。当第一卷轴（30）被填充时，第一滑轮（34,36）将进入的材料（12）引导到以材料（12）供给速率旋转的第二卷轴（28）。然后，带式施加器（42,43）被引导以在材料（12）上施加一段带（78,94,110），将其压靠在第二卷轴（28）的基部（40）上。在施加的带（78,94,110）的基座（38,40,96,102）上包括小线（79,91,112）。电线（79,91,112）上对着材料（12）施加的力被设计为足以切断材料（12）。将第一卷轴（30）上的材料（12）与卷绕在第二卷轴（28）上的材料（12）分离。

8. 发明申请

WO2002065307A1 CONFIGURABLE CONNECTORIZED I/O SYSTEM 审中-公开
标题翻译：可配置的连接I / O系统
公开(公告)号：WO2002065307A1
公开(公告)日：2002-08-22
申请号：PCT/US2002/004052
申请日：2002-02-11
申请人： BERKELEY PROCESS CONTROL, INC.
发明人： SAGUES, Paul , PEUARCH, John, T. , WOODS, Leslie, H.
IPC分类号： G06F13/00
CPC分类号： G05B19/054 , G05B2219/1105 , G05B2219/1138 , G05B2219/1144 , H01R29/00 , H01R2201/06
摘要： A system for making interconnections between an input/output module (66) and a first device (70) and a second device (70) wherein the system uses standard cables (68) and connectors (74). The input/output module (66) includes a standard first connector (74) for making connection with a standard first transmission line cable (68) for conveying signals between the module (66) and the first device (70), and at least one second connector (74), with such second connector (74) connecting to a first end of a second standard cable (68). A second end of the second standard cable (68) includes a standard cable connector (74) for making connection to a corresponding connector of the second device (70). The input/output module (66) is configured to contain programmable logic for making the required connections between the module (66) and the first and second devices (70).
摘要翻译：一种用于在输入/输出模块（66）和第一装置（70）和第二装置（70）之间进行互连的系统，其中所述系统使用标准电缆（68）和连接器（74）。输入/输出模块（66）包括用于与用于在模块（66）和第一设备（70）之间传送信号的标准第一传输线电缆（68）连接的标准第一连接器（74），以及至少一个第二连接器（74），其中第二连接器（74）连接到第二标准电缆（68）的第一端。第二标准电缆（68）的第二端包括用于连接到第二装置（70）的相应连接器的标准电缆连接器（74）。输入/输出模块（66）被配置为包含用于在模块（66）和第一和第二设备（70）之间进行所需连接的可编程逻辑。

9. 发明申请

WO2004026742A3 FIBER PAYOUT FOLLOWER 审中-公开
标题翻译：纤维支付费
公开(公告)号：WO2004026742A3
公开(公告)日：2005-08-11
申请号：PCT/US0329032
申请日：2003-09-19
申请人： BERKELEY PROCESS CONTROL INC
发明人： SANDLER REUBEN , BURNS JON , WHITE ALEXANDER CHARLES , MONTEEN BJORN , THOMAS JESSE , HARDING NATHAN H
IPC分类号： B65H20060101 , B65H43/00 , B65H49/00 , B65H49/18 , B65H54/28 , B65H57/28
CPC分类号： B65H49/18 , B65H57/28
摘要： A follower apparatus (10) mounted on a track (14) running parallel to an axis of rotation (24) of a spool (26). The apparatus has a base (20) with a roller (18) mounted thereon and having an axis of rotation (22) parallel to the rotational axis of the spool, the roller providing support and guidance to the material (28) being wound. A pulley (30) is rotatably mounted to receive material from the roller (18) and redirect the direction of material traveled. Light beams and detection apparatus (40, 42) are positioned to detect material excursions to pre-determined off center portions of the roller (18). The follower positioning apparatus (12) responds to signals detecting the material by repositioning the follower to place the material back on to a center zone of the roller.
摘要翻译：一种安装在平行于阀芯（26）的旋转轴线（24）的轨道（14）上的从动装置（10）。该装置具有安装在其上并具有平行于卷轴的旋转轴线的旋转轴线（22）的辊（18）的基座（20），所述辊为所述材料（28）提供支撑和引导。滑轮（30）被可旋转地安装以从辊（18）接收材料并且重新定向所行进的材料的方向。定位光束和检测装置（40,42）以检测到预定的辊（18）偏心部分的材料偏移。跟随器定位装置（12）通过重新定位跟随器来对材料进行响应，以将材料放回到辊的中心区域。

10. 发明申请

WO2004024606A3 AUTOMATIC SPOOL PACKAGE EDGE QUALITY ASSESSMENT AND CORRECTION ALGORITHM FOR WINDING APPLICATIONS 审中-公开
标题翻译：用于卷绕应用的自动SPOOL封装边缘质量评估和校正算法
公开(公告)号：WO2004024606A3
公开(公告)日：2005-07-21
申请号：PCT/US0329525
申请日：2003-09-16
申请人： BERKELEY PROCESS CONTROL INC
发明人： WHITE ALEXANDER CHARLES , KRAFT STEVEN MICHAEL , SANDLER REUBEN
IPC分类号： B65H20060101 , B65H54/28
CPC分类号： B65H54/2857
摘要： A method wherein nominal spool edge positions for each winding are calculated and used to initiate winding. During winding, the shape of the winding surface (34, 39) near the spool edges (L) is calculated automatically. Preferably, an average spool (14) radius is calculated over every two revolutions near the spool edge (L). The spool radii are then automatically plotted as a function of position along the spool axis (44), and a linear regression is performed to fit a line to the radii data. The shape is then used to correct the spool edge/turnaround points (18, 20). If the shape is negative (58), indicating a reduced spool radius at the spool edge, the turnaround point is incremented outward (62) toward the flanges (38, 40) an amount proportional to the slope. If the slope is positive (66), indicating a greater spool radius at the edges, the turnaround points (18, 20) are incremented inward (70), away from the flanges (38, 40).
摘要翻译：计算每个绕组的标称卷轴边缘位置并用于启动卷绕的方法。在卷绕期间，自动地计算卷轴边缘（L）附近的卷绕表面（34,39）的形状。优选地，在卷轴边缘（L）附近每两转计算平均卷轴（14）的半径。然后，阀芯半径作为沿着阀芯轴（44）的位置的函数被自动绘制，并且执行线性回归以将直线拟合到半径数据。然后使用形状来校正卷轴边缘/周转点（18,20）。如果形状为负（58），表示阀芯边缘处的减小的阀芯半径，则转向点向凸缘（38,40）向外增加与斜率成比例的量。如果斜率为正（66），则指示边缘处的较大的线轴半径，转向点（18,20）向外（70）向外增加，远离凸缘（38,40）。

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