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1. 发明申请

WO2007135485A3 SYSTEM FOR PROGRAMMED CONTROL OF SIGNAL INPUT AND OUTPUT TO OR FROM CABLE CONDUCTORS 审中-公开
公开(公告)号：WO2007135485A3
公开(公告)日：2007-11-29
申请号：PCT/IB2006/004277
申请日：2006-12-05
申请人： BERKELEY PROCESS CONTROL, INC. , SAGUES, Paul , BRASFIELD, Larry
发明人： SAGUES, Paul , BRASFIELD, Larry
IPC分类号： G06F13/38 , G06F13/00
摘要： An input/output module for implementing directions from a controller for sending and receiving signals to and from devices. The input/output module includes a microprocessor for communication with, and receiving programming from the controller. The input/output module further includes device communication connectors, each having number of pins, each pin for interconnection with a cable conductor to a device. The input/output module has an ASIC for each of the pins, providing a controlled interface with the corresponding pin. Each ASIC has interconnection apparatus, selectable by the microprocessor for providing a particular interface with the pin served by the ASIC.

2. 发明申请

WO2004095520A3 SYSTEM OF PATH PLANNING FOR ROBOTIC MANIPULATORS BASED ON MAXIMUM ACCELERATION AND FINITE JERK CONSTRAINTS 审中-公开
公开(公告)号：WO2004095520A3
公开(公告)日：2004-11-04
申请号：PCT/US2004/012639
申请日：2004-04-22
申请人： BERKELEY PROCESS CONTROL, INC.
发明人： ROGERS, John , PADMANABHAN, Prasad , SAGUES, Paul
IPC分类号： G06F7/00
摘要： A system for wafer handling employing a complex numerical method for calculating a path of wafer travel that controls wafer acceleration and jerk, and results in maximum safe speed of wafer movement from a first point to a second point. Motion is begun along a straight line segment while accelerating to a first path velocity. During this acceleration, the system computer calculates a series of straight line segments and interconnecting sinusiodally shaped paths over which the wafer is to be guided to the second point. The straight line segments and sinusiodally shaped paths are calculated so as to minimize total path length and the time required to move the wafer from the first point to the second point. The system computes the point of entrance and exit to and from each straight and sinusoidal path.

3. 发明申请

WO2002065307A1 CONFIGURABLE CONNECTORIZED I/O SYSTEM 审中-公开
标题翻译：可配置的连接I / O系统
公开(公告)号：WO2002065307A1
公开(公告)日：2002-08-22
申请号：PCT/US2002/004052
申请日：2002-02-11
申请人： BERKELEY PROCESS CONTROL, INC.
发明人： SAGUES, Paul , PEUARCH, John, T. , WOODS, Leslie, H.
IPC分类号： G06F13/00
CPC分类号： G05B19/054 , G05B2219/1105 , G05B2219/1138 , G05B2219/1144 , H01R29/00 , H01R2201/06
摘要： A system for making interconnections between an input/output module (66) and a first device (70) and a second device (70) wherein the system uses standard cables (68) and connectors (74). The input/output module (66) includes a standard first connector (74) for making connection with a standard first transmission line cable (68) for conveying signals between the module (66) and the first device (70), and at least one second connector (74), with such second connector (74) connecting to a first end of a second standard cable (68). A second end of the second standard cable (68) includes a standard cable connector (74) for making connection to a corresponding connector of the second device (70). The input/output module (66) is configured to contain programmable logic for making the required connections between the module (66) and the first and second devices (70).
摘要翻译：一种用于在输入/输出模块（66）和第一装置（70）和第二装置（70）之间进行互连的系统，其中所述系统使用标准电缆（68）和连接器（74）。输入/输出模块（66）包括用于与用于在模块（66）和第一设备（70）之间传送信号的标准第一传输线电缆（68）连接的标准第一连接器（74），以及至少一个第二连接器（74），其中第二连接器（74）连接到第二标准电缆（68）的第一端。第二标准电缆（68）的第二端包括用于连接到第二装置（70）的相应连接器的标准电缆连接器（74）。输入/输出模块（66）被配置为包含用于在模块（66）和第一和第二设备（70）之间进行所需连接的可编程逻辑。

4. 发明授权

EP1290452B1 SELF TEACHING ROBOTIC CARRIER HANDLING SYSTEM 有权
标题翻译：自学习支持机器人处理系统
公开(公告)号：EP1290452B1
公开(公告)日：2007-10-31
申请号：EP01939753.8
申请日：2001-05-30
申请人： Berkeley Process Control, Inc.
发明人： SAGUES, Paul , WIGGERS, Robert, T. , HARDING, Nathan, H. , AGGARWAL, Sanjay, K.
IPC分类号： H01L21/00
CPC分类号： H01L21/67259 , H01L21/67769
摘要： Embodiment of the present invention includes a wafer carrier buffer (10) for storage of a plurality of carriers containing wafers either waiting to be taken for processing in an adjacent wafer processing system, or waiting to be taken from the buffer following the processing. The buffer (10) has a sliding carrier first input apparatus for taking a carrier from outside the buffer though a buffer input door and into the buffer interior. A buffer controller (50) is included for directing robotic apparatus (44) to take the carrier from the input apparatus and place it on a selected one of a plurality of carrier storage locations, and from a carrier storage location to a first output for deliver of wafers to processing. The robotic apparatus (44) also delivers an empty carrier to a second input apparatus for receiving wafers from the processing area, and for delivery of a carrier with processed wafers to a second sliding output apparatus for removal from the buffer through a buffer output door. The controller (50) is programmed to direct an automatic calibration of all of the carrier storage locations and the input and output positions. The robotic apparatus (44) includes a sensor for detecting the position of a flange on a calibration fixture that is placed by the robot at a carrier storage location. The flange is accurately positioned on the fixture to correspond to a similar flange on each carrier that is used to engage with a tool on the robotic apparatus for moving the carrier. The calibration is preferably done by directing the robotic apparatus to place the calibration fixture at a location in need to calibration and then sensing the precise position of the fixture flange with the sensor apparatus. The controller (50) then calculates the coordinates required to place a carrier accurately in that location. This process is repeated for each carrier storage location and the input and output locations.

5. 发明公开

EP1282486A1 SELF TEACHING ROBOTIC WAFER HANDLING SYSTEM 审中-公开
标题翻译： AUTO DIDACTIC机器人晶片处理系统
公开(公告)号：EP1282486A1
公开(公告)日：2003-02-12
申请号：EP01932795.6
申请日：2001-04-30
申请人： Berkeley Process Control, Inc.
发明人： SAGUES, Paul , WIGGERS, Robert, T. , AGGARWAL, Sanjay, K. , D'SOUZA, Kevin, D. , HARDING, Nathan, H.
IPC分类号： B25J9/22
CPC分类号： H01L21/67265 , B25J9/1692 , G05B2219/37275 , G05B2219/39024 , G05B2219/39048 , G05B2219/39056 , G05B2219/40623 , G05B2219/45031 , H01L21/67766
摘要： A wafer handling apparatus (10) having input and output robotic systems directed by a programmed controller (32). The controller (32) is pre-programmed with approximate physical dimensions of the system components and their relative positions, and additionally programmed to automatically perform a precision calibration/teaching routine to gather more precise location data.

6. 发明授权

EP1360593B1 CONFIGURABLE CONNECTORIZED I/O SYSTEM 有权
标题翻译：可配置的连接式I / O系统
公开(公告)号：EP1360593B1
公开(公告)日：2010-05-26
申请号：EP02713575.5
申请日：2002-02-11
申请人： Berkeley Process Control, Inc.
发明人： SAGUES, Paul , PEUARCH, John, T. , WOODS, Leslie, H.
IPC分类号： G06F13/00 , G06F13/38 , G06F13/40 , H01B11/00 , H01B11/02 , G05B19/05
CPC分类号： G05B19/054 , G05B2219/1105 , G05B2219/1138 , G05B2219/1144 , H01R29/00 , H01R2201/06

7. 发明公开

EP1290452A1 SELF TEACHING ROBOTIC CARRIER HANDLING SYSTEM 有权
标题翻译：自学习支持机器人处理系统
公开(公告)号：EP1290452A1
公开(公告)日：2003-03-12
申请号：EP01939753.8
申请日：2001-05-30
申请人： Berkeley Process Control, Inc.
发明人： SAGUES, Paul , WIGGERS, Robert, T. , HARDING, Nathan, H. , AGGARWAL, Sanjay, K.
IPC分类号： G01R1/04
CPC分类号： H01L21/67259 , H01L21/67769
摘要： Embodiment of the present invention includes a wafer carrier buffer (10) for storage of a plurality of carriers containing wafers either waiting to be taken for processing in an adjacent wafer processing system, or waiting to be taken from the buffer following the processing. The buffer (10) has a sliding carrier first input apparatus for taking a carrier from outside the buffer though a buffer input door and into the buffer interior. A buffer controller (50) is included for directing robotic apparatus (44) to take the carrier from the input apparatus and place it on a selected one of a plurality of carrier storage locations, and from a carrier storage location to a first output for deliver of wafers to processing. The robotic apparatus (44) also delivers an empty carrier to a second input apparatus for receiving wafers from the processing area, and for delivery of a carrier with processed wafers to a second sliding output apparatus for removal from the buffer through a buffer output door. The controller (50) is programmed to direct an automatic calibration of all of the carrier storage locations and the input and output positions. The robotic apparatus (44) includes a sensor for detecting the position of a flange on a calibration fixture that is placed by the robot at a carrier storage location. The flange is accurately positioned on the fixture to correspond to a similar flange on each carrier that is used to engage with a tool on the robotic apparatus for moving the carrier. The calibration is preferably done by directing the robotic apparatus to place the calibration fixture at a location in need to calibration and then sensing the precise position of the fixture flange with the sensor apparatus. The controller (50) then calculates the coordinates required to place a carrier accurately in that location. This process is repeated for each carrier storage location and the input and output locations.

8. 发明公开

EP1960892A2 SYSTEM FOR PROGRAMMED CONTROL OF SIGNAL INPUT AND OUTPUT TO OR FROM CABLE CONDUCTORS 有权转让
标题翻译： SYSTEM FOR编程的控制信号输入和-EXPENDITURE或电缆线路
公开(公告)号：EP1960892A2
公开(公告)日：2008-08-27
申请号：EP06850479.4
申请日：2006-12-05
申请人： Berkeley Process Control, Inc.
发明人： SAGUES, Paul , BRASFIELD, Larry
IPC分类号： G06F13/38
CPC分类号： G05B19/0423 , G05B19/054 , G05B2219/1105 , G05B2219/1138 , G05B2219/1144 , G05B2219/21116 , G05B2219/25258 , G05B2219/25321
摘要： An input/output module for implementing directions from a controller for sending and receiving signals to and from devices. The input/output module includes a microprocessor for communication with, and receiving programming from the controller. The input/output module further includes device communication connectors, each having number of pins, each pin for interconnection with a cable conductor to a device. The input/output module has an ASIC for each of the pins, providing a controlled interface with the corresponding pin. Each ASIC has interconnection apparatus, selectable by the microprocessor for providing a particular interface with the pin served by the ASIC.

9. 发明公开

EP1360593A1 CONFIGURABLE CONNECTORIZED I/O SYSTEM 有权
标题翻译：可配置的连接式I / O系统
公开(公告)号：EP1360593A1
公开(公告)日：2003-11-12
申请号：EP02713575.5
申请日：2002-02-11
申请人： Berkeley Process Control, Inc.
发明人： SAGUES, Paul , PEUARCH, John, T. , WOODS, Leslie, H.
IPC分类号： G06F13/00 , G06F13/38 , G06F13/40 , H01B11/00 , H01B11/02
CPC分类号： G05B19/054 , G05B2219/1105 , G05B2219/1138 , G05B2219/1144 , H01R29/00 , H01R2201/06
摘要： A system for making interconnections between an input/output module (66) and a first device (70) and a second device (70) wherein the system uses standard cables (68) and connectors (74). The input/output module (66) includes a standard first connector (74) for making connection with a standard first transmission line cable (68) for conveying signals between the module (66) and the first device (70), and at least one second connector (74), with such second connector (74) connecting to a first end of a second standard cable (68). A second end of the second standard cable (68) includes a standard cable connector (74) for making connection to a corresponding connector of the second device (70). The input/output module (66) is configured to contain programmable logic for making the required connections between the module (66) and the first and second devices (70).
摘要翻译：一种用于在输入/输出模块（66）与第一装置（70）和第二装置（70）之间进行互连的系统，其中系统使用标准电缆（68）和连接器（74）。输入/输出模块（66）包括用于与用于在模块（66）和第一装置（70）之间传送信号的标准第一传输线缆（68）连接的标准第一连接器（74），以及至少一个第二连接器74，该第二连接器74连接到第二标准电缆68的第一端。第二标准电缆（68）的第二端包括用于连接到第二装置（70）的相应连接器的标准电缆连接器（74）。输入/输出模块（66）被配置为包含用于在模块（66）与第一和第二设备（70）之间进行所需连接的可编程逻辑。

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