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    • 1. 发明授权
    • Method for the thermal treatment of disk-shaped substrates
    • 盘状基板的热处理方法
    • US07704898B2
    • 2010-04-27
    • US11659587
    • 2004-10-28
    • Zsolt NenyeiSteffen FriggePatrick SchmidThorsten HülsmannThomas Theiler
    • Zsolt NenyeiSteffen FriggePatrick SchmidThorsten HülsmannThomas Theiler
    • H01L21/00
    • H01L21/324F27B5/04F27B17/0025H01L21/67115
    • Disclosed is an apparatus and a method for reducing flash in an injection mold (532 or 542,543) which molds a molded article between a first mold surface and a second mold surface. The apparatus includes an active material actuator (530 or 533a and 533b or 561a and 561b) configured to, in response to application or removal of an electrical actuation signal thereto, change dimension and urge the first mold surface relative to the second mold surface to reduce flash therebetween. The apparatus also includes a transmission structure (533) configured to provide in use, the electrical actuation signal to said active material actuator (530 or 533a and 533b or 561a and 561b) includes a set of active material actuators stacked one against the other to provide a varying sealing force to urge the first mold surface relative to the second mold surface.
    • 公开了一种用于减少在第一模具表面和第二模具表面之间模制模制品的注模(532或542,543)中的闪光的装置和方法。 该装置包括被配置为响应于施加或去除电致动信号而改变尺寸并且相对于第二模具表面推动第一模具表面以减少第一模具表面的活性材料致动器(530或533a和533b或561a和561b) 闪烁。 该设备还包括被配置为在使用中提供到所述活性材料致动器(530或533a和533b或561a和561b)的电致动信号的传输结构(533)包括一组彼此堆叠的活性材料致动器,以提供 不同的密封力以相对于第二模具表面推动第一模具表面。