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    • 1. 发明申请
    • MICRO DEVICE PACKAGING
    • 微型设备包装
    • US20120012963A1
    • 2012-01-19
    • US13145493
    • 2009-02-27
    • Zhuqing ZhangSteve P. HansonChien-Hua Chen
    • Zhuqing ZhangSteve P. HansonChien-Hua Chen
    • H01L31/0216
    • G02B5/284B81B2201/0292B81B2201/047B81C1/00888G02B1/11H01L2924/16235
    • In one embodiment, a method for making an optical micro device package includes: providing a substrate wafer having a plurality of solid state light sensors integrate therein; providing a transparent cover wafer coated with a material that alters the transparency characteristics of the cover wafer; forming a layer of light sensitive, photo definable adhesive material on the substrate wafer; selectively removing part of the layer of adhesive material in a pattern for a plurality of adhesive spacers between the substrate wafer and the cover wafer with each spacer surrounding a corresponding one of the light sensors; bonding the substrate wafer and the cover wafer together at the spacers to form a wafer assembly in which each spacer surrounds and seals a corresponding one of the light sensors within a cavity bounded by a spacer and the two wafers; and singulating individual device packages from the wafer assembly.
    • 在一个实施例中,一种用于制造光学微器件封装的方法包括:提供具有集成在其中的多个固态光传感器的衬底晶片; 提供涂覆有改变覆盖晶片的透明特性的材料的透明盖晶片; 在衬底晶片上形成一层光敏的可光定义粘合剂材料; 在衬底晶片和覆盖晶片之间的多个粘合剂间隔物的图案中选择性地去除粘合剂材料层的一部分,每个间隔物环绕相应的一个光传感器; 将衬底晶片和覆盖晶片在间隔件处结合在一起以形成晶片组件,其中每个间隔件在由间隔件和两个晶片限定的空腔内围绕并密封相应的一个光传感器; 以及从晶片组件分离单个器件封装。
    • 10. 发明授权
    • Fabrication tool for bonding
    • 用于粘接的加工工具
    • US07866364B2
    • 2011-01-11
    • US11413333
    • 2006-04-28
    • Chien-Hua ChenTroy D. SchwinabartWilliam M. Atkinson
    • Chien-Hua ChenTroy D. SchwinabartWilliam M. Atkinson
    • G02B6/00
    • H01L21/67092
    • A fabrication tool presses a first device surface against a second device surface after the first and the second device surfaces have been plasma activated, to bond the first device surface with the second device surface. The fabrication tool includes a bonding piston to exert force on the first device surface to press the first device surface against the second device surface. The fabrication tool also includes a pressure plate situated between the bonding piston and the first device surface. The fabrication tool further includes a mechanism to ensure that the force exerted by the bonding piston on the first device surface via the pressure plate is initially exerted at one or more first locations on the first device surface and subsequently exerted at one or more second locations on the first device surface.
    • 在第一和第二装置表面已被等离子体激活之后,制造工具将第一装置表面压靠第二装置表面,以将第一装置表面与第二装置表面结合。 制造工具包括粘合活塞,以在第一装置表面施加力以将第一装置表面压靠第二装置表面。 制造工具还包括位于接合活塞和第一装置表面之间的压力板。 制造工具还包括机构,以确保由第一装置表面经由压板施加的结合活塞的力最初施加在第一装置表面上的一个或多个第一位置上,随后在一个或多个第二位置上施加 第一个设备表面。