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    • 1. 发明授权
    • Method of online predicting maintenance of an apparatus
    • 在线预测设备维护的方法
    • US08154721B2
    • 2012-04-10
    • US12441032
    • 2007-09-05
    • Zhuo ChenLiqiong HuKai Xie
    • Zhuo ChenLiqiong HuKai Xie
    • G01J3/00
    • H01L21/67253
    • A method of online predicting maintenance of an apparatus is disclosed. Using an optical emission spectroscopy (OES) positioned on the apparatus and the change of emission spectrum intensity detected by the OES in the process, according to the detected results, measuring the parameter in the process, the function relation between the process parameter and spectrum intensity is acquired. A control threshold is decided by the processing requirement to the apparatus. When the parameter exceeds the control threshold, maintenance to the etching apparatus is engaged in order to avoid processing error caused by frequent shutdown or deficient maintenance which is estimated by experience, and hence decreasing the cost and increasing processing efficiency of substrates (such as silicon wafers) without changing apparatus and adding other online sensor, and improving production rate by avoiding waste substrates caused by error processing results. The method is suitable for semiconductor substrate etching maintenance of the apparatus and also other maintenance of the apparatus.
    • 公开了在线预测设备维护的方法。 使用位于设备上的光发射光谱(OES)和OES在该过程中检测到的发射光谱强度的变化,根据检测结果,测量过程中的参数,处理参数与光谱强度之间的函数关系 被收购。 控制阈值由对该装置的处理要求决定。 当参数超过控制阈值时,为了避免由经验估计的频繁停机或维护不足引起的处理误差,因此进行对蚀刻装置的维护,从而降低了基板(例如硅晶片)的成本和提高处理效率 ),不需要更换设备和添加其他在线传感器,并通过避免由错误处理结果引起的废弃基板来提高生产率。 该方法适用于设备的半导体衬底蚀刻维护以及设备的其他维护。
    • 2. 发明申请
    • METHOD OF ONLINE PREDICTING MAINTENANCE OF AN APPARATUS
    • 在线预测装置的维护方法
    • US20100042452A1
    • 2010-02-18
    • US12441032
    • 2007-09-05
    • Zhuo ChenLiqiong HuKai Xie
    • Zhuo ChenLiqiong HuKai Xie
    • G06F11/30
    • H01L21/67253
    • A method of online predicting maintenance of an apparatus is disclosed. Using an optical emission spectroscopy (OES) positioned on the apparatus and the change of emission spectrum intensity detected by the OES in the process, according to the detected results, measuring the parameter in the process, the function relation between the process parameter and spectrum intensity is acquired. A control threshold is decided by the processing requirement to the apparatus. When the parameter exceeds the control threshold, maintenance to the etching apparatus is engaged in order to avoid processing error caused by frequent shutdown or deficient maintenance which is estimated by experience, and hence decreasing the cost and increasing processing efficiency of substrates (such as silicon wafers) without changing apparatus and adding other online sensor, and improving production rate by avoiding waste substrates caused by error processing results. The method is suitable for semiconductor substrate etching maintenance of the apparatus and also other maintenance of the apparatus.
    • 公开了在线预测设备维护的方法。 使用位于设备上的光发射光谱(OES)和OES在该过程中检测到的发射光谱强度的变化,根据检测结果,测量过程中的参数,处理参数与光谱强度之间的函数关系 被收购。 控制阈值由对该装置的处理要求决定。 当参数超过控制阈值时,为了避免由经验估计的频繁停机或维护不足引起的处理误差,因此进行对蚀刻装置的维护,从而降低了基板(例如硅晶片)的成本和提高处理效率 ),不需要更换设备和添加其他在线传感器,并通过避免由错误处理结果引起的废弃基板来提高生产率。 该方法适用于设备的半导体衬底蚀刻维护以及设备的其他维护。
    • 9. 发明授权
    • System and method of generating soft bits
    • 生成软比特的系统和方法
    • US08184745B2
    • 2012-05-22
    • US12328359
    • 2008-12-04
    • Kai XieSattar Elyasi
    • Kai XieSattar Elyasi
    • H04B1/10
    • H04L25/067H04L27/38
    • A receiver receives a received signal from a communication link, the received signal comprising a stream of symbols modulated onto a carrier, each of the stream symbols selected from a constellation of symbols to represent a plurality of encoded data bits. The receiver comprises a demodulator to produce a stream of received symbols derived from the received signal; a channel decoder to produce a received stream of data bits derived from the stream of received symbols; and a memory device to store information related to the plurality of symbols in the constellation. For each of the symbols in the stream of received symbols, the demodulator: determines which of the plurality of symbols in the constellation is a respective closest symbol to that received symbol; identifies a respective nearest neighbor symbol for each data bit represented by the closest symbol for that received symbol based on the information stored in the memory device; and for each data bit represented by the respective closest symbol for that received symbol, subtracts the distance between the respective closest symbol and that received symbol from the distance between the respective nearest neighbor symbol and that received symbol in order to produce respective soft bits for that received symbol.
    • 接收机从通信链路接收接收到的信号,所接收的信号包括调制到载波上的符号流,每个流符号从符号星座中选出以表示多个编码数据位。 接收机包括解调器,用于产生从接收信号导出的接收符号流; 信道解码器,用于产生从接收到的符号流导出的接收的数据比特流; 以及存储装置,用于存储与星座中的多个符号有关的信息。 对于接收符号流中的每个符号,解调器:确定星座中的多个符号中的哪个符号是与该接收符号相应的最近的符号; 基于存储在存储装置中的信息,识别由该接收符号的最近符号表示的每个数据位的相应最近邻符号; 并且对于由该接收符号的相应最近的符号表示的每个数据位,从相应的最近邻符号和该接收符号之间的距离中减去相应的最近符号与该接收符号之间的距离,以产生相应的最终相邻符号与该接收符号的相应软比特 收到的符号。
    • 10. 发明申请
    • JOINT CHANNEL ESTIMATION AND MODULATION DETECTION
    • 联合通道估计和调制检测
    • US20100260281A1
    • 2010-10-14
    • US12422545
    • 2009-04-13
    • Kai XieSattar Elyasi
    • Kai XieSattar Elyasi
    • H04L27/00H04L27/18
    • H04L27/0012H04L25/0226
    • A receiver comprises a demodulator to estimate channel impulse response and timing synchronization information for the received signal and to select a modulation technique for demodulating the received signal; and a channel decoder to produce a binary sequence from the received signal demodulated according to the selected modulation technique; wherein the demodulator: demodulates the received signal according to a first modulation technique and a second modulation technique to produce a first demodulated signal and a second demodulated signal, respectively; calculates a minimum distance between a first reconstructed signal including the training sequence and the first demodulated signal to estimate the channel impulse response and timing synchronization information; calculates a minimum distance between a second reconstructed signal including the training sequence and the second demodulated signal to estimate the channel impulse response and timing synchronization information; compares the minimum distance corresponding to the first demodulated signal with the minimum distance corresponding to the second demodulated signal; and selects the modulation technique, from among the first and second modulation techniques, that corresponds to the smaller minimum distance.
    • 接收机包括:解调器,用于估计接收信号的信道脉冲响应和定时同步信息,并选择用于解调接收信号的调制技术; 以及信道解码器,用于根据所选择的调制技术解调的接收信号产生二进制序列; 其中所述解调器:根据第一调制技术和第二调制技术解调所接收的信号,以分别产生第一解调信号和第二解调信号; 计算包括训练序列的第一重构信号与第一解调信号之间的最小距离,以估计信道脉冲响应和定时同步信息; 计算包括训练序列的第二重构信号与第二解调信号之间的最小距离,以估计信道脉冲响应和定时同步信息; 将对应于第一解调信号的最小距离与对应于第二解调信号的最小距离进行比较; 并且从第一和第二调制技术中选择对应于较小最小距离的调制技术。