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1. 发明申请

WO2004031837A8 DEVICE FOR REDUCING COHERENCE 审中-公开
标题翻译：安排一致性还原
公开(公告)号：WO2004031837A8
公开(公告)日：2004-10-28
申请号：PCT/EP0310074
申请日：2003-09-11
申请人： ZEISS CARL SMS GMBH , BRUNNER ROBERT , BURKHARDT MATTHIAS , ERDMANN LARS , MENCK ALEXANDER
发明人： BRUNNER ROBERT , BURKHARDT MATTHIAS , ERDMANN LARS , MENCK ALEXANDER
IPC分类号： G02B27/14 , G02B27/48
CPC分类号： G02B27/144 , G02B27/143 , G02B27/145 , G02B27/48
摘要： The invention relates to a device for reducing the coherence of a light beam, especially a laser light beam for illuminating the image surface of a probe. According to the invention, said device comprises a beam divider, e.g. a first divider cube (2) whereon an incident beam (1) is divided into two partial beams (4,5), a device for reconstituting a beam, e.g. a second divider cube (6) whereon the partial beams (4,5) are recombined to form an outgoing light beam (10), and deflector elements, e.g. mirrors (8,9) which are positioned in the light paths of the partial beams (4,5) between the two devices. The lengths of the light paths of the partial beams (4,5) vary and the length difference is such that the coherence of the wave trains/phase space cells is exceeded, whereby the ability to cause mutual interference is reduced or removed.
摘要翻译：本发明涉及一种装置，用于减少光束的相干性，特别是激光束用于照射的图像区域或样品。根据本发明，这样的布置包括一设备，用于分束，例如第一分束器立方体（2）中，在其中入射光束（1）分割成两个部分光束（4,5），用于组合光束的装置，例如第二分束器立方体（6）在其上的部分光束（4,5）被组合以形成一个输出光束（10）和偏转元件，例如反射镜（8,9）布置在所述部分光束的光路（4,5）这两个装置之间被定位，其中，所述副光束的光路长度（4，5）是不同的，在长度上的差异是如此之大，使得波列的相干在部分光束/相位空间的细胞（图4，5）的上限，因此，它们彼此干扰能力降低或取消。

2. 发明申请

WO03029873A2 METHOD AND DEVICE FOR REDUCING SPECKLE IN AN OPTICAL SYSTEM 审中-公开
标题翻译：方法和装置的光学系统，减少斑点
公开(公告)号：WO03029873A2
公开(公告)日：2003-04-10
申请号：PCT/EP0210626
申请日：2002-09-21
申请人： ZEISS CARL JENA GMBH , BRUNNER ROBERT , BURKHARDT MATTHIAS , ERDMANN LARS , MENCK ALEXANDER
发明人： BRUNNER ROBERT , BURKHARDT MATTHIAS , ERDMANN LARS , MENCK ALEXANDER
IPC分类号： G02B27/48 , G03F7/20 , G02B26/00
CPC分类号： G03F7/70583 , G02B27/48
摘要： The invention relates to a method and device for reducing speckle in an optical system by decreasing the spatial coherence of a bundle of light beams. According to the invention, a bundle of light beams is reflected by at least two reflective surfaces each having a phase-shifting microstructuring via which the bundle of light beams (B) is split into partial bundles of beams (B') whose optical paths differ by more than the temporal coherence length. This enables the reduction of speckle while maintaining, to the greatest possible extent, the luminous intensity of the bundle of light beams.
摘要翻译：本发明涉及一种通过减少光束的空间相干性的减少光学系统中的散斑的方法和装置。根据本发明，体现在至少两个反射面的光束，每一个都具有相移的微结构，通过该在分光束（B“）的光束（B）被分割时，光路长度由除了时间相干长度更不同。使得光束光斑的光强度是在最大限度维护减少。

3. 发明申请

WO2004029689A3 LIGHTING DEVICE COMPRISING A DEVICE FOR REDUCING THE COHERENCE OF A LIGHT BEAM 审中-公开
标题翻译：与装置用照明装置，以减少光束的协调性
公开(公告)号：WO2004029689A3
公开(公告)日：2004-06-24
申请号：PCT/EP0310538
申请日：2003-09-22
申请人： ZEISS CARL MICROELECTRONIC SYS , BISCHOFF JOERG , BRUNNER ROBERT , BURKHARDT MATTHIAS , ERDMANN LARS , STEINER REINHARD
发明人： BISCHOFF JOERG , BRUNNER ROBERT , BURKHARDT MATTHIAS , ERDMANN LARS , STEINER REINHARD
IPC分类号： G02B21/06 , G02B27/14 , G02B27/48 , G02B27/10 , G03F7/20
CPC分类号： G02B27/106 , G02B21/06 , G02B27/123 , G02B27/126 , G02B27/144 , G02B27/145
摘要： The invention relates to an lighting device comprising a beam multiplication device (1) which divides a coherent beam (18) into a plurality of partial beams (20, 21) and combines said partial beams to form a bundle of rays (26) once they have followed paths having different optical lengths, the partial beams (27, 28, 29, 30) diverging in said bundle of rays. Said lighting device also comprises a micro-optical system (3) which is arranged downstream from the beam multiplication device (1) and comprises a plurality of optical elements (19) arranged in a grid-type manner. Said bundle of rays (26) hits the micro-optical system (3), and the partial beams (27, 28, 29, 30) of the bundle of rays (26) thus hit each optical element (19) at different angles, in such a way that a plurality of illumination partial beams (M1, M2, M3, M4) irradiate from each optical element (19) in different diffusion directions and can be used to illuminate an object field (31).
摘要翻译：它是一个光束乘法装置（1），包括一个提供相干光束（18）分割为多个部分光束的照明装置（20，21）被分开，并且这些通过路径具有不同的光程的光束（26）后一起，其中子光束（27，28，29，30）发散，并且还包括在所述Strahlvervielfachseinrichtung（1）下游的微光学器件（3），包括rasteratig的Veilzahl布置的光学元件（19），被设置，其中所述光束（26）（在微光学 3）适用，由此（在梁（26）以不同的角度满足的每个光学元件19）的Teislstrahlen（27，28，29，30），以使得（由每个光学元件19）的多个照明子束（M1，M2，M3，M4的）继续进行传播的不同方向，这可以被用于照明物场（31）。

4. 发明专利

DE102005049572A1 Homogenizing and beam forming device for microscope light, has lenses, where each lens represents output plane downstream its basic distributions, such that distributions are formed superimposed, and intensity distribution exists in plane 未知
公开(公告)号：DE102005049572A1
公开(公告)日：2007-04-19
申请号：DE102005049572
申请日：2005-10-17
申请人： ZEISS CARL SMS GMBH , ZEISS CARL JENA GMBH
发明人： BURKHARDT MATTHIAS , BRUNNER ROBERT , PESCH ALEXANDER
IPC分类号： G02B21/06
摘要： The device has a lens array (4) downstream to an optical array (2) and including lenses (5). A condenser lens (6) is provided downstream to the array (4), and the array (2) divides an incident optical beam such that a preset geometrical basic distribution of the beam intensity in the plane in a periodically repeated manner. Each lens represents an output plane downstream its basic distributions together with the lens (6), in the lens (6), such that the basic distributions are formed superimposed. An intensity distribution corresponding to the basic distributions exists in the plane. An independent claim is also included for a homogenizing and beam forming method for a homogenizing and beam forming device.

5. 发明专利

DE10322806B4 未知
公开(公告)号：DE10322806B4
公开(公告)日：2007-03-01
申请号：DE10322806
申请日：2003-05-16
申请人： ZEISS CARL SMS GMBH
发明人： STEINER REINHARD , DOBSCHAL HANS-JUERGEN , RUDOLF KLAUS , BRUNNER ROBERT , BISCHOFF JOERG , TRAEGER STEFAN , KOWARSCHIK RICHARD , ZOELLNER FRIEDRICH , DARSCHT MAXIM , ECKARDT PETER
IPC分类号： G02B27/09 , G02B27/28 , G02B27/44 , G02B27/48 , G02F1/09 , H01S3/10 , H01S3/225

6. 发明专利

DE50304739D1 未知
公开(公告)号：DE50304739D1
公开(公告)日：2006-10-05
申请号：DE50304739
申请日：2003-07-19
申请人： ZEISS CARL SMS GMBH
发明人： DOBSCHAL HANS-JUERGEN , GREIF-WUESTENBECKER JOERN , BRUNNER ROBERT , ROSENKRANZ NORBERT , SCHERUEBL THOMAS
IPC分类号： G21K7/00 , G21K1/06

7. 发明专利

AT331973T 未知
公开(公告)号：AT331973T
公开(公告)日：2006-07-15
申请号：AT03785604
申请日：2003-09-22
申请人： ZEISS CARL SMS GMBH
发明人： BISCHOFF JOERG , BRUNNER ROBERT , BURKHARDT MATTHIAS , ERDMANN LARS , STEINER REINHARD
IPC分类号： G02B21/06 , G02B27/14 , G02B27/48

8. 发明专利

DE10319269A1 未知
公开(公告)号：DE10319269A1
公开(公告)日：2004-11-25
申请号：DE10319269
申请日：2003-04-25
申请人： ZEISS CARL SMS GMBH
发明人： DOBSCHAL HANS-JUERGEN , GREIF-WUESTENBECKER JOERN , BRUNNER ROBERT , ROSENKRANZ NORBERT , SCHERUEBL THOMAS
IPC分类号： G21K1/06 , G21K7/00 , G02B21/16

9. 发明专利

DE10325461A1 未知
公开(公告)号：DE10325461A1
公开(公告)日：2004-12-30
申请号：DE10325461
申请日：2003-06-05
申请人： ZEISS CARL SMS GMBH , ZEISS CARL JENA GMBH
发明人： BURKHARDT MATTHIAS , ERDMANN LARS , STEINER REINHARD , BRUNNER ROBERT
IPC分类号： G02B27/09 , G02B27/46 , G03F7/20 , G02B27/00

10. 发明专利

DE10319268A1 未知
公开(公告)号：DE10319268A1
公开(公告)日：2004-12-02
申请号：DE10319268
申请日：2003-04-25
申请人： ZEISS CARL SMS GMBH
发明人： DOBSCHAL HANS-JUERGEN , GREIF-WUESTENBECKER JOERN , BRUNNER ROBERT , ROSENKRANZ NORBERT , SCHERUEBL THOMAS
IPC分类号： G02B17/00 , G02B19/00 , G02B21/12 , G02B21/16 , G02B27/10 , G03F7/20 , G02B27/12
摘要： The invention relates to an imaging system in which a diffractive optical element is used by both the illumination beam path and the imaging beam path. Said diffractive element operates in the reflection mode or transmission mode according to the specifications of the system design. At least one of the imaging optical elements provided in the beam path of the inventive diffractive beam splitter for imaging systems is used for both the illumination beam path and the imaging beam path. Said element represents a diffractive optical element (DOE) and requires no spatial separation between the imaging beam path and the illumination beam path in the object space by using different diffraction arrays. The number of reflective optical elements can be decreased by using diffractive optical elements, resulting in the cost of the system being reduced and the service life of the optical components being increased by using a low-power EUV source.

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