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1. 发明申请

US20100089882A1 HIGH SPEED LASER SCRIBING METHOD OF FRAGILE MATERIAL 有权
标题翻译：高速激光切割方法的脆性材料
公开(公告)号：US20100089882A1
公开(公告)日：2010-04-15
申请号：US12417112
申请日：2009-04-02
申请人： Yutaka TAMURA
发明人： Yutaka TAMURA
IPC分类号： B23K26/00
CPC分类号： B28D1/221 , B23K26/0608 , B23K26/0676 , B23K26/14 , B23K26/146 , B23K26/364 , B23K26/40 , B23K26/705 , B23K2103/50 , C03B33/0222 , C03B33/093 , G02F1/133351 , H01S3/005
摘要： In a method for scribing fragile material, a laser beam is irradiated onto a work plate of the fragile material. The work plate is heated by absorption of the irradiated laser beam and generating thermal stress by the heating. The laser beam is formed by a plurality of laser beam groups arranged along a beam scanning direction on a same line, and the plurality of laser beam groups are divided into two groups. One takes charge of initial heating and rising up temperature of the work plate, and another takes charge of temperature holding of the work plate. The laser beam intensity corresponding to each of the laser beam groups is adjusted so as to obtain optimum values.By the method, it is possible to remarkably increase scribing speed of the work plate of the fragile materials without increasing heating temperature.
摘要翻译：在用于划伤易碎材料的方法中，将激光束照射到脆性材料的工作板上。通过吸收照射的激光束来加热工作板，并通过加热产生热应力。激光束由在同一条线上沿着光束扫描方向排列的多个激光束组形成，并且将多个激光束组分成两组。负责工作板的初始加热和上升温度，另一个负责工作板的温度保持。调整对应于每个激光束组的激光束强度，以获得最佳值。通过该方法，可以在不增加加热温度的情况下显着增加脆性材料的工作板的划线速度。

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