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    • 9. 发明申请
    • Light irradiator and light irradiating method
    • 光照射器和光照射法
    • US20050269298A1
    • 2005-12-08
    • US10533948
    • 2003-10-24
    • Shin HottaKoichi TsukiharaAkifumi OhshimaTakashi MizusawaMasaaki Abe
    • Shin HottaKoichi TsukiharaAkifumi OhshimaTakashi MizusawaMasaaki Abe
    • B23K26/06B23K26/08H01L21/20H01L21/268
    • H01L21/02675B23K26/064B23K26/0643B23K26/0648B23K26/08B23K26/082H01L21/2026H01L21/268
    • A light irradiator used as a laser annealing apparatus is provided which includes a controller (9) which controls a solid-state laser (4) to make pulse-on operation by detecting that the angle of rotation of a rotating shaft (7a) becomes +β after the rotating direction of the rotating shaft (7a) changes from clockwise to counterclockwise and then make pulse-off operation by detecting that the angle of rotation become −β, while controlling the solid-state laser (4) to make the pulse-on operation by detecting that the angle of rotation becomes −β after the rotating direction changes from counterclockwise to clockwise and then make the pulse-off operation by detecting that the angle of rotation becomes +β. Further, the controller (9) controls a moving stage (3) to move at a constant velocity in a constant-velocity moving direction, and move over a predetermined distance in a predetermined-distance moving direction after a to-be-annealed object (2) is irradiated with the light beam on a range from one end thereof to the other end in the constant-velocity moving direction, thereby irradiating the whole surface of the to-be-irradiated object (2) with a uniform energy.
    • 提供了一种用作激光退火装置的光照射器,其包括控制器(9),控制器(9)通过检测旋转轴(7a)的旋转角度变为(...),控制固态激光器(4)进行脉冲接通操作 旋转轴(7a)的旋转方向的旋转角度(β)的β+β在顺时针方向向逆时针方向变化,然后通过检测旋转角度变为-beta来进行脉冲关闭操作,同时控制固态激光器 通过检测旋转方向从逆时针方向向顺时针方向变化后的旋转角变为-beta,然后通过检测旋转角度为+β进行脉冲关闭操作,进行脉冲开启操作。 此外,控制器(9)控制移动台(3)以等速移动方向以恒定速度移动,并且在待退火物体之后在预定距离移动方向上移动预定距离( 2)在恒定速度移动方向的一端至另一端的范围内用光束照射,从而以均匀的能量照射被照射物体(2)的整个表面。