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    • 9. 发明申请
    • SUBSTRATE POLISHING METHOD AND DEVICE
    • 基板抛光方法和装置
    • US20120045968A1
    • 2012-02-23
    • US13015016
    • 2011-01-27
    • Nobukazu HOSOKAIIsamu OGUROJun WATANABETetsujiro TADA
    • Nobukazu HOSOKAIIsamu OGUROJun WATANABETetsujiro TADA
    • B24B1/00
    • B24B9/065
    • A substrate polishing method includes starting to rotate a circular substrate and polishing an inner peripheral edge surface of a center circular hole formed in the circular substrate into a chamfered or rounded surface by pressing the inner peripheral edge surface against a bypass polishing part of a polishing tape that is conveyed intermittently or continuously and by oscillating the bypass polishing part of the polishing tape about a direction perpendicular to a direction that the center circular hole penetrates through the circular substrate. The polishing tape is guided so as to have an advancing portion advancing toward the circular substrate, a returning portion returning from the circular substrate, and a turning-back portion between the advancing portion and the returning portion guided along a side bypass. The bypass polishing part of the polishing tape is the turning-back portion of the polishing tape.
    • 衬底抛光方法包括:开始旋转圆形衬底并将形成在圆形衬底中的中心圆形孔的内周缘表面通过将内周边表面压靠在抛光带的旁路抛光部分上来研磨成倒角或圆形表面 间歇地或连续地传送,并且通过围绕与中心圆孔穿过圆形基底的方向垂直的方向摆动抛光带的旁路抛光部分。 该抛光带被引导为具有朝向圆形基板前进的前进部分,从圆形基板返回的返回部分和沿着旁路引导引导的前进部分和返回部分之间的回转部分。 研磨带的旁路抛光部是研磨带的折回部。
    • 10. 发明申请
    • ACCELERATION SENSOR AND ACCELERATION DETECTING APPARATUS
    • 加速度传感器和加速度检测装置
    • US20110174075A1
    • 2011-07-21
    • US12985554
    • 2011-01-06
    • Jun WATANABEKazuyuki NAKASENDO
    • Jun WATANABEKazuyuki NAKASENDO
    • G01P15/09
    • G01P15/097G01P15/09
    • An acceleration sensor includes a piezoelectric sensor and a support plate including a first support surface and a second support surface for supporting the piezoelectric sensor, wherein the support plate includes a first plate piece, a second plate piece, and a hinge portion connecting opposite side edges of the first plate piece and the second plate piece, wherein the piezoelectric sensor element has a longitudinal shape extending in a direction perpendicular to the sensing axis direction and is separated from the support surfaces in the longitudinal direction of the hinge portion so that the center of the sensor element in the lateral direction is located within the width of the hinge portion in the lateral direction.
    • 加速度传感器包括压电传感器和支撑板,该支撑板包括用于支撑压电传感器的第一支撑表面和第二支撑表面,其中支撑板包括第一板件,第二板件和铰链部分, 所述第一板片和所述第二板片,其中所述压电传感器元件具有沿垂直于所述感测轴线方向的方向延伸的纵向形状,并且在所述铰链部分的纵向方向上与所述支撑表面分离, 传感器元件在横向方向上位于铰链部分的宽度方向上。