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1. 发明授权

US07601402B2 Method for forming insulation film and apparatus for forming insulation film 失效
标题翻译：用于形成绝缘膜的方法和用于形成绝缘膜的装置
公开(公告)号：US07601402B2
公开(公告)日：2009-10-13
申请号：US10703092
申请日：2003-11-07
申请人： Yusaku Kashiwagi , Yoshihisa Kagawa , Kohei Kawamura , Gishi Chung
发明人： Yusaku Kashiwagi , Yoshihisa Kagawa , Kohei Kawamura , Gishi Chung
IPC分类号： H05H1/24
CPC分类号： C23C16/45523 , C23C16/401 , C23C16/56 , F27B17/0025 , H01J37/32082 , H01L21/67161 , H01L21/67207
摘要： A method for forming a porous insulating film includes an insulating film forming step and a hole forming step. During the insulating film forming step, plasma processing of an organic siloxane group compound and an organic compound having a polar group forms an insulating film having a siloxane structure. Molecules of the organic compound having a polar group are contained within this siloxane structure. During the hole forming step, excitation gas removes molecules of the organic compound having a polar group to provide holes in the insulating film. According to this method, an insulating film with a predetermined thickness and holes formed uniformly in the thickness direction can be obtained.
摘要翻译：形成多孔绝缘膜的方法包括绝缘膜形成步骤和孔形成步骤。在绝缘膜形成步骤中，有机硅氧烷基化合物和具有极性基团的有机化合物的等离子体处理形成具有硅氧烷结构的绝缘膜。具有极性基团的有机化合物的分子包含在该硅氧烷结构内。在孔形成步骤期间，激发气体除去具有极性基团的有机化合物的分子，以在绝缘膜中提供孔。根据该方法，可以得到厚度方向均一地形成有规定厚度的绝缘膜和孔。

2. 发明申请

US20060205191A1 Substrate processing method 失效
标题翻译：基板加工方法
公开(公告)号：US20060205191A1
公开(公告)日：2006-09-14
申请号：US11431720
申请日：2006-05-11
申请人： Yusaku Kashiwagi , Yasuhiro Oshima , Yoshihisa Kagawa , Gishi Chung
发明人： Yusaku Kashiwagi , Yasuhiro Oshima , Yoshihisa Kagawa , Gishi Chung
IPC分类号： B08B6/00 , H01L21/20
CPC分类号： H01L21/0234 , C23C16/401 , C23C16/56 , H01L21/02126 , H01L21/3121
摘要： A method of forming a low-K dielectric film, comprises the steps of placing a substrate carrying thereon a low-K dielectric film on a stage, heating the low-K dielectric film on the stage, processing the low-K dielectric film by plasma of a processing gas containing a hydrogen gas, the plasma being excited while supplying the processing gas over the low-K dielectric film, wherein the plasma is excited within 90 seconds after placing the substrate upon the stage.
摘要翻译：形成低K电介质膜的方法包括以下步骤：将载有低K电介质膜的衬底放置在载物台上，加热载体上的低K电介质膜，通过等离子体处理低K电介质膜的含有氢气的处理气体，等离子体被激发，同时在低K电介质膜上提供处理气体，其中等离子体在将基板放置在载物台之后的90秒内被激发。

3. 发明授权

US07662728B2 Substrate processing method 失效
标题翻译：基板加工方法
公开(公告)号：US07662728B2
公开(公告)日：2010-02-16
申请号：US11431720
申请日：2006-05-11
申请人： Yusaku Kashiwagi , Yasuhiro Oshima , Yoshihisa Kagawa , Gishi Chung
发明人： Yusaku Kashiwagi , Yasuhiro Oshima , Yoshihisa Kagawa , Gishi Chung
IPC分类号： H01L21/31
CPC分类号： H01L21/0234 , C23C16/401 , C23C16/56 , H01L21/02126 , H01L21/3121
摘要： A method of forming a low-K dielectric film, comprises the steps of placing a substrate carrying thereon a low-K dielectric film on a stage, heating the low-K dielectric film on the stage, processing the low-K dielectric film by plasma of a processing gas containing a hydrogen gas, the plasma being excited while supplying the processing gas over the low-K dielectric film, wherein the plasma is excited within 90 seconds after placing the substrate upon the stage.
摘要翻译：形成低K电介质膜的方法包括以下步骤：将载有低K电介质膜的衬底放置在载物台上，加热载体上的低K电介质膜，通过等离子体处理低K电介质膜的含有氢气的处理气体，等离子体被激发，同时在低K电介质膜上提供处理气体，其中等离子体在将基板放置在载物台之后的90秒内被激发。

4. 发明申请

US20080054454A1 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE 失效
标题翻译：半导体器件及制造半导体器件的方法
公开(公告)号：US20080054454A1
公开(公告)日：2008-03-06
申请号：US11846807
申请日：2007-08-29
申请人： Yoshihisa Kagawa , Tsutomu Shimayama , Takatoshi Kameshima
发明人： Yoshihisa Kagawa , Tsutomu Shimayama , Takatoshi Kameshima
IPC分类号： H01L21/4763 , H01L23/48
CPC分类号： H01L23/53295 , H01L21/76811 , H01L21/7682 , H01L21/76832 , H01L21/76835 , H01L23/53238 , H01L23/5329 , H01L2221/1047 , H01L2924/0002 , H01L2924/00
摘要： Disclosed herein is a semiconductor device including: an insulating film configured to be provided on a substrate and be porosified through decomposition and removal of a pore-forming material; a covering insulating film configured to be provided on the insulating film; and conductive layer patterns configured to be provided in the covering insulating film and the insulating film and reach the substrate, wherein the insulating film includes a non-porous region in which the pore-forming material remains.
摘要翻译：本发明公开了一种半导体器件，包括：绝缘膜，其被配置为设置在基板上，并通过分解除去成孔材料而使其致孔化; 构造成设置在所述绝缘膜上的覆盖绝缘膜; 以及配置为设置在覆盖绝缘膜和绝缘膜中并到达基板的导电层图案，其中绝缘膜包括残留成孔材料的无孔区域。

5. 发明申请

US20070209381A1 Automatic icemaker 失效
标题翻译：自动制冰机
公开(公告)号：US20070209381A1
公开(公告)日：2007-09-13
申请号：US11716550
申请日：2007-03-12
申请人： Kenji Sugaya , Yoshihisa Kagawa , Hideaki Ito
发明人： Kenji Sugaya , Yoshihisa Kagawa , Hideaki Ito
IPC分类号： F25C1/00 , F25C1/22
CPC分类号： F25C5/06 , F25C2305/022 , F25C2400/06
摘要： An automatic icemaker of the present invention includes a control box, an ice-making tray supporting frame rotatably supported and rotated by the control box, at least one ice-making tray rotatably supported by the ice-making tray supporting frame, a rotation limiter fixed to the ice-making tray supporting frame and limiting the rotation of the ice-making tray, a stopper fixed to the control box, and a projection provided to the ice-making tray. Irregularities are provided to at least one of the contact surfaces of the stopper and projection.
摘要翻译：本发明的自动制冰机包括控制箱，由控制箱可旋转地支撑和旋转的制冰托盘支撑框架，由制冰托盘支撑框架可旋转地支撑的至少一个制冰托盘，旋转限制器固定制冰托盘支撑框架并限制制冰托盘的旋转，固定到控制箱的止动件和设置到制冰盘的突起。不规则性被提供给止动器和突起的至少一个接触表面。

6. 发明授权

US08896125B2 Semiconductor device, fabrication method for a semiconductor device and electronic apparatus 有权
标题翻译：半导体器件，半导体器件和电子设备的制造方法
公开(公告)号：US08896125B2
公开(公告)日：2014-11-25
申请号：US13533526
申请日：2012-06-26
申请人： Yoshihisa Kagawa , Kenichi Aoyagi , Yoshiya Hagimoto , Nobutoshi Fujii
发明人： Yoshihisa Kagawa , Kenichi Aoyagi , Yoshiya Hagimoto , Nobutoshi Fujii
IPC分类号： H01L23/48 , H01L23/52 , H01L29/40 , H01L23/00 , H01L21/768 , H01L27/146 , H01L27/06
CPC分类号： H01L27/14636 , H01L21/76807 , H01L21/7684 , H01L21/76841 , H01L21/76843 , H01L23/481 , H01L23/528 , H01L23/5283 , H01L23/53223 , H01L23/53238 , H01L23/53266 , H01L23/53295 , H01L23/564 , H01L24/03 , H01L24/05 , H01L24/06 , H01L24/08 , H01L24/80 , H01L24/83 , H01L27/0688 , H01L27/14609 , H01L27/14621 , H01L27/14625 , H01L27/1464 , H01L27/14645 , H01L27/1469 , H01L2221/1031 , H01L2224/02245 , H01L2224/05027 , H01L2224/0508 , H01L2224/05124 , H01L2224/05147 , H01L2224/05166 , H01L2224/05181 , H01L2224/05546 , H01L2224/05547 , H01L2224/05571 , H01L2224/05573 , H01L2224/05578 , H01L2224/05647 , H01L2224/05686 , H01L2224/08121 , H01L2224/08145 , H01L2224/0903 , H01L2224/80011 , H01L2224/80013 , H01L2224/80091 , H01L2224/80097 , H01L2224/80203 , H01L2224/80345 , H01L2224/80357 , H01L2224/80895 , H01L2224/80896 , H01L2224/83345 , H01L2924/00014 , H01L2924/12043 , H01L2924/13091 , H04N5/369 , H01L2924/00012 , H01L2924/05442 , H01L2924/05042 , H01L2924/053 , H01L2924/049 , H01L2924/00 , H01L2224/05552
摘要： Disclosed herein is a semiconductor device, including: a first substrate including a first electrode, and a first insulating film configured from a diffusion preventing material for the first electrode and covering a periphery of the first electrode, the first electrode and the first insulating film cooperating with each other to configure a bonding face; and a second substrate bonded to and provided on the first substrate and including a second electrode joined to the first electrode, and a second insulating film configured from a diffusion preventing material for the second electrode and covering a periphery of the second electrode, the second electrode and the second insulating film cooperating with each other to configure a bonding face to the first substrate.
摘要翻译：本发明公开了一种半导体器件，包括：第一基板，包括第一电极和由用于第一电极的扩散防止材料构成的第一绝缘膜，并且覆盖第一电极的周边，第一电极和第一绝缘膜协作彼此配置接合面; 以及第二基板，其接合并设置在所述第一基板上并且包括接合到所述第一电极的第二电极，以及由用于所述第二电极的扩散防止材料构成并覆盖所述第二电极的周边的第二绝缘膜，所述第二电极并且所述第二绝缘膜彼此配合以配置到所述第一基板的接合面。

7. 发明申请

US20110240948A1 MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME 有权
标题翻译：存储器件及其制造方法
公开(公告)号：US20110240948A1
公开(公告)日：2011-10-06
申请号：US13048500
申请日：2011-03-15
申请人： Yoshihisa Kagawa
发明人： Yoshihisa Kagawa
IPC分类号： H01L45/00 , H01L21/02
CPC分类号： H01L45/085 , H01L27/112 , H01L27/24 , H01L45/12 , H01L45/1233 , H01L45/124 , H01L45/1246 , H01L45/1266 , H01L45/146 , H01L45/1625 , H01L45/1675
摘要： A memory device includes: a memory layer that is isolated for each memory cell and stores information by a variation of a resistance value; an ion source layer that is formed to be isolated for each memory cell and to be laminated on the memory layer, and contains at least one kind of element selected from Cu, Ag, Zn, Al and Zr and at least one kind of element selected from Te, S and Se; an insulation layer that isolates the memory layer and the ion source layer for each memory cell; and a diffusion preventing barrier that is provided at a periphery of the memory layer and the ion source layer of each memory cell to prevent the diffusion of the element.
摘要翻译：存储器件包括：存储器层，其被隔离用于每个存储器单元并且通过电阻值的变化来存储信息; 形成为每个存储单元分离并层压在存储层上的离子源层，并且包含选自Cu，Ag，Zn，Al和Zr中的至少一种元素和选自至少一种元素从Te，S和Se; 绝缘层，隔离每个存储单元的存储层和离子源层; 以及设置在每个存储单元的存储层和离子源层的周围的防扩散阻挡层，以防止元件的扩散。

8. 发明授权

US07845180B2 Automatic icemaker 失效
标题翻译：自动制冰机
公开(公告)号：US07845180B2
公开(公告)日：2010-12-07
申请号：US11716550
申请日：2007-03-12
申请人： Kenji Sugaya , Yoshihisa Kagawa , Hideaki Ito
发明人： Kenji Sugaya , Yoshihisa Kagawa , Hideaki Ito
IPC分类号： F25C1/00
CPC分类号： F25C5/06 , F25C2305/022 , F25C2400/06
摘要： An automatic icemaker of the present invention includes a control box, an ice-making tray supporting frame rotatably supported and rotated by the control box, at least one ice-making tray rotatably supported by the ice-making tray supporting frame, a rotation limiter fixed to the ice-making tray supporting frame and limiting the rotation of the ice-making tray, a stopper fixed to the control box, and a projection provided to the ice-making tray. Irregularities are provided to at least one of the contact surfaces of the stopper and projection.
摘要翻译：本发明的自动制冰机包括控制箱，由控制箱可旋转地支撑和旋转的制冰托盘支撑框架，由制冰托盘支撑框架可旋转地支撑的至少一个制冰托盘，旋转限制器固定制冰托盘支撑框架并限制制冰托盘的旋转，固定到控制箱的止动件和设置到制冰盘的突起。不规则性被提供给止动器和突起的至少一个接触表面。

9. 发明授权

US07037092B2 Roller pump with housing having integrated reduction gear housing 失效
标题翻译：带有外壳的滚子泵具有集成的减速齿轮箱
公开(公告)号：US07037092B2
公开(公告)日：2006-05-02
申请号：US10092524
申请日：2002-03-08
申请人： Yoshihisa Kagawa , Kazuhide Yamazaki , Seiji Kojima
发明人： Yoshihisa Kagawa , Kazuhide Yamazaki , Seiji Kojima
IPC分类号： F04B43/08
CPC分类号： F04B9/02 , A61M5/14232 , F04B43/1253 , F04B43/1276
摘要： A roller pump comprises a pump housing having a cylindrical inner surface, a rotor fixed to a drive shaft placed at the central portion of the pump housing, rollers provided around the rotor and a driver for driving the drive shaft through a reduction gear. The rollers press an elastic tube installed between the rollers and the inner surface of the pump housing to transfer a liquid in the elastic tube by rotation of the rotor. The pump housing and the reduction gear are integrated into one body and an output shaft of the reduction gear is fixed to the drive shaft of the rotor. A stepping motor is used as the driver. A part of the inner surface of the pump housing is composed of a semicircle, another part of the inner surface is composed of a partial circle of which center is shifted from the center of the semicircle. The inlet and outlet slots are provided with levers for pressing the inlet or outlet portion into the inlet or outlet slot to hold inlet or outlet portion in the inlet or outlet slot respectively.
摘要翻译：辊泵包括具有圆柱形内表面的泵壳体，固定到位于泵壳体的中心部分处的驱动轴的转子，设置在转子周围的滚子和用于通过减速齿轮驱动驱动轴的驱动器。辊子按压安装在辊子和泵壳体的内表面之间的弹性管，以通过转子旋转来传递弹性管中的液体。泵壳体和减速齿轮集成在一体内，减速机的输出轴固定在转子的驱动轴上。使用步进电机作为驱动器。泵壳的内表面的一部分由半圆形构成，内表面的另一部分由中心从半圆的中心偏移的部分圆组成。入口和出口狭槽设有用于将入口或出口部分压入入口或出口狭槽的杠杆，以分别将入口或出口部分保持在入口或出口槽中。

10. 发明授权

US09720405B2 Antenna inspection system, antenna inspection apparatus and antenna inspection method 有权
公开(公告)号：US09720405B2
公开(公告)日：2017-08-01
申请号：US14383695
申请日：2013-03-08
申请人： Yoshihisa Kagawa , Hiroyuki Sato
发明人： Yoshihisa Kagawa , Hiroyuki Sato
IPC分类号： G06F19/00 , G05B19/418 , H01Q3/08 , H01Q1/12 , H01Q1/42 , G01M11/00 , G01S3/32 , G06K9/62 , G06K9/78 , H01Q3/02 , H04N7/18 , G05B23/02 , G06T7/70
CPC分类号： G05B19/41875 , G01M11/00 , G01S3/325 , G05B23/0218 , G05B2219/31304 , G06K9/6201 , G06K9/78 , G06T7/70 , H01Q1/125 , H01Q1/42 , H01Q3/02 , H01Q3/08 , H04N7/183
摘要： A POL-axis driving unit, an EL-axis driving unit, a Cross-EL-axis driving unit and an AZ-axis driving unit of an antenna apparatus drive respective axis drive motors controlled by a control unit of a control apparatus, such that the antenna performs an origin detection operation for each axis. The camera control unit controls a camera so as to capture an image of the antenna at each timing before and after the origin detection for each axis. An image acquisition unit of an antenna inspection acquires image data that indicates the image of the antenna captured by the camera and makes storage unit store the image data. A comparing diagnosis unit compares image data before the origin detection for each axis with image data after the origin detection, and diagnoses whether the antenna is in a normal state.

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