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    • 4. 发明授权
    • Method and apparatus for signal phase calibration
    • 用于信号相位校准的方法和装置
    • US08519765B2
    • 2013-08-27
    • US13228508
    • 2011-09-09
    • Mao-Hsuan ChouMin-Shueh YuanChih-Hsien Chang
    • Mao-Hsuan ChouMin-Shueh YuanChih-Hsien Chang
    • H03H11/16
    • H03K5/135H03B19/00H03L7/099
    • A method for signal phase calibration includes providing multiple periodic clock signals, including a reference signal and multiple phase shifted versions of the reference signal. The signals have a common frequency and are shifted from one another by multiples of a phase offset. An edge of a first signal is detected. The first signal is one of multiple phase shifted versions of the reference signal. The edge is a transition from a first logic value to a second logic value. The second logic value of the first signal is compared, upon detection of the edge, to a logic value of a second signal that is one of the first plurality of periodic clock signals other than the first signal. An inversion of the first signal is selectively provided based on an outcome of the comparison.
    • 用于信号相位校准的方法包括提供多个周期性时钟信号,包括参考信号和参考信号的多个相移版本。 这些信号具有共同的频率并且相互偏移倍数的相位偏移。 检测到第一信号的边缘。 第一个信号是参考信号的多个相移版本之一。 边缘是从第一逻辑值到第二逻辑值的转换。 第一信号的第二逻辑值在检测到边缘时被比较为除了第一信号之外的第一多个周期性时钟信号之一的第二信号的逻辑值。 基于比较的结果选择性地提供第一信号的反转。
    • 8. 发明授权
    • Skew sensitive calculation for misalignment from multi patterning
    • 对多图案化的偏移的偏移计算
    • US08589831B1
    • 2013-11-19
    • US13561189
    • 2012-07-30
    • Chih-Hsien ChangMin-Shueh YuanTsung-Hsien Tsai
    • Chih-Hsien ChangMin-Shueh YuanTsung-Hsien Tsai
    • G06F17/50
    • G06F17/5068
    • Some aspects of the present disclosure provide for a method of accurately simulating variations in an operating parameter, due to processing variations caused by a multi-patterning exposure, by reducing the impact of layout sections having a large width and spacing. The method assigns a skew sensitive index to one or more sections of a multi-patterning layer formed with a first mask. Runlengths of the one or more sections are respectively multiplied by an assigned skew sensitive index to determine a skew variation for each of the one or more sections. The overall skew variation sum is then determined by summing the skew variation for each of the one or more sections. By separately determining the effects of processing variations (e.g., mask misalignment) for different sections of a multi-patterning layer, an accurate measurement of operating parameter variations is achieved.
    • 本公开的一些方面提供了通过减小​​具有大的宽度和间隔的布局部分的影响,由于由多图案化曝光引起的处理变化,准确地模拟操作参数的变化的方法。 该方法为由形成有第一掩模的多图案化层的一个或多个部分分配偏斜敏感指数。 一个或多个部分的运行长度分别乘以一个分配的偏移敏感指数,以确定一个或多个部分中的每个部分的偏斜变化。 然后通过对一个或多个部分中的每一个的偏斜变化求和来确定总体偏差变化和。 通过分别确定多图案化层的不同部分的处理变化(例如,掩模未对准)的影响,实现了操作参数变化的精确测量。
    • 9. 发明授权
    • BIST circuit for phase measurement
    • 用于相位测量的BIST电路
    • US09229050B2
    • 2016-01-05
    • US13205722
    • 2011-08-09
    • Tsung-Hsien TsaiMin-Shueh YuanChih-Hsien Chang
    • Tsung-Hsien TsaiMin-Shueh YuanChih-Hsien Chang
    • G01R31/3187G01R31/30G01R31/317
    • G01R31/3016G01R31/31725G01R31/31726G01R31/31727G01R31/3187
    • A BIST circuit for high speed applications includes a phase difference detection circuit, a period-to-current conversion circuit having an input coupled to an output of the phase difference detection circuit and a current-to-voltage conversion circuit coupled to an output of the period-to-current conversion circuit. The phase difference detection circuit includes first NAND logic for receiving as inputs an input clock signal and a delayed version of an inverted version of the input clock signal; second NAND logic for receiving as inputs the inverted version of the input clock signal and a delayed version of the input clock signal; third NAND logic for receiving as inputs the input clock signal and the delayed version of the input clock signal; and fourth NAND logic for receiving as inputs the inverted version of the input clock signal and a delayed version of the inverted version of the input clock signal.
    • 用于高速应用的BIST电路包括相位差检测电路,具有耦合到相位差检测电路的输出的输入的周期到电流转换电路和耦合到该相位差检测电路的输出的电流 - 电压转换电路 周期到电流转换电路。 相位差检测电路包括用于接收输入时钟信号和输入时钟信号的反相版本的延迟版本作为输入的第一NAND逻辑; 用于接收输入时钟信号的反相版本和输入时钟信号的延迟版本的第二NAND逻辑; 用于接收输入时钟信号和输入时钟信号的延迟版本作为输入的第三NAND逻辑; 以及用于接收输入时钟信号的反相版本和输入时钟信号的反相版本的延迟版本的第四NAND逻辑。