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1. 发明申请

US20060122728A1 Method and system for thermal process control 有权
标题翻译：热过程控制方法和系统
公开(公告)号：US20060122728A1
公开(公告)日：2006-06-08
申请号：US11001767
申请日：2004-12-02
申请人： Yung-Chih Chang , Cheng-I Sun , Chun-I Kuo , Fu-Kun Yeh , Hsueh-Chi Shen
发明人： Yung-Chih Chang , Cheng-I Sun , Chun-I Kuo , Fu-Kun Yeh , Hsueh-Chi Shen
IPC分类号： G06F19/00
CPC分类号： G05B17/02 , H01L21/67248
摘要： A thermal process system. The thermal process system comprises a thermal processor, a metrology tool, and a controller. The thermal processor performs a thermal process as defined by a heating model to form a film on a wafer surface. The metrology tool, interfaced with the thermal processor, inspects thickness of the film. The controller, coupled with the thermal processor and the metrology tool, generates the heating model of the thermal processor and calibrates the heating model according to a preset slope coefficient matrix and the measured thickness.
摘要翻译：热处理系统。热处理系统包括热处理器，计量工具和控制器。热处理器执行由加热模型定义的热处理，以在晶片表面上形成膜。与热处理器接口的计量工具检查胶片的厚度。控制器与热处理器和计量工具相结合，产生热处理器的加热模型，并根据预设的斜率系数矩阵和测量厚度校准加热模型。

2. 发明授权

US07751908B2 Method and system for thermal process control 有权
标题翻译：热过程控制方法和系统
公开(公告)号：US07751908B2
公开(公告)日：2010-07-06
申请号：US11001767
申请日：2004-12-02
申请人： Yung-Chih Chang , Cheng-I Sun , Chun-I Kuo , Fu-Kun Yeh , Hsueh-Chi Shen
发明人： Yung-Chih Chang , Cheng-I Sun , Chun-I Kuo , Fu-Kun Yeh , Hsueh-Chi Shen
IPC分类号： G06F19/00 , G05D7/00
CPC分类号： G05B17/02 , H01L21/67248
摘要： A thermal process system. The thermal process system comprises a thermal processor, a metrology tool, and a controller. The thermal processor performs a thermal process as defined by a heating model to form a film on a wafer surface. The metrology tool, interfaced with the thermal processor, inspects thickness of the film. The controller, coupled with the thermal processor and the metrology tool, generates the heating model of the thermal processor and calibrates the heating model according to a preset slope coefficient matrix and the measured thickness.
摘要翻译：热处理系统。热处理系统包括热处理器，计量工具和控制器。热处理器执行由加热模型定义的热处理，以在晶片表面上形成膜。与热处理器接口的计量工具检查胶片的厚度。控制器与热处理器和计量工具相结合，产生热处理器的加热模型，并根据预设的斜率系数矩阵和测量厚度校准加热模型。

3. 发明授权

US07801947B2 Software deployment system and method 有权
标题翻译：软件部署系统和方法
公开(公告)号：US07801947B2
公开(公告)日：2010-09-21
申请号：US11023753
申请日：2004-12-28
申请人： Fu-Kun Yeh , Ting-Yuan Huang
发明人： Fu-Kun Yeh , Ting-Yuan Huang
IPC分类号： G06F15/16
CPC分类号： G06F8/656
摘要： A software deployment system and method are provided. The system includes a server and at least one client. The server executes a first server application and a second server application simultaneously. The client controls at least one equipment tool, executes a first client application connected to the first server application, and has a second client application. In response to a deployment signal, the client first deletes the first client application and executes the second client application to connect to the second server application if all equipment tools controlled by the client are idle. The client then transmits a completion signal to the server. If software deployment on each client is complete, the server deletes the first server application.
摘要翻译：提供了软件部署系统和方法。该系统包括一个服务器和至少一个客户端。服务器同时执行第一个服务器应用程序和第二个服务器应用程序。客户端控制至少一个设备工具，执行连接到第一服务器应用的第一客户端应用，并且具有第二客户端应用。响应于部署信号，客户端首先删除第一客户端应用程序并执行第二客户端应用程序以连接到第二服务器应用程序，如果客户端控制的所有设备工具都处于空闲状态。客户端然后向服务器发送完成信号。如果每个客户端上的软件部署完成，服务器将删除第一个服务器应用程序。

4. 发明申请

US20060143599A1 Software deployment system and method 有权
标题翻译：软件部署系统和方法
公开(公告)号：US20060143599A1
公开(公告)日：2006-06-29
申请号：US11023753
申请日：2004-12-28
申请人： Fu-Kun Yeh , Ting-Yuan Huang
发明人： Fu-Kun Yeh , Ting-Yuan Huang
IPC分类号： G06F9/44
CPC分类号： G06F8/656
摘要： A software deployment system and method are provided. The system includes a server and at least one client. The server executes a first server application and a second server application simultaneously. The client controls at least one equipment tool, executes a first client application connected to the first server application, and has a second client application. In response to a deployment signal, the client first deletes the first client application and executes the second client application to connect to the second server application if all equipment tools controlled by the client are idle. The client then transmits a completion signal to the server. If software deployment on each client is complete, the server deletes the first server application.
摘要翻译：提供了软件部署系统和方法。该系统包括一个服务器和至少一个客户端。服务器同时执行第一个服务器应用程序和第二个服务器应用程序。客户端控制至少一个设备工具，执行连接到第一服务器应用的第一客户端应用，并且具有第二客户端应用。响应于部署信号，客户端首先删除第一客户端应用程序并执行第二客户端应用程序以连接到第二服务器应用程序，如果由客户端控制的所有设备工具都是空闲的。客户端然后向服务器发送完成信号。如果每个客户端上的软件部署完成，服务器将删除第一个服务器应用程序。

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