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1. 发明授权

US07505646B2 Optical switch and optical switch array 失效
标题翻译：光开关和光开关阵列
公开(公告)号：US07505646B2
公开(公告)日：2009-03-17
申请号：US11393784
申请日：2006-03-31
申请人： Yukio Katou , Masaya Horino , Masatoshi Kanamaru , Yasuhiro Hamaguchi , Hiroyuki Nagatomo
发明人： Yukio Katou , Masaya Horino , Masatoshi Kanamaru , Yasuhiro Hamaguchi , Hiroyuki Nagatomo
IPC分类号： G02B6/00
CPC分类号： G02B6/3582 , G02B6/3518 , G02B6/355 , G02B6/3556 , G02B6/357 , G02B6/3584
摘要： An optical switch includes an input optical fiber, first and second output optical fibers, a movable mirror for switching over an optical path between the input optical fiber and an output optical fiber, and collimator lenses disposed on optical paths formed between the input optical fiber and the output optical fibers. When drive force is applied, the movable mirror assumes a first or second position to form an optical path between the input optical fiber and the first or second output optical fiber. When drive force is not applied to the movable mirror, an optical path is formed between the optical path in the first position and that in the second position. In the first position, a first part of the movable mirror comes in contact with a substrate. In the second position, a part of the movable mirror different from the first part comes in contact with the substrate.
摘要翻译：光开关包括输入光纤，第一和第二输出光纤，用于切换输入光纤和输出光纤之间的光路的可移动镜，以及设置在形成在输入光纤与输入光纤之间的光路上的准直透镜输出光纤。当施加驱动力时，可移动镜呈现第一或第二位置，以在输入光纤与第一或第二输出光纤之间形成光路。当驱动力不施加到可动镜时，在第一位置的光路和第二位置之间形成光路。在第一位置，可移动反射镜的第一部分与基板接触。在第二位置，与第一部分不同的可移动镜的一部分与基板接触。

2. 发明申请

US20060219879A1 Light switch and light switch array 失效
标题翻译：灯开关和灯开关阵列
公开(公告)号：US20060219879A1
公开(公告)日：2006-10-05
申请号：US11393784
申请日：2006-03-31
申请人： Yukio Katou , Masaya Horino , Masatoshi Kanamaru , Yasuhiro Hamaguchi , Hiroyuki Nagatomo
发明人： Yukio Katou , Masaya Horino , Masatoshi Kanamaru , Yasuhiro Hamaguchi , Hiroyuki Nagatomo
IPC分类号： G01J1/34
CPC分类号： G02B6/3582 , G02B6/3518 , G02B6/355 , G02B6/3556 , G02B6/357 , G02B6/3584
摘要： An optical switch includes an input optical fiber, first and second output optical fibers, a movable mirror for switching over an optical path between the input optical fiber and an output optical fiber, and collimator lenses disposed on optical paths formed between the input optical fiber and the output optical fibers. When drive force is applied, the movable mirror assumes a first or second position to form an optical path between the input optical fiber and the first or second output optical fiber. When drive force is not applied to the movable mirror, an optical path is formed between the optical path in the first position and that in the second position. In the first position, a first part of the movable mirror comes in contact with a substrate. In the second position, a part of the movable mirror different from the first part comes in contact with the substrate.
摘要翻译：光开关包括输入光纤，第一和第二输出光纤，用于切换输入光纤和输出光纤之间的光路的可移动镜，以及设置在形成在输入光纤与输入光纤之间的光路上的准直透镜输出光纤。当施加驱动力时，可移动镜呈现第一或第二位置，以在输入光纤与第一或第二输出光纤之间形成光路。当驱动力不施加到可动镜时，在第一位置的光路和第二位置之间形成光路。在第一位置，可移动反射镜的第一部分与基板接触。在第二位置，与第一部分不同的可移动镜的一部分与基板接触。

3. 发明申请

US20070171557A1 Optical head, optical information storage apparatus, and their fabrication method 审中-公开
标题翻译：光头，光信息存储装置及其制造方法
公开(公告)号：US20070171557A1
公开(公告)日：2007-07-26
申请号：US11716616
申请日：2007-03-12
申请人： Takeshi Shimano , Masatoshi Kanamaru , Masaya Horino
发明人： Takeshi Shimano , Masatoshi Kanamaru , Masaya Horino
IPC分类号： G02B5/08
CPC分类号： G11B7/08576 , G11B7/123 , G11B7/1374
摘要： A method of manufacturing an optical head includes joining of a first substrate on which a plurality of lenses are formed in an array, a second substrate on which a plurality of prisms and mirrors are formed in an array, and a third substrate on which a plurality of detectors and light sources are formed in an array, after positioning of the individual substrates, and cutting the joined substrates along the rows and columns of the array.
摘要翻译：一种光学头的制造方法包括以阵列形式形成有多个透镜的第一基板与其上形成有多个棱镜和反射镜的第二基板的接合，在该第二基板上形成有多个透镜检测器和光源在定位各个基板之后以阵列形成，并且沿阵列的行和列切割连接的基板。

4. 发明授权

US07457206B2 Optical head, optical information storage apparatus, and their fabrication method 失效
标题翻译：光头，光信息存储装置及其制造方法
公开(公告)号：US07457206B2
公开(公告)日：2008-11-25
申请号：US11211438
申请日：2005-08-26
申请人： Takeshi Shimano , Masatoshi Kanamaru , Masaya Horino
发明人： Takeshi Shimano , Masatoshi Kanamaru , Masaya Horino
IPC分类号： G11B7/00
CPC分类号： G11B7/08576 , G11B7/123 , G11B7/1374
摘要： In an optical head, if a lens is reduced in size so that it can be integrated with a light source and a photodetector, other optical components as well as the lens must be reduced in size, which would result in greater difficulties in handling for assembly and adjustment purposes. The invention allows large quantities of ultra-small optical heads to be produced accurately and at low cost, the optical heads being easy to adjust and not requiring the handling of minute components for adjustment purposes. A first substrate includes lenses for focusing light on an information storage medium, a second substrate includes detectors and disposed on the surface thereof, and a layer, which is disposed between the first and second substrates, includes prisms and mirrors. The layer also includes cavities in which light sources are disposed. The individual substrates are formed in the form of wafers with the lenses, mirrors, prisms, light sources, and photodetectors disposed thereon.
摘要翻译：在光学头中，如果透镜的尺寸减小以使其能够与光源和光电检测器集成，则其它光学部件以及透镜的尺寸必须减小，这将导致更大的装配难度和调整目的。本发明允许以低成本准确地，低成本地制造大量的超小型光学头，光学头易于调节，并且不需要处理用于调整目的的微小部件。第一基板包括用于将光聚焦在信息存储介质上的透镜，第二基板包括检测器并设置在其表面上，并且布置在第一和第二基板之间的层包括棱镜和反射镜。该层还包括其中设置有光源的空腔。各个基板以晶片的形式形成，其上设置有透镜，反射镜，棱镜，光源和光电探测器。

5. 发明申请

US20060193214A1 Optical head, optical information storage apparatus, and their fabrication method 失效
标题翻译：光头，光信息存储装置及其制造方法
公开(公告)号：US20060193214A1
公开(公告)日：2006-08-31
申请号：US11211438
申请日：2005-08-26
申请人： Takeshi Shimano , Masatoshi Kanamaru , Masaya Horino
发明人： Takeshi Shimano , Masatoshi Kanamaru , Masaya Horino
IPC分类号： G11B7/00
CPC分类号： G11B7/08576 , G11B7/123 , G11B7/1374
摘要： In an optical head, if a lens is reduced in size so that it can be integrated with a light source and a photodetector, other optical components as well as the lens must be reduced in size, which would result in greater difficulties in handling for assembly and adjustment purposes. The invention allows large quantities of ultra-small optical heads to be produced accurately and at low cost, the optical heads being easy to adjust and not requiring the handling of minute components for adjustment purposes. A first substrate includes lenses for focusing light on an information storage medium, a second substrate includes detectors and disposed on the surface thereof, and a layer, which is disposed between the first and second substrates, includes prisms and mirrors. The layer also includes cavities in which light sources are disposed. The individual substrates are formed in the form of wafers with the lenses, mirrors, prisms, light sources, and photodetectors disposed thereon.
摘要翻译：在光学头中，如果透镜的尺寸减小以使其能够与光源和光电检测器集成，则其它光学部件以及透镜的尺寸必须减小，这将导致更大的装配难度和调整目的。本发明允许以低成本准确地，低成本地制造大量的超小型光学头，光学头易于调节，并且不需要处理用于调整目的的微小部件。第一基板包括用于将光聚焦在信息存储介质上的透镜，第二基板包括检测器并设置在其表面上，并且布置在第一和第二基板之间的层包括棱镜和反射镜。该层还包括其中设置有光源的空腔。各个基板以晶片的形式形成，其上设置有透镜，反射镜，棱镜，光源和光电探测器。

6. 发明申请

US20080043481A1 Vehicle Headlight and Vehicle Operation Support Apparatus 审中-公开
标题翻译：车载大灯及车辆操作支援装置
公开(公告)号：US20080043481A1
公开(公告)日：2008-02-21
申请号：US10589983
申请日：2004-02-25
申请人： Shingo Yokoyama , Masatoshi Kanamaru , Masaya Horino , Tatsuhiko Monji , Ken Ohsumi
发明人： Shingo Yokoyama , Masatoshi Kanamaru , Masaya Horino , Tatsuhiko Monji , Ken Ohsumi
IPC分类号： B60Q1/04 , F21V7/00
CPC分类号： G02B26/085 , F21S41/675
摘要： A vehicle headlight having a light source to emit light and a reflector for illuminating forward the light emitted from the light source, wherein the reflector is comprising a plurality of movable mirrors to be operated independently and optionally and a fixed mirror disposed outside these movable mirrors, whereby the light emitted from the light source to the movable mirrors are not blocked mutually so that a distribution of light illuminated from the vehicle headlight is minutely and quickly controlled.
摘要翻译：具有用于发光的光源的车辆头灯和用于向前照射从所述光源发出的光的反射器，其中所述反射器包括独立地操作的多个可移动镜和可选地以及设置在所述可动镜外部的固定镜，从而从光源发射到可动反射镜的光不被相互阻挡，使得从车辆前灯照射的光的分布被微小和快速地控制。

7. 发明申请

US20070102842A1 Process of microlens mold 审中-公开
标题翻译：微透镜模具的工艺
公开(公告)号：US20070102842A1
公开(公告)日：2007-05-10
申请号：US11528517
申请日：2006-09-28
申请人： Irizo Naniwa , Masatoshi Kanamaru , Takeshi Shimano , Shigeo Nakamura , Masaya Horino , Yumiko Anzai
发明人： Irizo Naniwa , Masatoshi Kanamaru , Takeshi Shimano , Shigeo Nakamura , Masaya Horino , Yumiko Anzai
IPC分类号： B29C33/40
CPC分类号： B29C33/3842 , B29D11/00365 , B29L2011/0016
摘要： The present invention provides a method of making a mold for manufacturing a microlens having a smooth surface and an arbitrary aspherical surface, or more specifically, an aspheric microlens of dimensions such that an aperture is equal to or less than 1 mm and a thickness is equal to or more than 0.5 mm. A mask layer having plural circular apertures with different sizes formed therein for a mold for one lens is formed on a silicon substrate. Plural holes are formed for the lens in the silicon substrate by applying anisotropic dry etching to a surface to be processed, which is the surface having the mask layer formed thereon. The depths of the respective holes vary depending on the sizes of the circular apertures. Isotropic etching is performed to remove sidewalls of the plural holes with different depths formed in the silicon substrate, thereby merging the holes into one hole corresponding to the lens.
摘要翻译：本发明提供一种制造用于制造具有平滑表面和任意非球面的微透镜的模具的方法，或者更具体地说，是使得孔径等于或小于1mm并且厚度相等的尺寸的非球面微透镜至或大于0.5mm。在硅基板上形成具有用于一个透镜的模具形成有多个具有不同尺寸的圆形孔的掩模层。通过对作为其上形成有掩模层的表面的待加工表面施加各向异性干蚀刻，在硅衬底中形成多个孔。各个孔的深度根据圆形孔的尺寸而变化。进行各向同性蚀刻以去除在硅衬底中形成的不同深度的多个孔的侧壁，从而将孔合并成与透镜相对应的一个孔。

8. 发明授权

US08143588B2 Deflector array, exposure apparatus, and device manufacturing method 有权
标题翻译：偏转器阵列，曝光装置和装置制造方法
公开(公告)号：US08143588B2
公开(公告)日：2012-03-27
申请号：US12815507
申请日：2010-06-15
申请人： Kenichi Nagae , Masatoshi Kanamaru
发明人： Kenichi Nagae , Masatoshi Kanamaru
IPC分类号： G21K1/087
CPC分类号： H01J37/1477 , B82Y10/00 , B82Y40/00 , H01J37/30 , H01J37/3174 , H01J2237/0437 , H01J2237/1518
摘要： A deflector array includes a plurality of deflectors, which deflect charged particle beams, arrayed on a substrate. Each of the plurality of deflectors includes a single opening formed in the substrate, and each of the plurality of deflectors includes a pair of electrodes that oppose each other through the opening and are configured to deflect a single charged particle beam. The plurality of deflectors are arrayed such that a length of the pair of electrodes in a longitudinal direction thereof is not less than a distance between centers of two of the plurality of deflectors that are located nearest to each other. The plurality of deflectors is arrayed to form a checkerboard lattice, and two openings of the two of the plurality of deflectors overlap in the longitudinal direction.
摘要翻译：偏转器阵列包括多个偏转器，其偏转排列在基板上的带电粒子束。多个偏转器中的每一个包括形成在基板中的单个开口，并且多个偏转器中的每一个包括通过开口彼此相对的一对电极，并且被配置为偏转单个带电粒子束。多个偏转器被排列成使得一对电极在其纵向方向上的长度不小于彼此最靠近的多个偏转器中的两个偏转器的中心之间的距离。排列多个偏转器以形成棋盘格格，并且多个偏转器中的两个的两个开口在纵向方向上重叠。

9. 发明申请

US20080017807A1 DEFLECTOR ARRAY, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD 有权
标题翻译：偏转器阵列，曝光装置和装置制造方法
公开(公告)号：US20080017807A1
公开(公告)日：2008-01-24
申请号：US11779498
申请日：2007-07-18
申请人： Kenichi Nagae , Masatoshi Kanamaru
发明人： Kenichi Nagae , Masatoshi Kanamaru
IPC分类号： G21K1/087
CPC分类号： H01J37/1477 , B82Y10/00 , B82Y40/00 , H01J37/30 , H01J37/3174 , H01J2237/0437 , H01J2237/1518
摘要： This invention discloses a deflector array in which a plurality of deflectors which deflect charged particle beams are arrayed on a substrate. Each deflector includes an opening formed on the substrate, and a pair of electrodes opposing each other through the opening. The length of the pair of electrodes in the longitudinal direction is not less than the distance between the centers of two deflectors equivalent to the plurality of deflectors, which are located nearest to each other.
摘要翻译：本发明公开了一种偏转器阵列，其中将带电粒子束偏转的多个偏转器排列在基板上。每个偏转器包括形成在基板上的开口和通过该开口相对的一对电极。一对电极在长度方向上的长度不小于彼此最靠近的多个偏转器等效的两个偏转器的中心之间的距离。

10. 发明申请

US20070194472A1 PROCESS OF FABRICATING MICROLENS MOLD 审中-公开
标题翻译：微晶玻璃制作工艺
公开(公告)号：US20070194472A1
公开(公告)日：2007-08-23
申请号：US11624268
申请日：2007-01-18
申请人： Irizo Naniwa , Shigeo Nakamura , Masatoshi Kanamaru
发明人： Irizo Naniwa , Shigeo Nakamura , Masatoshi Kanamaru
IPC分类号： B29D11/00
CPC分类号： B29D11/00365 , B29C33/3842 , B29C33/56
摘要： A process for fabricating a mold for an aspherical microlens having a desired aspherical and smooth surface, the lens having an effective diameter of 1 mm or smaller and a thickness of 0.5 mm or greater. A double-layer mask layer is formed on a single crystal silicon substrate, and anisotropic etching and isotropic etching are carried out using a first mask layer so as to form a concave portion that is a little smaller than the size of a desired microlens mold. Isotropic etching is then carried out using a second mask layer so as to enlarge the concave portion, thereby obtaining a microlens mold having desired dimensions.
摘要翻译：一种用于制造具有期望的非球面和光滑表面的非球面微透镜的模具的方法，所述透镜具有1mm或更小的有效直径和0.5mm或更大的厚度。在单晶硅基板上形成双层掩模层，并使用第一掩模层进行各向异性蚀刻和各向同性蚀刻，以形成比所需的微透镜模具的尺寸稍小的凹部。然后使用第二掩模层进行各向同性蚀刻，以扩大凹部，从而获得具有期望尺寸的微透镜模具。

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