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    • 2. 发明授权
    • Thin film transistor matrix having TFT with LDD regions
    • 具有带LDD区域的TFT的薄膜晶体管阵列
    • US06534789B2
    • 2003-03-18
    • US09829531
    • 2001-04-09
    • Yukimasa Ishida
    • Yukimasa Ishida
    • H01L2904
    • H01L29/66757H01L21/32134H01L21/32139H01L27/124H01L29/458H01L29/78621H01L29/78627H01L2029/7863
    • Semiconductor islands are formed on an insulating substrate. A gate insulating layer is formed to traverse an intermediate region of each island, and a gate electrode with tapered sidewalls is formed thereon to leave wing-shaped gate insulating layer exposed at both sides. Ion implantation is done to form heavily doped regions in the semiconductor islands outside the gate insulating layers, and lightly doped drain regions under the wing regions of the gate insulating layer. An interlayer insulating layer is formed thereon to cover the gate electrodes, gate insulating layers, and the semiconductor islands. However, if the gate electrode layer and gate insulating film are patterned in the same shape, a step becomes high. If the wiring area is made narrow, the gate electrode
    • 半导体岛形成在绝缘基板上。 形成栅极绝缘层以横越每个岛的中间区域,并且在其上形成具有锥形侧壁的栅电极,以在两侧露出翼形栅极绝缘层。 进行离子注入以在栅极绝缘层外部的半导体岛中形成重掺杂区域,以及在栅极绝缘层的机翼区域下方的轻掺杂漏极区域。 在其上形成层间绝缘层以覆盖栅电极,栅极绝缘层和半导体岛。 然而,如果栅极电极层和栅极绝缘膜被图案化成相同的形状,则台阶变高。 如果布线区域变窄,则栅电极
    • 8. 发明申请
    • SOLID-STATE IMAGE PICKUP DEVICE
    • 固态图像拾取器件
    • US20090302202A1
    • 2009-12-10
    • US12422616
    • 2009-04-13
    • Takashi SatoYukimasa IshidaYasushi Yamazaki
    • Takashi SatoYukimasa IshidaYasushi Yamazaki
    • H01L27/00G01T1/24
    • H01L27/14609H01L27/14603H04N5/374
    • There is provided a solid-state image pickup device that has a plurality of scanning lines that extends in a predetermined direction, a plurality of data lines that extends in a direction for intersecting the scanning lines, and a plurality of bias lines within an image pickup area on a substrate. For each of a plurality of pixels disposed in positions corresponding to intersections of the plurality of scanning lines and the plurality of data lines, a field effect transistor that is controlled by the scanning line and a photoelectric conversion element that has a electrode electrically connected to the data line through the field effect transistor and a electrode electrically connected to the bias line are formed, and a constant electric potential line for electrostatic protection is formed on the substrate. For each of bias lines, a bias line electrostatic protection circuit having a protection diode.
    • 提供了一种固态图像拾取装置,其具有沿预定方向延伸的多条扫描线,沿与扫描线相交的方向延伸的多条数据线,以及在图像拾取器内的多条偏置线 基底上的区域。 对于设置在与多条扫描线和多条数据线的交点对应的位置的多个像素中的每一个,由扫描线控制的场效应晶体管和具有电连接到该扫描线的电极的光电转换元件 形成通过场效应晶体管的数据线和电连接到偏置线的电极,并且在基板上形成用于静电保护的恒定电位线。 对于每个偏置线,具有保护二极管的偏置线静电保护电路。