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    • 1. 发明授权
    • Apparatus for inspecting wiring pattern formed on a board
    • 用于检查在板上形成的布线图案的装置
    • US5272763A
    • 1993-12-21
    • US936324
    • 1992-08-28
    • Yuji MaruyamaAtsuharu YamamotoHidemi TakahashiHidehiko Kawakami
    • Yuji MaruyamaAtsuharu YamamotoHidemi TakahashiHidehiko Kawakami
    • G01R31/28G01R31/309G06T7/60G06K9/00
    • G06K9/44G01R31/2805G01R31/309G06K9/00G06T7/60G06K2209/19
    • An inspection apparatus for inspecting a wiring pattern on a printed board by illuminating the printed board with light to photoelectrically convert light reflected from the printed board into an optical grey level image corresponding to the wiring pattern thereon, the grey level image being converted into a bi-level image. The inspection apparatus includes a thinning circuit to perform a thinning process for removing the bi-level image by one picture element from the background side of the wiring pattern, the thinning process being repeatedly performed predetermined times with respect to all of picture elements of the wiring pattern to output the number of repetitions of the thinning process and further to output a skeleton image. Also included is a distance image converter to output a distance conversion image where the number of repetitions is given as a distance value from the background of the wiring pattern. The inspection apparatus compares the distance value of the distance conversion image with one or more thresholds along the skeleton image. This arrangement allows direct detection of the wiring pattern width, thereby permitting the wiring pattern inspection with a simple structure.
    • 一种检查装置,用于通过用光照射印刷板来检查印刷电路板上的布线图案,以将从印刷电路板反射的光光电转换成对应于其上的布线图案的光学灰度级图像,灰度图像被转换为​​双 级图像。 检查装置包括:稀疏电路,用于执行从布线图案的背景侧的一个图像元素去除双电平图像的稀疏处理,稀疏处理相对于布线的所有图像元素反复进行预定次数 模式以输出稀疏处理的重复次数并进一步输出骨架图像。 还包括距离图像转换器,用于输出距离转换图像,其中从布线图案的背景给出重复次数作为距离值。 检查装置将距离转换图像的距离值与骨架图像的一个以上阈值进行比较。 这种布置允许直接检测布线图案宽度,从而以简单的结构允许布线图案检查。
    • 5. 发明授权
    • Apparatus for inspecting a wiring pattern according to a
micro-inspection and a macro-inspection performed in parallel
    • 根据微观检查和并行执行的宏观检查来检查布线图案的装置
    • US5608816A
    • 1997-03-04
    • US305968
    • 1994-09-15
    • Toyoki KawaharaAtsuharu YamamotoYuji MaruyamaHidehiko KawakamiHideaki Kawamura
    • Toyoki KawaharaAtsuharu YamamotoYuji MaruyamaHidehiko KawakamiHideaki Kawamura
    • G01N21/956G01R31/309G06T7/00G06K9/03H04N7/18
    • G06T7/0006G01N21/956G01R31/309G06T2207/10024G06T2207/30141
    • Pieces of feature information in a bi-level image such as a width, a branching point and an ending point of a wiring pattern are detected in a design rule checking section according to a micro inspection to find out pieces of feature information departing from a design rule. Also, feature codes in the bi-level image such as a corner of the wiring pattern are detected in a specific shape detecting section according to a macro inspection. The feature information are compared with pieces of referential feature information pertaining to a non-defective wiring pattern in a first comparing and judging section to judge whether the wiring pattern indicated by the feature information is defective or non-defective. The feature codes are compared with referential feature codes pertaining to a non-defective wiring pattern in a second comparing and judging section to judge whether the wiring pattern indicated by the feature codes is defective or non-defective. Therefore, defective types and portions of the wiring pattern can be detected by performing the macro inspection and the micro inspection in parallel without dividing the wiring pattern into processed regions.
    • 根据微观检查,在设计规则检查部中检测诸如布线图案的宽度,分支点和终点的双层图像中的特征信息的部分,以从设计中发现特征信息 规则。 此外,根据宏观检查,在特定形状检测部中检测诸如布线图案的角部的双电平图像中的特征码。 将特征信息与第一比较判断部中与无缺陷布线图案有关的参考特征信息进行比较,以判断由特征信息指示的布线图案是否有缺陷或无缺陷。 将特征代码与第二比较判断部分中与无缺陷布线图案有关的参考特征码进行比较,以判断由特征码指示的布线图案是否有缺陷或无缺陷。 因此,通过并行地进行宏观检查和微观检查,可以检测不良类型和布线图案的部分,而不将布线图案划分为加工区域。