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    • 2. 发明申请
    • SEMICONDUCTOR DEVICE AND FIELD EFFECT TRANSISTOR
    • 半导体器件和场效应晶体管
    • US20130113028A2
    • 2013-05-09
    • US13393002
    • 2010-06-23
    • Hironobu MIYAMOTOYasuhiro OKAMOTOYuji ANDOTatsuo NAKAYAMATakashi INOUEKazuki OTAKazuomi ENDO
    • Hironobu MIYAMOTOYasuhiro OKAMOTOYuji ANDOTatsuo NAKAYAMATakashi INOUEKazuki OTAKazuomi ENDO
    • H01L29/78
    • H01L29/8122H01L29/0657H01L29/2003H01L29/201H01L29/205H01L29/41741H01L29/41766H01L29/4236H01L29/7809H01L29/7812H01L29/7813H01L29/8128
    • A semiconductor device comprises a substrate 1, a first n-type semiconductor layer 21′, a second n-type semiconductor layer 23, a p-type semiconductor layer 24, and a third n-type semiconductor layer 25′, wherein the first n-type semiconductor layer 21′, the second n-type semiconductor layer 23, the p-type semiconductor layer 24, and the third n-type semiconductor layer 25′ are laminated at the upper side of the substrate 1 in this order. The drain electrode 13 is in ohmic-contact with the first n-type semiconductor layer 21′ and the source electrode 12 is in ohmic-contact with the third n-type semiconductor layer 25′. A gate electrode 14 is arranged so as to fill an opening portion to be filled that extends from the third n-type semiconductor layer 25′ to the second n-type semiconductor layer 23, and the gate electrode 14 is in contact with the upper surface of the second n-type semiconductor layer 23, the side surfaces of the p-type semiconductor layer 24, and the side surfaces of the third n-type semiconductor layer 25′. The second n-type semiconductor layer 23 has composition that changes from the drain electrode 13 side toward the source electrode 12 side in the direction perpendicular to the plane of the substrate 1 and contains donor impurity.
    • 半导体器件包括衬底1,第一n型半导体层21',第二n型半导体层23,p型半导体层24和第三n型半导体层25',其中第一n型半导体层 型半导体层21',第二n型半导体层23,p型半导体层24和第三n型半导体层25'依次层叠在基板1的上侧。 漏电极13与第一n型半导体层21'欧姆接触,源电极12与第三n型半导体层25'欧姆接触。 栅电极14被布置成填充从第三n型半导体层25'延伸到第二n型半导体层23的待填充的开口部分,并且栅电极14与上表面 第二n型半导体层23,p型半导体层24的侧表面和第三n型半导体层25'的侧表面。 第二n型半导体层23具有从垂直于基板1的平面的方向从漏电极13侧向源电极12侧变化的成分,并且含有施主杂质。
    • 4. 发明申请
    • SEMICONDUCTOR DEVICE
    • 半导体器件
    • US20120217505A1
    • 2012-08-30
    • US13360589
    • 2012-01-27
    • Yuji ANDO
    • Yuji ANDO
    • H01L29/778
    • H01L29/7786H01L29/045H01L29/2003H01L29/201H01L29/7783H01L29/7787
    • A semiconductor device including a field effect transistor having a buffer layer subjected to lattice relaxation, a channel layer, and an electron supply layer formed in this order with group-III nitride semiconductors respectively in a growth mode parallel with a [0001] or [000-1] crystallographic axis over a substrate and having a source electrode and a drain electrode, those being coupled electrically to the channel layer, and a gate electrode formed over the electron supply layer, in which, in the buffer layer and the electron supply layer, a layer existing on the group-III atomic plane side of the channel layer has an A-axis length larger than a layer existing on the group-V atomic plane side of the channel layer; and the electron supply layer has a bandgap larger than the channel layer.
    • 一种半导体器件,包括具有晶格弛豫缓冲层的场效应晶体管,沟道层以及与III族氮化物半导体分别以与[0001]或[000]平行的生长模式分别形成的电子供给层 -1]晶轴,并且具有源电极和漏电极,电极与沟道层电耦合的栅电极和形成在电子供应层上的栅极,其中在缓冲层和电子供给层中 存在于沟道层的III族原子平面侧的层的A轴长度比沟道层的V族原子面侧存在的层大; 并且电子供给层具有比沟道层大的带隙。