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1. 发明授权

US08358481B2 Nano-lithography with rotating target and servo-positioned tip 有权
标题翻译：具有旋转目标和伺服定位尖端的纳米光刻
公开(公告)号：US08358481B2
公开(公告)日：2013-01-22
申请号：US12080278
申请日：2008-04-02
申请人： Yuchen Zhou , Erhard Schreck , David Hu
发明人： Yuchen Zhou , Erhard Schreck , David Hu
IPC分类号： G11B11/08
CPC分类号： G11B5/59633 , B82Y10/00 , G11B5/314 , G11B5/59638 , G11B5/743 , G11B5/82 , G11B5/855 , G11B9/1409
摘要： The preferred embodiments of the present invention are devices and processes for producing high resolution lithography or pattern formation on the nanometer scale, using a voltage-biased probe that is slider-mounted along with, or separate from but linked to, a magnetic read head within a HDD mechanism. The probe is guided and positioned over a target layer by the motion of the read head which is, itself, guided by signals from servo tracks on a magnetic layer that activate an electromechanical servomechanism within the HDD. An electric field produced by the probe is capable of modifying the surface of the target layer over which the probe flies either directly, or by current induced or thermally induced effects. Targets such as amorphous or crystalline silicon can be hydrogen passivated and the electric field will produce oxidized or anodized lines with nanometer resolution.
摘要翻译：本发明的优选实施例是设备和方法用于在纳米尺度上产生高分辨率平版印刷或图案形成，使用电压偏置探针，滑块安装有沿，或从分开的，但连接到，一个磁性读出头内 HDD机制。探头通过读取头的运动被引导和定位在目标层上，该读取头本身由在激活HDD内的机电伺服机构的磁性层上的来自伺服磁道的信号引导。由探针产生的电场能够直接改变探针在其上飞行的目标层的表面，或者通过电流感应或热诱导效应。诸如非晶体或晶体硅的靶可以被氢钝化，并且电场将产生具有纳米分辨率的氧化或阳极化线。

2. 发明申请

US20100321820A1 Nano-lithography with rotating target and servo-positioned tip 有权
标题翻译：具有旋转目标和伺服定位尖端的纳米光刻
公开(公告)号：US20100321820A1
公开(公告)日：2010-12-23
申请号：US12080278
申请日：2008-04-02
申请人： Yuchen Zhou , Erhard Schreck , David Hu
发明人： Yuchen Zhou , Erhard Schreck , David Hu
IPC分类号： G11B5/52
CPC分类号： G11B5/59633 , B82Y10/00 , G11B5/314 , G11B5/59638 , G11B5/743 , G11B5/82 , G11B5/855 , G11B9/1409
摘要： The preferred embodiments of the present invention are devices and processes for producing high resolution lithography or pattern formation on the nanometer scale, using a voltage-biased probe that is slider-mounted along with, or separate from but linked to, a magnetic read head within a HDD mechanism. The probe is guided and positioned over a target layer by the motion of the read head which is, itself, guided by signals from servo tracks on a magnetic layer that activate an electromechanical servomechanism within the HDD. An electric field produced by the probe is capable of modifying the surface of the target layer over which the probe flies either directly, or by current induced or thermally induced effects. Targets such as amorphous or crystalline silicon can be hydrogen passivated and the electric field will produce oxidized or anodized lines with nanometer resolution.
摘要翻译：本发明的优选实施例是使用电压偏置探针来生产高分辨率光刻或图形形成的装置和工艺，所述电压偏置探针与所述磁读取头一起滑动安装，或与之相连， HDD机制。探头通过读取头的运动被引导和定位在目标层上，该读取头本身由在激活HDD内的机电伺服机构的磁性层上的来自伺服磁道的信号引导。由探针产生的电场能够直接改变探针在其上飞行的目标层的表面，或者通过电流感应或热诱导效应。诸如非晶体或晶体硅的靶可以被氢钝化，并且电场将产生具有纳米分辨率的氧化或阳极化线。

3. 发明授权

US08295132B2 Plasmon shield to shape and reduce optical spot 有权
标题翻译：等离子体屏蔽形状并减少光斑
公开(公告)号：US08295132B2
公开(公告)日：2012-10-23
申请号：US13200478
申请日：2011-09-23
申请人： Xuhui Jin , Yuchen Zhou , Joe Smyth , Tobias Maletzky , Kenichi Takano , Erhard Schreck
发明人： Xuhui Jin , Yuchen Zhou , Joe Smyth , Tobias Maletzky , Kenichi Takano , Erhard Schreck
IPC分类号： G11B11/00
CPC分类号： G11B5/3146 , G11B5/1278 , G11B5/1871 , G11B5/23 , G11B5/3116 , G11B5/315 , G11B5/3163
摘要： A TAMR head is disclosed with a triangular shaped plasmon antenna covered on two sides with a plasmon layer that generates an edge plasmon mode along a vertex of the two plasmon sides formed opposite a main pole layer. A plasmon shield (PS) is formed along the ABS and opposite the vertex to confine an electric field from the edge plasmon mode within a small radius of the edge plasmon tip thereby reducing the optical spot size on the magnetic medium and enhancing writability. An end of a waveguide used to direct input electromagnetic radiation to the plasmon antenna adjoins a PS side opposite the ABS. In one embodiment, a magnetic shield may be formed along the ABS and adjoins the PS so that a first PS section terminates at the ABS and faces the vertex while a second PS section is formed between the magnetic shield and waveguide end.
摘要翻译：公开了具有三面形等离子体激元的三角形等离子体激元天线，该三角形等离子体激元天线用等离子体膜覆盖，该等离子体膜沿着与主极层相对的两个等离子体激元侧的顶点产生边缘等离子体模式。等离子体屏蔽（PS）沿着ABS形成并与顶点相对，以将边缘等离子体激元模式的电场限制在边缘等离子体激元尖端的小半径内，从而减小磁介质上的光点尺寸并提高可写性。用于将输入电磁辐射引导到等离子体激元天线的波导的一端与ABS相对的PS侧相邻。在一个实施例中，可以沿着ABS形成磁屏蔽并与PS邻接，使得第一PS部分在ABS处终止并面向顶点，而在磁屏蔽和波导端之间形成第二PS部分。

4. 发明授权

US08248898B2 Thermally-assisted magnetic recording head having main waveguide and sub-waveguides 有权
标题翻译：具有主波导和次波导的热辅助磁记录头
公开(公告)号：US08248898B2
公开(公告)日：2012-08-21
申请号：US12925283
申请日：2010-10-18
申请人： Erhard Schreck , Xuhui Jin , Tobias Maletzky , Joe Smyth , Dayu Zhou , Yuchen Zhou , Kenichi Takano
发明人： Erhard Schreck , Xuhui Jin , Tobias Maletzky , Joe Smyth , Dayu Zhou , Yuchen Zhou , Kenichi Takano
IPC分类号： G11B11/00
CPC分类号： G11B5/314 , G11B5/105 , G11B5/6088 , G11B2005/001 , G11B2005/0021
摘要： A waveguide structure for aligning a light source to a center waveguide (CWG) in a TAMR head is disclosed and includes two alignment waveguides (AWVG) symmetrically formed about a plane that bisects the CWG lengthwise dimension. Each AWVG has a light coupling section formed parallel to a side of the CWG and captures 0.5% to 10% of the light in the CWG. Each AWVG has an outlet that directs light to a photo detector or camera so that light intensity measurements lAWVG1 and lAWVG2 for first and second AWVG, respectively, can be taken at various positions of the light source. Optimum alignment occurs when (lAWVG1+lAWVG2) reaches a maximum value and |lAWVG1−lAWVG2| has a minimum value. AWVG outlets may be at the ABS, or at the side or back end of a slider. Measurement sensitivity is increased by decreasing the width of the AWVG.
摘要翻译：公开了一种用于将光源对准TAMR头中的中心波导（CWG）的波导结构，并且包括关于平分CWG纵向尺寸的平面对称地形成的两个对准波导（AWVG）。每个AWVG具有平行于CWG侧面并且捕获CWG中的0.5％至10％的光的光耦合部分。每个AWVG都有一个出口，可以将光引导到光电检测器或照相机，以便分别在光源的各个位置拍摄第一个和第二个AWVG的光强度测量值lAWVG1和lAWVG2。（lAWVG1 + 1AWVG2）达到最大值时，发生最佳对齐，并且| lAWVG1-1AWVG2 | 具有最小值。 AWVG插座可能位于ABS或滑块的侧面或后端。通过减小AWVG的宽度来提高测量灵敏度。

5. 发明授权

US08233358B2 Plasmon antenna with magnetic core for thermally assisted magnetic recording 有权
标题翻译：带磁芯的等离子体天线，用于热辅助磁记录
公开(公告)号：US08233358B2
公开(公告)日：2012-07-31
申请号：US12456290
申请日：2009-06-15
申请人： Yuchen Zhou , Kenichi Takano , Xuhui Jin , Erhard Schreck , Moris Dovek , Joe Smyth
发明人： Yuchen Zhou , Kenichi Takano , Xuhui Jin , Erhard Schreck , Moris Dovek , Joe Smyth
IPC分类号： G11B11/00
CPC分类号： G11B5/314 , G11B5/02 , G11B5/3116 , G11B5/3146 , G11B5/6088 , G11B2005/0005 , G11B2005/0021 , Y10T29/49032
摘要： A TAMR (Thermal Assisted Magnetic Recording) write head uses the energy of optical-laser generated plasmons in a plasmon antenna to locally heat a magnetic recording medium and reduce its coercivity and magnetic anisotropy. To enable the TAMR head to operate most effectively, the maximum gradient of the magnetic recording field should be concentrated in the small region being heated. Typically this does not occur because the spot being heated by the antenna is offset from the position at which the magnetic pole concentrates its magnetic field. The present invention incorporates a magnetic core within a plasmon antenna, so the antenna effectively becomes an extension of the magnetic pole and produces a magnetic field whose maximum gradient overlaps the region being heated by edge plasmons being generated in a conducting layer surrounding the antenna's magnetic core.
摘要翻译： TAMR（热辅助磁记录）写头使用等离子体天线中激光产生的等离子体激元的能量来局部加热磁记录介质并降低其矫顽力和磁各向异性。为了使TAMR头能够最有效地运行，磁记录场的最大梯度应该集中在被加热的小区域中。通常这不会发生，因为被天线加热的点偏离磁极集中其磁场的位置。本发明在等离子体激元天线内结合有磁芯，因此天线有效地成为磁极的延伸，并产生磁场，其最大梯度与在天线的磁芯周围的导电层中产生的边缘等离子体激元加热的区域重叠。

6. 发明申请

US20120092971A1 Cross-track alignment waveguides and alignment scheme using alignment waveguides 有权
标题翻译：使用对准波导的交叉轨道对准波导和对准方案
公开(公告)号：US20120092971A1
公开(公告)日：2012-04-19
申请号：US12925283
申请日：2010-10-18
申请人： Erhard Schreck , Xuhui Jin , Tobias Maletzky , Joe Smyth , Dayu Zhou , Yuchen Zhou , Kenichi Takano
发明人： Erhard Schreck , Xuhui Jin , Tobias Maletzky , Joe Smyth , Dayu Zhou , Yuchen Zhou , Kenichi Takano
IPC分类号： G11B11/00
CPC分类号： G11B5/314 , G11B5/105 , G11B5/6088 , G11B2005/001 , G11B2005/0021
摘要： A waveguide structure for aligning a light source to a center waveguide (CWG) in a TAMR head is disclosed and includes two alignment waveguides (AWVG) symmetrically formed about a plane that bisects the CWG lengthwise dimension. Each AWVG has a light coupling section formed parallel to a side of the CWG and captures 0.5% to 10% of the light in the CWG. Each AWVG has an outlet that directs light to a photo detector or camera so that light intensity measurements lAWVG1 and lAWVG2 for first and second AWVG, respectively, can be taken at various positions of the light source. Optimum alignment occurs when (lAWVG1+lAWVG2) reaches a maximum value and |lAWVG1−lAWVG2| has a minimum value. AWVG outlets may be at the ABS, or at the side or back end of a slider. Measurement sensitivity is increased by decreasing the width of the AWVG.
摘要翻译：公开了一种用于将光源对准TAMR头中的中心波导（CWG）的波导结构，并且包括关于平分CWG纵向尺寸的平面对称地形成的两个对准波导（AWVG）。每个AWVG具有平行于CWG侧面并且捕获CWG中的0.5％至10％的光的光耦合部分。每个AWVG都有一个出口，可以将光引导到光电检测器或照相机，以便分别在光源的各个位置拍摄第一个和第二个AWVG的光强度测量值lAWVG1和lAWVG2。（lAWVG1 + 1AWVG2）达到最大值时，发生最佳对齐，并且| lAWVG1-1AWVG2 | 具有最小值。 AWVG插座可能位于ABS或滑块的侧面或后端。通过减小AWVG的宽度来提高测量灵敏度。

7. 发明申请

US20120020194A1 Plasmon shield to shape and reduce optical spot 有权
公开(公告)号：US20120020194A1
公开(公告)日：2012-01-26
申请号：US13200478
申请日：2011-09-23
申请人： Xuhui Jin , Yuchen Zhou , Joe Smyth , Tobias Maletzky , Kenichi Takano , Erhard Schreck
发明人： Xuhui Jin , Yuchen Zhou , Joe Smyth , Tobias Maletzky , Kenichi Takano , Erhard Schreck
IPC分类号： G11B13/04
CPC分类号： G11B5/3146 , G11B5/1278 , G11B5/1871 , G11B5/23 , G11B5/3116 , G11B5/315 , G11B5/3163
摘要： A TAMR head is disclosed with a triangular shaped plasmon antenna covered on two sides with a plasmon layer that generates an edge plasmon mode along a vertex of the two plasmon sides formed opposite a main pole layer. A plasmon shield (PS) is formed along the ABS and opposite the vertex to confine an electric field from the edge plasmon mode within a small radius of the edge plasmon tip thereby reducing the optical spot size on the magnetic medium and enhancing writability. An end of a waveguide used to direct input electromagnetic radiation to the plasmon antenna adjoins a PS side opposite the ABS. In one embodiment, a magnetic shield may be formed along the ABS and adjoins the PS so that a first PS section terminates at the ABS and faces the vertex while a second PS section is formed between the magnetic shield and waveguide end.

8. 发明申请

US20120279051A1 Method of Forming a Plasmon Antenna with Magnetic Core for Thermally Assisted Magnetic Recording 有权
标题翻译：用于磁辅助磁记录的磁芯形成等离子体天线的方法
公开(公告)号：US20120279051A1
公开(公告)日：2012-11-08
申请号：US13551670
申请日：2012-07-18
申请人： Yuchen Zhou , Kenichi Takano , Xuhui Jin , Erhard Schreck , Moris Dovek , Joe Smyth
发明人： Yuchen Zhou , Kenichi Takano , Xuhui Jin , Erhard Schreck , Moris Dovek , Joe Smyth
IPC分类号： G11B5/127
CPC分类号： G11B5/314 , G11B5/02 , G11B5/3116 , G11B5/3146 , G11B5/6088 , G11B2005/0005 , G11B2005/0021 , Y10T29/49032
摘要： A method of forming a TAMR (Thermal Assisted Magnetic Recording) write head that uses the energy of optical-laser generated edge plasmons in a plasmon antenna to locally heat a magnetic recording medium and reduce its coercivity and magnetic anisotropy. The method incorporates forming a magnetic core within the plasmon antenna, so the antenna effectively becomes an extension of the magnetic pole and produces a magnetic field whose maximum gradient overlaps the region being heated by the edge plasmons generated in the conducting layer of the antenna surrounding the antenna's magnetic core.
摘要翻译：一种形成TAMR（热辅助磁记录）写头的方法，其使用等离子体激元中的激光产生的边缘等离子体激元的能量来局部加热磁记录介质并降低其矫顽力和磁各向异性。该方法包括在等离子体激元天线内形成磁芯，因此天线有效地成为磁极的延伸，并产生磁场，其最大梯度与被天线周围的天线导电层中产生的边缘等离子体激发加热的区域重叠天线的磁芯。

9. 发明授权

US08179628B2 Magnetic core plasmon antenna with improved coupling efficiency 有权
公开(公告)号：US08179628B2
公开(公告)日：2012-05-15
申请号：US12803874
申请日：2010-07-08
申请人： Yuchen Zhou , Tobias Maletzky , Xuhui Jin , Zhigang Bai , Kenichi Takano , Erhard Schreck
发明人： Yuchen Zhou , Tobias Maletzky , Xuhui Jin , Zhigang Bai , Kenichi Takano , Erhard Schreck
IPC分类号： G11B5/02 , G11B11/00
CPC分类号： G11B5/314 , B82Y20/00 , G02B6/1226 , G11B5/3163 , G11B5/6088 , G11B2005/0021
摘要： A TAMR (Thermal Assisted Magnetic Recording) write head uses the energy of optical-laser generated plasmons in a magnetic core plasmon antenna to locally heat a magnetic recording medium and reduce its coercivity and magnetic anisotropy. To enable the TAMR head to operate most effectively, the maximum gradient and value of the magnetic recording field should be at a point of the magnetic medium that is as close as possible to the point being heated. In addition, the coupling between the optical mode and the plasmon mode should be efficient so that maximum energy is transmitted to the medium. The present invention achieves both these objects by surrounding the magnetic core of a plasmon antenna by a variable thickness plasmon generating layer, whose thinnest and shortest portion is at the ABS end of the TAMR head and whose thickest and longest portion efficiently couples to the optical mode of a waveguide to produce a plasmon.

10. 发明申请

US20120008229A1 Magnetic core plasmon antenna with improved coupling efficiency 有权
标题翻译：具有改善耦合效率的磁芯等离子体天线
公开(公告)号：US20120008229A1
公开(公告)日：2012-01-12
申请号：US12803874
申请日：2010-07-08
申请人： Yuchen Zhou , Tobias Maletzky , Xuhui Jin , Zhigang Bai , Kenichi Takano , Erhard Schreck
发明人： Yuchen Zhou , Tobias Maletzky , Xuhui Jin , Zhigang Bai , Kenichi Takano , Erhard Schreck
IPC分类号： G11B5/02 , G11B5/127
CPC分类号： G11B5/314 , B82Y20/00 , G02B6/1226 , G11B5/3163 , G11B5/6088 , G11B2005/0021
摘要： A TAMR (Thermal Assisted Magnetic Recording) write head uses the energy of optical-laser generated plasmons in a magnetic core plasmon antenna to locally heat a magnetic recording medium and reduce its coercivity and magnetic anisotropy. To enable the TAMR head to operate most effectively, the maximum gradient and value of the magnetic recording field should be at a point of the magnetic medium that is as close as possible to the point being heated. In addition, the coupling between the optical mode and the plasmon mode should be efficient so that maximum energy is transmitted to the medium. The present invention achieves both these objects by surrounding the magnetic core of a plasmon antenna by a variable thickness plasmon generating layer, whose thinnest and shortest portion is at the ABS end of the TAMR head and whose thickest and longest portion efficiently couples to the optical mode of a waveguide to produce a plasmon.
摘要翻译： TAMR（热辅助磁记录）写头使用磁芯等离子体天线中的激光产生的等离子体激元的能量来局部加热磁记录介质并降低其矫顽力和磁各向异性。为了使TAMR头能够最有效地运行，磁记录场的最大梯度和值应当在尽可能接近被加热点的磁介质的一个点处。另外，光模式和等离子体激元模式之间的耦合应该是有效的，从而将最大能量传输到介质。本发明通过可变厚度等离子体发生层围绕等离子体激元天线的磁芯来实现这两个目的，其最薄和最短部分在TAMR头的ABS端，并且其最厚和最长部分有效地耦合到光学模式的波导产生等离子体激元。

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