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    • 3. 发明授权
    • Methods of manufacturing semiconductor devices and transistors
    • 制造半导体器件和晶体管的方法
    • US08377779B1
    • 2013-02-19
    • US13342772
    • 2012-01-03
    • Yu-Ping Wang
    • Yu-Ping Wang
    • H01L21/336
    • H01L29/66484H01L21/02225H01L29/66795H01L2029/7858
    • Methods of manufacturing semiconductor devices and transistors are disclosed. In one embodiment, a method of manufacturing a semiconductor device includes providing a workpiece comprising a plurality of fins, and forming a semiconductive material over a top surface of the plurality of fins. An etch stop layer is formed over the semiconductive material, and an insulating material is disposed over the etch stop layer. The insulating material and a portion of the etch stop layer are removed from over the plurality of fins. Forming the semiconductive material or forming the etch stop layer are controlled so that removing the portion of the etch stop layer does not remove the etch stop layer between a widest portion of the semiconductive material over the plurality of fins.
    • 公开了制造半导体器件和晶体管的方法。 在一个实施例中,制造半导体器件的方法包括提供包括多个翅片的工件,以及在多个翅片的顶表面上形成半导体材料。 在半导体材料上形成蚀刻停止层,并且绝缘材料设置在蚀刻停止层上。 绝缘材料和蚀刻停止层的一部分从多个鳍上方移除。 控制形成半导体材料或形成蚀刻停止层,使得去除蚀刻停止层的部分不会去除多个翅片上半导体材料的最宽部分之间的蚀刻停止层。