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1. 发明申请

US20060007983A1 Pyrolyzed thin film carbon 有权
标题翻译：热解薄膜碳
公开(公告)号：US20060007983A1
公开(公告)日：2006-01-12
申请号：US11040116
申请日：2005-01-24
申请人： Yu-Chong Tai , Matthieu Liger , Theodore Harder , Satoshi Konishi , Scott Miserendino
发明人： Yu-Chong Tai , Matthieu Liger , Theodore Harder , Satoshi Konishi , Scott Miserendino
IPC分类号： G01J5/00
CPC分类号： C23C18/02
摘要： A method of making carbon thin films comprises depositing a catalyst on a substrate, depositing a hydrocarbon in contact with the catalyst and pyrolyzing the hydrocarbon. A method of controlling a carbon thin film density comprises etching a cavity into a substrate, depositing a hydrocarbon into the cavity, and pyrolyzing the hydrocarbon while in the cavity to form a carbon thin film. Controlling a carbon thin film density is achieved by changing the volume of the cavity. Methods of making carbon containing patterned structures are also provided. Carbon thin films and carbon containing patterned structures can be used in NEMS, MEMS, liquid chromatography, and sensor devices.
摘要翻译：制造碳薄膜的方法包括在基材上沉积催化剂，沉积与催化剂接触的烃并热解烃。控制碳薄膜密度的方法包括将空腔蚀刻到基底中，将烃沉积到空腔中，并在空腔中热解烃以形成碳薄膜。通过改变空腔的体积来实现碳薄膜密度的控制。还提供了制备含碳图案结构的方法。碳薄膜和含碳图案结构可用于NEMS，MEMS，液相色谱和传感器装置。

2. 发明授权

US07790226B2 Pyrolyzed thin film carbon 有权
标题翻译：热解薄膜碳
公开(公告)号：US07790226B2
公开(公告)日：2010-09-07
申请号：US11040116
申请日：2005-01-24
申请人： Yu-Chong Tai , Matthieu Liger , Theodore Harder , Satoshi Konishi , Scott Miserendino
发明人： Yu-Chong Tai , Matthieu Liger , Theodore Harder , Satoshi Konishi , Scott Miserendino
IPC分类号： B05D3/02
CPC分类号： C23C18/02
摘要： A method of making carbon thin films comprises depositing a catalyst on a substrate, depositing a hydrocarbon in contact with the catalyst and pyrolyzing the hydrocarbon. A method of controlling a carbon thin film density comprises etching a cavity into a substrate, depositing a hydrocarbon into the cavity, and pyrolyzing the hydrocarbon while in the cavity to form a carbon thin film. Controlling a carbon thin film density is achieved by changing the volume of the cavity. Methods of making carbon containing patterned structures are also provided. Carbon thin films and carbon containing patterned structures can be used in NEMS, MEMS, liquid chromatography, and sensor devices.
摘要翻译：制造碳薄膜的方法包括在基材上沉积催化剂，沉积与催化剂接触的烃并热解烃。控制碳薄膜密度的方法包括将空腔蚀刻到基底中，将烃沉积到空腔中，并在空腔中热解烃以形成碳薄膜。通过改变空腔的体积来实现碳薄膜密度的控制。还提供了制备含碳图案结构的方法。碳薄膜和含碳图案结构可用于NEMS，MEMS，液相色谱和传感器装置。

3. 发明授权

US07238941B2 Pyrolyzed-parylene based sensors and method of manufacture 失效
标题翻译：基于热解 - 聚对二甲苯的传感器和制造方法
公开(公告)号：US07238941B2
公开(公告)日：2007-07-03
申请号：US10973938
申请日：2004-10-25
申请人： Yu-Chong Tai , Matthieu Liger , Scott Miserendino , Satoshi Konishi
发明人： Yu-Chong Tai , Matthieu Liger , Scott Miserendino , Satoshi Konishi
IPC分类号： G01J5/00
CPC分类号： G01J5/20
摘要： A method (and resulting structure) for fabricating a sensing device. The method includes providing a substrate comprising a surface region and forming an insulating material overlying the surface region. The method also includes forming a film of carbon based material overlying the insulating material and treating to the film of carbon based material to pyrolyzed the carbon based material to cause formation of a film of substantially carbon based material having a resistivity ranging within a predetermined range. The method also provides at least a portion of the pyrolyzed carbon based material in a sensor application and uses the portion of the pyrolyzed carbon based material in the sensing application. In a specific embodiment, the sensing application is selected from chemical, humidity, piezoelectric, radiation, mechanical strain or temperature.
摘要翻译：一种用于制造感测装置的方法（和结果）。该方法包括提供包括表面区域并形成覆盖表面区域的绝缘材料的基板。该方法还包括形成覆盖绝缘材料的碳基材料薄膜，并处理碳基材料薄膜以热解碳基材料，以形成电阻率范围在预定范围内的基本上碳基材料的薄膜。该方法还在传感器应用中提供热解碳基材料的至少一部分，并且在感测应用中使用部分热解碳基材料。在具体实施例中，感测应用选自化学，湿度，压电，辐射，机械应变或温度。

4. 发明申请

US20060018360A1 Pyrolyzed-parylene based sensors and method of manufacture 失效
标题翻译：基于热解 - 聚对二甲苯的传感器和制造方法
公开(公告)号：US20060018360A1
公开(公告)日：2006-01-26
申请号：US10973938
申请日：2004-10-25
申请人： Yu-Chong Tai , Matthieu Liger , Scott Miserendino , Satoshi Konishi
发明人： Yu-Chong Tai , Matthieu Liger , Scott Miserendino , Satoshi Konishi
IPC分类号： G01J5/00
CPC分类号： G01J5/20
摘要： A method (and resulting structure) for fabricating a sensing device. The method includes providing a substrate comprising a surface region and forming an insulating material overlying the surface region. The method also includes forming a film of carbon based material overlying the insulating material and treating to the film of carbon based material to pyrolyzed the carbon based material to cause formation of a film of substantially carbon based material having a resistivity ranging within a predetermined range. The method also provides at least a portion of the pyrolyzed carbon based material in a sensor application and uses the portion of the pyrolyzed carbon based material in the sensing application. In a specific embodiment, the sensing application is selected from chemical, humidity, piezoelectric, radiation, mechanical strain or temperature.
摘要翻译：一种用于制造感测装置的方法（和结果）。该方法包括提供包括表面区域并形成覆盖表面区域的绝缘材料的基板。该方法还包括形成覆盖绝缘材料的碳基材料薄膜，并处理碳基材料薄膜以热解碳基材料，以形成电阻率范围在预定范围内的基本上碳基材料的薄膜。该方法还在传感器应用中提供热解碳基材料的至少一部分，并且在感测应用中使用部分热解碳基材料。在具体实施例中，感测应用选自化学，湿度，压电，辐射，机械应变或温度。

5. 发明申请

US20060078475A1 Modular microfluidic packaging system 审中-公开
标题翻译：模块化微流体包装系统
公开(公告)号：US20060078475A1
公开(公告)日：2006-04-13
申请号：US11192434
申请日：2005-07-29
申请人： Yu-Chong Tai , Scott Miserendino , Qing He , Siyang Zheng
发明人： Yu-Chong Tai , Scott Miserendino , Qing He , Siyang Zheng
IPC分类号： G01N27/447 , B01L11/00
CPC分类号： B01L9/527 , B01J2219/00286 , B01J2219/00605 , B01L3/502707 , B01L3/502715 , B01L2200/027 , B01L2200/028 , B01L2200/04 , B01L2300/0816 , G01N35/1095
摘要： A packaging system for microfluidics including a microfluidic modular packaging system comprising: a packaging jig comprising a body, at least two module ports for placing microfluidic modules, at least one external fluidic port, and at least one internal fluidic port; at least two die platforms adapted to fit into the module ports and move the microfluidic modules; at least one fluidic control die; at least one circuit board, and at least one cover. HPLC applications are particularly important for proteomics research and commercialization.
摘要翻译：一种用于微流体的包装系统，包括微流体模块化包装系统，包括：包装夹具，包括主体，用于放置微流体模块的至少两个模块端口，至少一个外部流体端口和至少一个内部流体端口; 至少两个模具平台，其适于装配到所述模块端口中并移动所述微流体模块; 至少一个流体控制管芯; 至少一个电路板和至少一个盖。 HPLC应用对蛋白质组学研究和商业化尤其重要。

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