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    • 3. 发明授权
    • Method for forming a strained Si-channel in a MOSFET structure
    • 在MOSFET结构中形成应变Si沟道的方法
    • US07416957B2
    • 2008-08-26
    • US10596422
    • 2004-11-30
    • Youri Ponomarev
    • Youri Ponomarev
    • H01L21/30
    • H01L21/02694H01L21/02381H01L21/0245H01L21/02502H01L21/02505H01L21/02532
    • Method for forming a strained Si layer on a substrate (1), including formation of: an epitaxial SiGe layer (4) on a Si surface, and of: the strained Si layer by epitaxial growth of the Si layer on top of the epitaxial SiGe layer (4), the Si layer being strained due to the epitaxial growth, wherein the substrate (1) is a Silicon-On-Insulator substrate with a support layer (1), a buried silicon dioxide layer (BOX) and a monocrystalline Si surface layer (3), the method further including: ion implantation of the Si surface layer (3) and the epitaxial SiGe layer (4) to transform the Si surface layer (3) into an amorphous Si layer (3B) and a portion of the epitaxial SiGe layer (4) into an amorphous SiGe layer (5), a further portion of the epitaxial SiGe layer (4) being a remaining monocrystalline SiGe layer (6), the amorphous Si layer (3B), the amorphous SiGe layer and the remaining monocrystalline SiGe layer (6) forming a layer stack (3B, 5, 6) on the buried silicon dioxide layer (BOX), with the amorphous Si layer (3B) being adjacent to the buried silicon dioxide layer (BOX).
    • 在基板(1)上形成应变Si层的方法,包括在Si表面上形成外延SiGe层(4),以及通过在外延SiGe顶部外延生长Si层的应变Si层 层(4),由于外延生长,Si层被应变,其中衬底(1)是具有支撑层(1),掩埋二氧化硅层(BOX)和单晶Si(Si)的硅绝缘体衬底 表面层(3),所述方法还包括:Si表面层(3)和外延SiGe层(4)的离子注入,以将Si表面层(3)转变为非晶Si层(3B)和部分 的外延SiGe层(4)的非晶SiGe层(5)中的另一部分外延SiGe层(4)是剩余的单晶SiGe层(6),非晶Si层(3B),非晶SiGe 层和剩余的单晶SiGe层(6)在墓碑上形成层叠(3 B,5,6) 二氧化硅层(BOX),其中非晶Si层(3B)与掩埋二氧化硅层(BOX)相邻。
    • 4. 发明申请
    • Method for the Manufacture of a Semiconductor Device and a Semiconductor Device Obtained Through It
    • 用于制造半导体器件的方法和通过它获得的半导体器件
    • US20080093668A1
    • 2008-04-24
    • US11722988
    • 2005-12-19
    • Youri PonomarevJosine Loo
    • Youri PonomarevJosine Loo
    • H01L29/786H01L21/84
    • H01L29/66772H01L29/78648
    • The invention relates to a semiconductor device (10) having a semiconductor body (2), comprising a field effect transistor, a first gate dielectric (6A) being formed on a first surface at the location of the channel region (5) and on it a first gate electrode (7), a sunken ion implantation (20) being executed from the first side of the semiconductor body (2) through and on both sides of the first gate electrode (7), which implantation results in a change of property of the silicon below the first gate electrode (7) compared to the silicon on both sides of the gate electrode (7) in a section of the channel region (5) remote from the first gate dielectric (6A), and on the second surface of the semiconductor body (2) a cavity (30) being provided therein by means of selective etching while use is made of the change of property of the silicon. A second gate (6B,8) is deposited in the cavity thus formed. Before the ion implantation (20), a mask (M1) is formed on both sides of the gate electrode (7) and at a distance thereof, whereby after the ion implantation (20) at the location of the mask (M1) also a change in property of the silicon is obtained. In this way the device (10) can be easily provided with lateral insulation regions. Also the end regions of the gate electrodes (7,8) can in this way be surrounded by insulation regions.
    • 本发明涉及具有半导体本体(2)的半导体器件(10),包括场效应晶体管,第一栅极电介质(6A)形成在沟道区域(5)的位置处的第一表面上, 它是第一栅电极(7),从半导体本体(2)的第一侧通过第一栅电极(7)的两侧执行沉没离子注入(20),该注入导致 与第一栅极电极(7)下方的硅的特性相比,在远离第一栅极电介质(6A)的沟道区域(5)的部分中与栅电极(7)的两侧的硅相比, 半导体主体(2)的第二表面通过选择性蚀刻在其中提供空腔(30),同时使用硅的性质变化。 第二栅极(6B,8)沉积在如此形成的空腔中。 在离子注入(20)之前,在栅电极(7)的两侧和其一定距离处形成掩模(M 1),由此在掩模(M1)的位置处的离子注入(20)之后, 也获得了硅的性质变化。 以这种方式,设备(10)可以容易地设置有侧向绝缘区域。 此外,栅电极(7,8)的端部区域也可以这样被绝缘区域包围。
    • 5. 发明授权
    • Method of manufacturing a semiconductor device having a pocket implant in channel region
    • 制造在通道区域具有口袋植入物的半导体器件的方法
    • US06544851B2
    • 2003-04-08
    • US09784421
    • 2001-02-15
    • Youri PonomarevMarian Nelia WebsterCharles Johan Joachim Dachs
    • Youri PonomarevMarian Nelia WebsterCharles Johan Joachim Dachs
    • H01L21336
    • H01L29/66492H01L21/823842H01L29/1045H01L29/1083H01L29/66545H01L29/6659
    • In a method of manufacturing a semiconductor device comprising a semiconductor body (1) of a first conductivity type which is provided at a surface (2) with a transistor having a gate (28) insulated from a channel (13) provided at the surface (2) of the semiconductor body (1) by a gate dielectric (26), a structure is provided on the surface (2) comprising a dielectric layer (14) having a recess (16), which recess (16) is aligned to a source zone (11,9) and a drain zone (12,9) of a second conductivity type provided at the surface (2) of the semiconductor body (1) and has side walls (17) extending substantially perpendicularly to the surface (2) of the semiconductor body (1). In this recess (16), a double-layer (20) is applied consisting of a second sub-layer (19) on top of a first sub-layer (18), which second sub-layer (19) is removed over part of its thickness until the first sub-layer is exposed, which first sub-layer (18) is selectively etched with respect to the second sub-layer (19) and the side walls (17) of the recess (16) to a depth, thereby forming trenches (21) extending substantially perpendicularly to the surface (2) of the semiconductor body (1). Via these trenches (21) impurities of the first conductivity type are introduced into the semiconductor body (1), thereby forming pocket implants (22).
    • 在制造半导体器件的方法中,所述半导体器件包括第一导电类型的半导体本体(1),所述半导体本体(1)设置在具有与设置在所述表面处的沟道(13)绝缘的具有栅极(28)的晶体管的表面(2) 通过栅极电介质(26)将半导体本体(1)的结构(2)设置在包括具有凹部(16)的电介质层(14)的表面(2)上的结构,该凹部(16)与 源区(11,9)和设置在半导体本体(1)的表面(2)处的第二导电类型的漏区(12,9),并且具有基本上垂直于表面(2)延伸的侧壁 )半导体本体(1)。 在该凹部(16)中,由在第一子层(18)的顶部上的第二子层(19)构成的双层(20),该第二子层(19)在部分 其厚度直到第一子层露出为止,将第一子层(18)相对于第二子层(19)和凹部(16)的侧壁(17)选择性地蚀刻到深度 从而形成基本上垂直于半导体本体(1)的表面(2)延伸的沟槽(21)。 通过这些沟槽(21)将第一导电类型的杂质引入半导体本体(1)中,从而形成袋状植入物(22)。