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    • 4. 发明授权
    • Method for fabricating triode-structure carbon nanotube field emitter array
    • 制造三极管结构碳纳米管场发射极阵列的方法
    • US06339281B2
    • 2002-01-15
    • US09754148
    • 2001-01-05
    • Hang-woo LeeNae-sung LeeYong-soo ChoiJong-min Kim
    • Hang-woo LeeNae-sung LeeYong-soo ChoiJong-min Kim
    • H01J1304
    • B82Y10/00H01J1/3042H01J9/025H01J2201/30469Y10S977/842
    • A method for fabricating a triode field emitter array using carbon nanotubes having excellent electron emission characteristics is provided. In the method for fabricating a triode-structure carbon nanotube field emitter array, a catalyst layer is formed on a cathode electrode without forming a base layer, and carbon nanotubes are grown on the catalyst layer using a Spind't process. In this method, a non-reactive layer is formed on a catalyst layer outside the micro-cavity such that the carbon nanotubes can be grown only on the catalyst within the micro-cavity. Accordingly, even through a separation layer is etched and removed, since carbon nanotubes do not exist outside the micro-cavity, it does not happen that carbon nanotubes are drifted into the micro-cavities. Therefore, the fabrication yield is increased, and the fabrication cost is decreased.
    • 提供了使用具有优异的电子发射特性的碳纳米管制造三极管场发射器阵列的方法。 在制造三极管结构碳纳米管场发射极阵列的方法中,在阴极上形成催化剂层而不形成基底层,并且使用Spind't工艺在催化剂层上生长碳纳米管。 在该方法中,在微腔外部的催化剂层上形成非反应性层,使得碳纳米管只能在微腔内的催化剂上生长。 因此,即使通过分离层被蚀刻和去除,由于碳纳米管不存在于微腔外部,碳纳米管不会漂移到微腔中。 因此,制造成品率增加,制造成本降低。
    • 6. 发明授权
    • Field emission device with mesh grid
    • 带栅格的场发射装置
    • US07045948B2
    • 2006-05-16
    • US10743799
    • 2003-12-24
    • Hang-woo LeeJong-min KimPil-soo Ahn
    • Hang-woo LeeJong-min KimPil-soo Ahn
    • H01J1/62
    • H01J29/467H01J31/127
    • A field emission device for displaying images with good quality is provided. The field emission device includes an anode plate, an anode electrode and a phosphor layer are formed inside of the anode plate, a cathode plate, a plurality of electron emission sources for emitting electrons which correspond to the phosphor layer and a gate electrode having gate holes through which the electrons pass are formed inside of the cathode plate, a mesh grid which is provided between the cathode plate and the anode plate and in which a plurality of electron-controlling holes are formed in a region corresponding to the gate holes, a spacer which supports the mesh grid between the anode plate and the mesh grid, and insulating layers which are formed on both sides of the mesh grid and have windows through which the plurality of electron-controlling holes are exposed and which correspond to a region where the plurality of electron-controlling holes are formed.
    • 提供了用于显示质量好的图像的场致发射装置。 场致发射器件包括在阳极板内部形成阳极板,阳极电极和荧光体层,阴极板,用于发射与荧光体层相对应的电子的多个电子发射源和具有栅极孔的栅电极 电子通过的电子通过其形成在阴极板的内部,网格设置在阴极板和阳极板之间,并且在与栅极孔相对应的区域中形成有多个电子控制孔,间隔件 其支撑在阳极板和网格之间的网格,以及形成在网状网格的两侧上并具有多个电子控制孔的窗户的绝缘层,并且其中多个电子控制孔的多个 的电子控制孔。
    • 9. 发明授权
    • Method of manufacturing triode carbon nanotube field emitter array
    • 制造三极管碳纳米管场发射极阵列的方法
    • US06699642B2
    • 2004-03-02
    • US10035438
    • 2002-01-04
    • Deuk-seok ChungJong-min KimShang-hyeun ParkNae-sung LeeHang-woo Lee
    • Deuk-seok ChungJong-min KimShang-hyeun ParkNae-sung LeeHang-woo Lee
    • G03F726
    • B82Y10/00H01J9/022H01J2201/30469
    • A method of manufacturing a field emitter array using carbon nanotubes, low voltage field emission material, is provided. The method includes the steps of (a) forming a conductive thin film layer on the top of a transparent substrate having a transparent electrode and exposing a predetermined portion of the transparent electrode; (b) forming an opaque thin film layer on the exposed predetermined portion of the transparent electrode; (c) depositing an insulation material on the entire top surface of the transparent substrate and removing the insulation material from the top surfaces of the conductive thin film layer and the opaque thin film layer, thereby forming an insulation layer; (d) forming a gate layer on the top of the insulation layer; and (e) removing the opaque thin film layer and forming carbon nanotube tips on the top of the exposed transparent electrode. Accordingly, the triode carbon nanotube field emitter array can be easily manufactured using a small number of mask layers and without using a special aligner.
    • 提供了使用碳纳米管制造场致发射体阵列的方法,即低电压场发射材料。 该方法包括以下步骤:(a)在具有透明电极的透明基板的顶部上形成导电薄膜层,并暴露出透明电极的预定部分; (b)在所述透明电极的暴露的预定部分上形成不透明薄膜层; (c)在透明基板的整个顶表面上沉积绝缘材料,并从导电薄膜层和不透明薄膜层的顶表面去除绝缘材料,由此形成绝缘层; (d)在绝缘层的顶部上形成栅极层; 和(e)去除不透明薄膜层并在暴露的透明电极的顶部上形成碳纳米管尖端。 因此,可以使用少量掩模层容易地制造三极管碳纳米管场发射极阵列,并且不使用特殊的对准器。