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    • 4. 发明授权
    • Semiconductor wafer and method of fabricating the same
    • 半导体晶片及其制造方法
    • US07675091B2
    • 2010-03-09
    • US11463137
    • 2006-08-08
    • Young-Soo ParkKyoo-Chul ChoShin-Hyeok HanTae-Soo Kang
    • Young-Soo ParkKyoo-Chul ChoShin-Hyeok HanTae-Soo Kang
    • H01L29/80
    • H01L29/045H01L21/76251H01L21/84H01L27/1203H01L29/78687H01L29/78696
    • Disclosed is a semiconductor wafer and method of fabricating the same. The semiconductor wafer is comprised of a semiconductor layer formed on an insulation layer on a base substrate. The semiconductor layer includes a surface region organized in a first crystallographic orientation, and another surface region organized in a second crystallographic orientation. The performance of a semiconductor device with unit elements that use charges, which are activated in high mobility to the crystallographic orientation, as carriers is enhanced. The semiconductor wafer is completed by forming the semiconductor layer with the second crystallographic orientation on the plane of the first crystallographic orientation, growing an epitaxial layer, forming the insulation layer on the epitaxial layer, and then bonding the insulation layer to the base substrate.
    • 公开了半导体晶片及其制造方法。 半导体晶片由在基底基板上的绝缘层上形成的半导体层构成。 半导体层包括以第一晶体取向组织的表面区域和以第二晶体取向组织的另一表面区域。 带有单元元件的半导体器件的性能随着载流子的增强而被使用以高结晶取向的高迁移率激活的电荷。 半导体晶片通过在第一晶体取向的平面上形成具有第二晶体取向的半导体层,生长外延层,在外延层上形成绝缘层,然后将绝缘层接合到基底来完成。
    • 6. 发明申请
    • Apparatus for inspecting a surface and methods thereof
    • 用于检查表面的装置及其方法
    • US20050259246A1
    • 2005-11-24
    • US11133367
    • 2005-05-20
    • Tae-Soo KangKyoo-Chul ChoSoo-Yeol ChoiSam-Dong Choi
    • Tae-Soo KangKyoo-Chul ChoSoo-Yeol ChoiSam-Dong Choi
    • H01L21/66G01N21/47G01N21/88G01N21/95
    • G01N21/47G01N21/9501
    • An apparatus and method for detecting a surface status. The method includes generating first and second pulse sequences and irradiating the first and second pulse sequences into a given surface. Light from the first and second pulses may be scattered by the given surface and analyzed to determine the status of the given surface. The apparatus includes a device for generating pulses which contact a given surface at different incident angles. The light scattered from the pulses may be analyzed at a determining part to determine a status of the given surface. In another embodiment, the method includes generating first and second pulse sequences and adjusting a path of at least a portion of at least one of the first and second pulse sequences such that the first and second pulse sequences are incident upon a given surface at different incident angles.
    • 一种用于检测表面状态的装置和方法。 该方法包括产生第一和第二脉冲序列并将第一和第二脉冲序列照射到给定的表面中。 来自第一和第二脉冲的光可以被给定的表面散射并且被分析以确定给定表面的状态。 该装置包括用于产生以不同入射角接触给定表面的脉冲的装置。 可以在确定部分分析从脉冲散射的光以确定给定表面的状态。 在另一个实施例中,该方法包括产生第一和第二脉冲序列并且调整第一和第二脉冲序列中的至少一个的至少一部分的路径,使得第一和第二脉冲序列在不同事件处入射到给定表面上 角度。