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    • 7. 发明授权
    • Semiconductor devices including line patterns separated by cutting regions
    • 半导体器件包括由切割区分开的线图案
    • US07898007B2
    • 2011-03-01
    • US11961551
    • 2007-12-20
    • Sung-Bok LeeJoon-Hee Lee
    • Sung-Bok LeeJoon-Hee Lee
    • H01L23/52
    • H01L27/11568H01L27/0207H01L27/115
    • Semiconductor devices are provided. A semiconductor device can include a substrate and a plurality of dummy line patterns on the substrate that extend in a first direction parallel with one another. Each of the dummy line patterns can include a plurality of sub-line patterns aligned along the first direction and which are separated from each other by at least one cutting region therebetween. The dummy line patterns can include first and second dummy line patterns which are adjacent to each other in a second direction that is perpendicular to the first direction. At least one of the cutting regions between a pair of sub-line patterns of the first dummy line pattern is aligned with and bounded by one of the sub-line patterns of the second dummy line pattern in the second direction.
    • 提供半导体器件。 半导体器件可以包括衬底和在基板上的彼此平行的第一方向上延伸的多个虚拟线图案。 虚线图案中的每一个可以包括沿着第一方向排列的多个子线图案,并且通过其间的至少一个切割区域彼此分离。 假线图案可以包括在垂直于第一方向的第二方向上彼此相邻的第一和第二假线图案。 第一虚线图案的一对子线图案之间的切割区域中的至少一个与第二虚线图案的第二方向上的一条子线图形对准并限定在第二方向上。
    • 8. 发明申请
    • Non-volatile memory devices having floating gates and related methods of forming the same
    • 具有浮动栅极的非易失性存储器件及其相关方法
    • US20070108498A1
    • 2007-05-17
    • US11594327
    • 2006-11-08
    • Joon-Hee LeeJong-Ho ParkJin-Hyun ShinSung-Hoi HurYong-Seok KimJong-Won Kim
    • Joon-Hee LeeJong-Ho ParkJin-Hyun ShinSung-Hoi HurYong-Seok KimJong-Won Kim
    • H01L29/788
    • H01L29/7881H01L27/115H01L27/11521H01L29/42324
    • A nonvolatile memory device may include a substrate having a cell region, and a cell device isolation layer on the cell region of the substrate to define a cell active region. A floating gate may include a lower floating gate and an upper floating gate sequentially stacked on the cell active region, and a tunnel insulation pattern may be between the floating gate and the cell active region. A control gate electrode may be on the floating gate, and a blocking insulation pattern may be between the control gate electrode and the floating gate. More particularly, the upper floating gate may include a flat portion on the lower floating gate and a pair of wall portions extending upward from both edges of the flat portion adjacent to the cell device isolation layer. Moreover, a width of an upper portion of a space surrounded by the flat portion and the pair of wall portions may be larger than a width of a lower portion of the space. Related methods are also discussed.
    • 非易失性存储器件可以包括具有单元区域的衬底和在衬底的单元区域上的单元器件隔离层,以限定电池活性区域。 浮置栅极可以包括顺序堆叠在单元有源区上的下浮置栅极和上浮置栅极,并且隧道绝缘图案可以在浮栅和电池有源区之间。 控制栅极电极可以在浮置栅极上,并且阻挡绝缘图案可以在控制栅电极和浮栅之间。 更具体地说,上部浮动栅极可以包括在下部浮动栅极上的平坦部分和从邻近电池器件隔离层的平坦部分的两个边缘向上延伸的一对壁部分。 此外,由平坦部分和一对壁部分围绕的空间的上部的宽度可以大于空间的下部的宽度。 还讨论了相关方法。