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    • 1. 发明授权
    • Chemically amplified resist composition
    • 化学放大抗蚀剂组合物
    • US07575850B2
    • 2009-08-18
    • US12021149
    • 2008-01-28
    • Yoshiyuki TakataSatoshi YamamotoSatoshi Yamaguchi
    • Yoshiyuki TakataSatoshi YamamotoSatoshi Yamaguchi
    • G03F7/004
    • G03F7/0397G03F7/0045G03F7/0046Y10S430/111Y10S430/122Y10S430/123
    • The present invention provides a chemically amplified resist composition comprising: a resin which comprises a structural unit having an acid-labile group and a structural unit represented by the formula (I): wherein R1 represents a hydrogen atom or a methyl group, ring X represents a C3-C30 cyclic hydrocarbon group in which one —CH2— is substituted with —COO—, and at least one hydrogen atom in the C3-C30 cyclic hydrocarbon group may be substituted, and p represents an integer of 1 to 4, and which itself is insoluble or poorly soluble in an alkali aqueous solution but becomes soluble in an alkali aqueous solution by the action of an acid, and at least two salts selected from a salt represented by the formula (II): wherein Y1 and Y2 each independently represent a fluorine atom or a C1-C6 perfluoroalkyl group, A+ represents an organic counter ion and R21 represents a C1-C30 hydrocarbon group which may be substituted and at least one —CH2— in the C1-C30 hydrocarbon group may be substituted with —CO— or —O—, and a salt represented by the formula (III): A′+−O3S—R23  (III) wherein R23 represents a C1-C8 linear or branched chain perfluoroalkyl group and A′+ represents an organic counter ion.
    • 本发明提供一种化学放大抗蚀剂组合物,其包含:树脂,其包含具有酸不稳定基团的结构单元和由式(I)表示的结构单元:其中R1表示氢原子或甲基,环X表示 C 1 -C 30环烃基,其中一个-CH 2 - 被-COO-取代,并且C 3 -C 30环烃基中的至少一个氢原子可以被取代,p表示1〜4的整数, 本身在碱性水溶液中不溶或难溶,但是通过酸的作用而溶于碱性水溶液中,以及选自式(II)表示的盐中的至少两种盐:其中Y1和Y2各自独立地表示 氟原子或C1-C6全氟烷基,A +表示有机抗衡离子,R21表示可以被取代的C1-C30烃基,C1-C30烃基中的至少一个-CH2-可以是取代基 d与-CO-或-O-,以及由式(III)表示的盐:<?in-line-formula description =“In-line formula”end =“lead”?> A'+ - O3S-R23 (III)<?in-line-formula description =“In-line Formulas”end =“tail”?>其中R23表示C1-C8直链或支链全氟烷基,A'+表示有机抗衡离子。
    • 2. 发明申请
    • CHEMICALLY AMPLIFIED RESIST COMPOSITION
    • US20080176168A1
    • 2008-07-24
    • US11961867
    • 2007-12-20
    • Kaoru ArakiSatoshi YamaguchiSatoshi Yamamoto
    • Kaoru ArakiSatoshi YamaguchiSatoshi Yamamoto
    • G03F7/004
    • G03F7/0045G03F7/0046G03F7/0397
    • A chemically amplified resist composition comprising: (A) a salt represented by the formula (I): wherein R21 represents a C1-C30 hydrocarbon group which may be substituted, and at least one —CH2— in the hydrocarbon group may be substituted by —CO— or —O—, Q1 and Q2 each independently represent a fluorine atom or a C1-C6 perfluoroalkyl group, and A+ represents at least one organic cation selected from a cation represented by the formula (Ia): wherein P1, P2 and P3 each independently represent a C1-C30 alkyl group which may be substituted with at least one selected from a hydroxyl group, a C3-C12 cyclic hydrocarbon group and a C1-C12 alkoxy group, or a C3-C30 cyclic hydrocarbon group which may be substituted with at least one selected from a hydroxyl group and a C1-C12 alkoxy group, a cation represented by the formula (Ib): wherein P4 and P5 each independently represent a hydrogen atom, a hydroxyl group, a C1-C12 alkyl group or a C1-C12 alkoxy group, and a cation represented by the formula (Ic): wherein P10, P11, P12, P13, P14, P15, P16, P17, P18, P19, P20 and P21 each independently represent a hydrogen atom, a hydroxyl group, a C1-C12 alkyl group or a C1-C12 alkoxy group, B represents a sulfur or oxygen atom and m represents 0 or 1, (B) a salt represented by the formula (II): A′+−O3S-Q3   (II) wherein Q3 represents a C1-C10 perfluoroalkyl group or a C4-C8 perfluorocycloalkyl group, and A′+ represents an organic cation represented by the formula (IIa): wherein P6 and P7 each independently represent a C1-C12 alkyl group or a C3-C12 cycloalkyl group, or P6 and P7 are bonded to form a C3-C12 divalent acyclic hydrocarbon group which forms a ring together with the adjacent S+, and at least one —CH2— in the divalent acyclic hydrocarbon group may be substituted with —CO—, —O— or —S—, P8 represents a hydrogen atom, P9 represents a C1-C12 alkyl group, a C3-C12 cycloalkyl group or an aromatic group which may be substituted, or P8 and P9 are bonded to form a divalent acyclic hydrocarbon group which forms a 2-oxocycloalkyl group together with the adjacent —CHCO—, and at least one —CH2— in the divalent acyclic hydrocarbon group may be replaced with —CO—, —O— or —S—; and (C) a resin which contains a structural unit having an acid-labile group and which itself is insoluble or poorly soluble in an aqueous alkali solution but becomes soluble in an aqueous alkali solution by the action of an acid.
    • 3. 发明申请
    • Chemically amplified resist composition
    • 化学放大抗蚀剂组合物
    • US20080213695A1
    • 2008-09-04
    • US11987672
    • 2007-12-03
    • Satoshi YamaguchiSatoshi YamamotoNobuo Ando
    • Satoshi YamaguchiSatoshi YamamotoNobuo Ando
    • G03F7/004
    • G03F7/0045G03F7/0046G03F7/0397Y10S430/106Y10S430/111Y10S430/122Y10S430/123
    • The present invention provides a chemically amplified resist composition comprising: (A) a salt represented by (I): wherein R21 represents a C1-C30 hydrocarbon group, Q1 and Q2 each represent a fluorine atom, and A+ represents at least one organic cation represented by (Ia): wherein P1-P3 each represent C1-C30 alkyl group, a cation represented by (Ib): wherein P4 and P5 each represent a hydrogen atom, and a cation represented by (Ic): wherein P10-P21 each represent hydrogen atom, B represents sulfur or oxygen atom and m represents 0 or 1; (B) a salt (II): wherein R22 represents C1-C30 hydrocarbon group, Q3 and Q4 each represent fluorine atom, and A′+ represents an organic cation (IIa): wherein P6 and P7 are each a C1-C12 alkyl group, P8 represents hydrogen atom, P9 represents C1-C12 alkyl group; and (C) a resin which contains a structural unit having an acid-labile group.
    • 本发明提供一种化学放大抗蚀剂组合物,其包含:(A)由(I)表示的盐:其中R 21表示C 1 -C 30烃基,Q 1和 Q 2各自表示氟原子,A 0 +表示由(Ia)表示的至少一种有机阳离子:其中P 1〜 SUP> 3各自表示C1-C30烷基,由(Ib)表示的阳离子:其中P 4和P 5各自表示氢原子,和 由(Ic)表示的阳离子:其中P为10〜21个,各自表示氢原子,B表示硫或氧原子,m表示0或1; (B)盐(II):其中R 22表示C 1 -C 30烃基,Q 3和Q 4各自表示氟原子, 并且A' +表示有机阳离子(IIa):其中P 6和P 7各自为C 1 -C 12烷基, SUP> 8表示氢原子,P 9表示C1-C12烷基; 和(C)含有具有酸不稳定基团的结构单元的树脂。
    • 10. 发明授权
    • Resist composition and method for producing resist pattern
    • 抗蚀剂组合物和抗蚀剂图案的制造方法
    • US09291893B2
    • 2016-03-22
    • US13281145
    • 2011-10-25
    • Tatsuro MasuyamaSatoshi YamamotoKoji Ichikawa
    • Tatsuro MasuyamaSatoshi YamamotoKoji Ichikawa
    • G03F7/004G03F7/039G03F7/20
    • G03F7/0046G03F7/0045G03F7/0397G03F7/2041
    • A resist composition contains; a resin having a structural unit represented by the formula (aa) and a structural unit represented by the formula (ab); and an acid generator, wherein Raa1 represents a hydrogen atom and a methyl group; Aaa1 represents an optionally substituted C1 to C6 alkanediyl group etc.; Raa2 represents an optionally substituted C1 to C18 aliphatic hydrocarbon group; Rab1 represents a hydrogen atom and a methyl group; Aab1 represents a single bond, an optionally substituted C1 to C6 alkanediyl group etc.; W1 represents an optionally substituted C4 to C24 alicyclic hydrocarbon group; n represents 1 or 2; Aab2 in each occurrence independently represents an optionally substituted C1 to C6 aliphatic hydrocarbon group; Rab2 in each occurrence independently represents a C1 to C12 fluorinated alkyl group.
    • 抗蚀剂组合物含有 具有由式(aa)表示的结构单元的树脂和由式(ab)表示的结构单元; 和酸产生剂,其中Raa1表示氢原子和甲基; Aaa1表示可以具有取代基的C1〜C6烷二基等。 Raa2表示任选取代的C1至C18脂族烃基; Rab1表示氢原子和甲基; Aab1表示单键,任选取代的C 1至C 6烷二基等; W1表示任选取代的C4至C24脂环族烃基; n表示1或2; Aab2各自独立地表示任选取代的C 1至C 6脂族烃基; Rab2各自独立地表示C1〜C12氟化烷基。