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1. 发明授权

US08221636B2 Method of manufacturing magnetic head for perpendicular magnetic recording 有权
标题翻译：用于垂直磁记录的磁头制造方法
公开(公告)号：US08221636B2
公开(公告)日：2012-07-17
申请号：US12149987
申请日：2008-05-12
申请人： Yoshitaka Sasaki , Hiroyuki Itoh , Hironori Araki , Shigeki Tanemura , Kazuo Ishizaki , Takehiro Horinaka
发明人： Yoshitaka Sasaki , Hiroyuki Itoh , Hironori Araki , Shigeki Tanemura , Kazuo Ishizaki , Takehiro Horinaka
IPC分类号： B44C1/22
CPC分类号： G11B5/3163 , G11B5/1278 , G11B5/3116
摘要： A magnetic head includes a pole layer, and an encasing layer having a groove that accommodates the pole layer. A manufacturing method for the magnetic head includes the steps of forming a nonmagnetic layer that will later undergo formation of the groove therein and will thereby become the encasing layer; forming the groove in the nonmagnetic layer so that the nonmagnetic layer becomes the encasing layer; and forming the pole layer such that the pole layer is accommodated in the groove of the encasing layer. The nonmagnetic layer is formed of Al2O3. The step of forming the groove in the nonmagnetic layer includes the step of taper-etching the nonmagnetic layer by reactive ion etching with an etching gas containing at least BCl3 and N2 among BCl3, Cl2 and N2.
摘要翻译：磁头包括极层和具有容纳极层的凹槽的封装层。磁头的制造方法包括以下步骤：形成将在其中形成凹槽的非磁性层，从而成为包层; 在非磁性层中形成凹槽，使得非磁性层成为包层; 以及形成所述极层，使得所述极层容纳在所述封装层的槽中。非磁性层由Al2O3形成。在非磁性层中形成槽的步骤包括通过在BCl 3，Cl 2和N 2中至少含有BCl 3和N 2的蚀刻气体的反应离子蚀刻来对非磁性层进行锥蚀刻的步骤。

2. 发明授权

US08176623B2 Method of manufacturing a magnetic head for perpendicular magnetic recording 有权
标题翻译：制造用于垂直磁记录的磁头的方法
公开(公告)号：US08176623B2
公开(公告)日：2012-05-15
申请号：US12003347
申请日：2007-12-21
申请人： Yoshitaka Sasaki , Hiroyuki Itoh , Shigeki Tanemura , Hironori Araki , Kazuo Ishizaki , Takehiro Horinaka
发明人： Yoshitaka Sasaki , Hiroyuki Itoh , Shigeki Tanemura , Hironori Araki , Kazuo Ishizaki , Takehiro Horinaka
IPC分类号： G11B5/187 , G11B5/17
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3123 , G11B5/313 , G11B5/3163 , H01L21/67069 , Y10T29/49041 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/4906 , Y10T29/49066 , Y10T428/115
摘要： A method of manufacturing the magnetic head includes the steps of: forming the pole-layer-encasing layer; forming an initial nonmagnetic layer in the groove of the pole-layer-encasing layer by physical vapor deposition, the initial nonmagnetic layer being intended to become the nonmagnetic layer later by undergoing etching of a surface thereof; etching the surface of the initial nonmagnetic layer by dry etching so that the initial nonmagnetic layer becomes the nonmagnetic layer; and forming the pole layer in the pole-layer-encasing section formed by the nonmagnetic layer.
摘要翻译：制造磁头的方法包括以下步骤：形成极层包裹层; 通过物理气相沉积在磁极层封装层的沟槽中形成初始非磁性层，最初的非磁性层随后经历其表面蚀刻而成为非磁性层; 通过干蚀刻蚀刻初始非磁性层的表面，使初始非磁性层成为非磁性层; 以及在由非磁性层形成的极层包裹部中形成极层。

3. 发明申请

US20090162699A1 Magnetic head for perpendicular magnetic recording and method of manufacturing same 有权
标题翻译：用于垂直磁记录的磁头及其制造方法
公开(公告)号：US20090162699A1
公开(公告)日：2009-06-25
申请号：US12003347
申请日：2007-12-21
申请人： Yoshitaka Sasaki , Hiroyuki Itoh , Shigeki Tanemura , Hironori Araki , Kazuo Ishizaki , Takehiro Horinaka
发明人： Yoshitaka Sasaki , Hiroyuki Itoh , Shigeki Tanemura , Hironori Araki , Kazuo Ishizaki , Takehiro Horinaka
IPC分类号： G11B5/33 , B05D5/12
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3123 , G11B5/313 , G11B5/3163 , H01L21/67069 , Y10T29/49041 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/4906 , Y10T29/49066 , Y10T428/115
摘要： A magnetic head includes: a pole layer; a pole-layer-encasing layer made of a nonmagnetic material and having a top surface and a groove that opens at the top surface; and a nonmagnetic layer that is made of a nonmagnetic metal material, disposed in the groove and forms a pole-layer-encasing section that accommodates the pole layer. A method of manufacturing the magnetic head includes the steps of: forming the pole-layer-encasing layer; forming an initial nonmagnetic layer in the groove of the pole-layer-encasing layer by physical vapor deposition, the initial nonmagnetic layer being intended to become the nonmagnetic layer later by undergoing etching of a surface thereof, etching the surface of the initial nonmagnetic layer by dry etching so that the initial nonmagnetic layer becomes the nonmagnetic layer; and forming the pole layer in the pole-layer-encasing section formed by the nonmagnetic layer.
摘要翻译：磁头包括：极层; 由非磁性材料制成的具有顶表面和在顶表面上开口的凹槽的极层包裹层; 以及由非磁性金属材料制成的非磁性层，其设置在所述凹槽中并形成容纳所述极层的极层包封部分。制造磁头的方法包括以下步骤：形成极层包裹层; 通过物理气相沉积在磁极层封装层的沟槽中形成初始非磁性层，初始非磁性层以后通过蚀刻其表面而成为非磁性层，通过以下方式蚀刻初始非磁性层的表面：使得初始非磁性层成为非磁性层; 以及在由非磁性层形成的极层包裹部中形成极层。

4. 发明申请

US20090059426A1 Magnetic head for perpendicular magnetic recording and method of manufacturing same 有权
标题翻译：用于垂直磁记录的磁头及其制造方法
公开(公告)号：US20090059426A1
公开(公告)日：2009-03-05
申请号：US11896705
申请日：2007-09-05
申请人： Yoshitaka Sasaki , Hiroyuki Itoh , Hironori Araki , Shigeki Tanemura , Kazuo Ishizaki , Takehiro Horinaka
发明人： Yoshitaka Sasaki , Hiroyuki Itoh , Hironori Araki , Shigeki Tanemura , Kazuo Ishizaki , Takehiro Horinaka
IPC分类号： G11B5/127
CPC分类号： G11B5/1278 , G11B5/3116 , G11B5/3163 , Y10T29/49046
摘要： A top surface of a pole layer of a magnetic head includes: a first portion having a first edge located in a medium facing surface and a second edge opposite thereto; and a second portion located farther from the medium facing surface than the first portion and connected to the first portion at the second edge. The distance from a substrate to an arbitrary point on the first portion increases with increasing distance from the medium facing surface to the arbitrary point. The angle of inclination of the first portion taken at the arbitrary point with respect to a direction perpendicular to the medium facing surface increases stepwise or continuously with increasing distance from the medium facing surface to the arbitrary point. The angle of inclination taken at the first edge is greater than zero degree. The second portion extends in a direction substantially perpendicular to the medium facing surface.
摘要翻译：磁头的极层的顶表面包括：第一部分，其具有位于介质相对表面中的第一边缘和与其相对的第二边缘; 以及位于比所述第一部分更远离所述介质面对表面并且在所述第二边缘处连接到所述第一部分的第二部分。从基板到第一部分的任意点的距离随着从介质面向表面到任意点的距离的增加而增加。相对于与面向介质的表面垂直的任意点处的第一部分的倾斜角度随着从介质面向表面到任意点的距离的增加而逐步或连续地增加。在第一边缘处采取的倾斜角大于零度。第二部分在基本上垂直于介质面向表面的方向上延伸。

5. 发明申请

US20080316653A1 Magnetic head for perpendicular magnetic recording and method of manufacturing same 有权
标题翻译：用于垂直磁记录的磁头及其制造方法
公开(公告)号：US20080316653A1
公开(公告)日：2008-12-25
申请号：US11812757
申请日：2007-06-21
申请人： Yoshitaka Sasaki , Hiroyuki Itoh , Hironori Araki , Shigeki Tanemura , Kazuo Ishizaki , Lijie Guan , Takehiro Horinaka
发明人： Yoshitaka Sasaki , Hiroyuki Itoh , Hironori Araki , Shigeki Tanemura , Kazuo Ishizaki , Lijie Guan , Takehiro Horinaka
IPC分类号： G11B5/10
CPC分类号： G11B5/3116 , G11B5/1278
摘要： A magnetic head includes: a pole layer; a nonmagnetic layer disposed on part of the top surface of the pole layer; a gap layer disposed on the pole layer and the nonmagnetic layer; and a shield disposed on the gap layer. The top surface of the pole layer includes: a first portion having a first edge located in a medium facing surface and a second edge opposite thereto; and a second portion located farther from the medium facing surface than the first portion and connected to the first portion at the second edge. The first portion is inclined with respect to a direction orthogonal to the medium facing surface so that the distance from a substrate increases with increasing distance from the medium facing surface. The nonmagnetic layer has a bottom surface touching the second portion, and this bottom surface has an edge located at the second edge.
摘要翻译：磁头包括：极层; 设置在所述极层的顶表面的一部分上的非磁性层; 设置在所述极层和所述非磁性层上的间隙层; 以及设置在间隙层上的屏蔽件。极层的顶表面包括：第一部分，其具有位于介质相对表面中的第一边缘和与其相对的第二边缘; 以及位于比所述第一部分更远离所述介质面对表面并且在所述第二边缘处连接到所述第一部分的第二部分。第一部分相对于与介质相对表面正交的方向倾斜，使得距衬底的距离随着距离介质面向表面的距离的增加而增加。非磁性层具有接触第二部分的底面，该底面具有位于第二边缘的边缘。

6. 发明授权

US07436627B2 Magnetic head for perpendicular magnetic recording and method of manufacturing same 有权
标题翻译：用于垂直磁记录的磁头及其制造方法
公开(公告)号：US07436627B2
公开(公告)日：2008-10-14
申请号：US10998584
申请日：2004-11-30
申请人： Yoshitaka Sasaki , Hironori Araki , Hiroyuki Itoh , Kazuo Ishizaki
发明人： Yoshitaka Sasaki , Hironori Araki , Hiroyuki Itoh , Kazuo Ishizaki
IPC分类号： G11B5/187
CPC分类号： G11B5/314 , G11B5/1278 , G11B5/3116 , G11B5/3163 , Y10T29/49021 , Y10T29/49041 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052 , Y10T29/4906
摘要： A pole-layer-encasing layer made of a nonmagnetic material is disposed on an underlying layer made of a nonmagnetic conductive material. The encasing layer has a groove that penetrates. A pole layer is disposed in the groove. The pole layer is formed by plating through feeding a current to the underlying layer. A polishing stopper layer made of a nonmagnetic conductive material is disposed on the top surface of the encasing layer. The polishing stopper layer indicates the level at which polishing for controlling the thickness of the pole layer is stopped. The polishing stopper layer has an opening that penetrates, and the edge of the opening is located directly above the edge of the groove located in the top surface of the encasing layer.
摘要翻译：由非磁性材料制成的极层封装层设置在由非磁性导电材料制成的下层上。包装层具有穿透的凹槽。极层设置在槽中。极层通过将电流馈送到下层而通过电镀形成。由非磁性导电材料制成的抛光阻挡层设置在封装层的顶表面上。抛光停止层表示用于控制极层的厚度的抛光停止的水平。抛光停止层具有穿透的开口，并且开口的边缘位于位于包装层的顶表面中的槽的边缘的正上方。

7. 发明授权

US07375925B2 Magnetic head for perpendicular magnetic recording and method of manufacturing same 有权
标题翻译：用于垂直磁记录的磁头及其制造方法
公开(公告)号：US07375925B2
公开(公告)日：2008-05-20
申请号：US11138968
申请日：2005-05-27
申请人： Yoshitaka Sasaki , Hiroyuki Itoh , Hironori Araki , Shigeki Tanemura , Kazuo Ishizaki
发明人： Yoshitaka Sasaki , Hiroyuki Itoh , Hironori Araki , Shigeki Tanemura , Kazuo Ishizaki
IPC分类号： G11B5/147
CPC分类号： G11B5/3163 , G11B5/1278 , G11B5/3116 , G11B5/3169
摘要： A pole layer incorporates: a first portion having an end face located in a medium facing surface; and a second portion having a thickness greater than that of the first portion. A surface of the first portion closer to a substrate is located farther from the substrate than a surface of the second portion closer to the substrate. A surface of the first portion farther from the substrate is located closer to the substrate than a surface of the second portion farther from the substrate. At least a portion of the pole layer is placed in an encasing groove formed in a region extending from a first encasing layer through a second encasing layer to a nonmagnetic metal layer.
摘要翻译：极层包括：具有位于介质面对表面中的端面的第一部分; 以及第二部分，其厚度大于第一部分的厚度。靠近基板的第一部分的表面比距离基板的第二部分的表面更靠近基板。距离基板更远的第一部分的表面比离开基板的第二部分的表面更靠近基板。极层的至少一部分被放置在形成在从第一包层穿过第二包装层延伸到非磁性金属层的区域中的包围槽中。

8. 发明申请

US20070279802A1 Magnetic head and method of manufacturing same, and method of forming patterned layer 有权
标题翻译：磁头及其制造方法，以及形成图案层的方法
公开(公告)号：US20070279802A1
公开(公告)日：2007-12-06
申请号：US11443048
申请日：2006-05-31
申请人： Yoshitaka Sasaki , Kazuo Ishizaki , Hiroyuki Itoh
发明人： Yoshitaka Sasaki , Kazuo Ishizaki , Hiroyuki Itoh
IPC分类号： G11B5/147
CPC分类号： G01R33/093 , B82Y25/00 , G11B5/1278 , G11B5/3116 , G11B5/3163 , G11B5/3967 , Y10T29/49039 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method of forming a magnetic head comprises the steps of: selectively exposing through the use of a photomask a photoresist layer unpatterned; forming a pattern for forming a pole layer by developing the photoresist layer after the exposure; and forming the pole layer through the use of the pattern. The photomask includes first to third regions. The first region has such a perimeter that a projection image thereof is shaped along a perimeter of an ideal shape of the top surface of the pole layer. The second region touches the perimeter of the first region, and is located outside the first region. The third region is located inside the first region without touching the perimeter of the first region. The third region suppresses deviation of the pole layer from its desired shape which may be caused by the effect of light reflected while the photoresist layer is exposed.
摘要翻译：一种形成磁头的方法包括以下步骤：通过使用光掩模选择性曝光未图案化的光致抗蚀剂层; 通过在曝光后显影光致抗蚀剂层，形成用于形成极层的图案; 并通过使用图案形成极层。光掩模包括第一至第三区域。第一区域具有这样的周边，使得其投影图像沿着极层顶表面的理想形状的周边成形。第二区域接触第一区域的周边，并且位于第一区域的外部。第三区域位于第一区域内，而不接触第一区域的周边。第三区域抑制极性层与其期望形状的偏差，这可能是由光致抗蚀剂层暴露时反射的光的影响引起的。

9. 发明申请

US20060256483A1 Magnetic head for perpendicular magnetic recording and method of manufacturing same 有权
标题翻译：用于垂直磁记录的磁头及其制造方法
公开(公告)号：US20060256483A1
公开(公告)日：2006-11-16
申请号：US11129377
申请日：2005-05-16
申请人： Yoshitaka Sasaki , Hiroyuki Itoh , Shigeki Tanemura , Takehiro Horinaka , Kazuo Ishizaki
发明人： Yoshitaka Sasaki , Hiroyuki Itoh , Shigeki Tanemura , Takehiro Horinaka , Kazuo Ishizaki
IPC分类号： G11B5/33
CPC分类号： G11B5/1278 , G11B5/3116 , G11B5/313 , G11B5/3169
摘要： A pole layer has: a first portion having an end face located in a medium facing surface; and a second portion that is located farther from the medium facing surface than the first portion and has a thickness greater than that of the first portion. A surface of the first portion farther from a substrate is located closer to the substrate than a surface of the second portion farther from the substrate. The second portion has a front end face that couples the surface of the first portion farther from the substrate to the surface of the second portion farther from the substrate. A shield layer has a portion located between the front end face and the medium facing surface in a region closer to the substrate than the surface of the second portion farther from the substrate.
摘要翻译：极层具有：第一部分，其具有位于介质面向表面中的端面; 以及比所述第一部分位于比所述介质相对表面更远的第二部分，并且具有大于所述第一部分的厚度的厚度。距离基板更远的第一部分的表面比距离基板更远的第二部分的表面更靠近基板。第二部分具有前端面，该前端面将第一部分的表面从基板延伸到距离基板更远的第二部分的表面。屏蔽层在距离基板的第二部分的表面更靠近基板的区域中具有位于前端面和介质对向表面之间的部分。

10. 发明申请

US20060174475A1 Magnetic head and method of manufacturing same, and magnetic head substructure 有权
标题翻译：磁头及其制造方法及磁头子结构
公开(公告)号：US20060174475A1
公开(公告)日：2006-08-10
申请号：US11050892
申请日：2005-02-07
申请人： Yoshitaka Sasaki , Hiroyuki Itoh , Dong-Hong Li , Hironori Araki , Kazuo Ishizaki
发明人： Yoshitaka Sasaki , Hiroyuki Itoh , Dong-Hong Li , Hironori Araki , Kazuo Ishizaki
IPC分类号： G11B5/127 , G11B5/147
CPC分类号： G11B5/3173 , G11B5/3166 , G11B5/3169 , G11B5/39 , G11B5/3903 , Y10T29/49032 , Y10T29/49037 , Y10T29/49043 , Y10T29/49048
摘要： A method of manufacturing magnetic heads comprises the step of: fabricating a magnetic head substructure by forming components of a plurality of magnetic heads on a single substrate, wherein a plurality of rows of pre-head portions that will be the respective magnetic heads later are aligned in the substructure; and fabricating the magnetic heads by separating the pre-head portions from one another through cutting the substructure. In the substructure first resistor elements and second resistor elements are formed. Each of the first resistor elements has a resistance that varies depending on the location of an end of an MR element located in a medium facing surface along the direction orthogonal to the medium facing surface. Each of the second resistor elements has a resistance that varies depending on the location of an end face of a track width defining portion located in the medium facing surface along the direction orthogonal to the medium facing surface. The medium facing surfaces are formed while monitoring the resistance values of the first and second resistor elements.
摘要翻译：一种制造磁头的方法包括以下步骤：通过在单个基板上形成多个磁头的部件来制造磁头子结构，其中随后将成为相应磁头的多行预磁头部分对准在子结构中; 以及通过切割子结构将前头部彼此分开来制造磁头。在子结构中，形成第一电阻元件和第二电阻元件。每个第一电阻器元件具有根据位于面向介质的表面中的MR元件沿着与介质面对表面正交的方向的端部的位置而变化的电阻。每个第二电阻器元件具有根据位于介质相对表面中的轨道宽度限定部分的端面沿着与面向介质的表面正交的方向的位置而变化的电阻。在监测第一和第二电阻元件的电阻值的同时形成面向介质的表面。

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