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1. 发明授权

US08221636B2 Method of manufacturing magnetic head for perpendicular magnetic recording 有权
标题翻译：用于垂直磁记录的磁头制造方法
公开(公告)号：US08221636B2
公开(公告)日：2012-07-17
申请号：US12149987
申请日：2008-05-12
申请人： Yoshitaka Sasaki , Hiroyuki Itoh , Hironori Araki , Shigeki Tanemura , Kazuo Ishizaki , Takehiro Horinaka
发明人： Yoshitaka Sasaki , Hiroyuki Itoh , Hironori Araki , Shigeki Tanemura , Kazuo Ishizaki , Takehiro Horinaka
IPC分类号： B44C1/22
CPC分类号： G11B5/3163 , G11B5/1278 , G11B5/3116
摘要： A magnetic head includes a pole layer, and an encasing layer having a groove that accommodates the pole layer. A manufacturing method for the magnetic head includes the steps of forming a nonmagnetic layer that will later undergo formation of the groove therein and will thereby become the encasing layer; forming the groove in the nonmagnetic layer so that the nonmagnetic layer becomes the encasing layer; and forming the pole layer such that the pole layer is accommodated in the groove of the encasing layer. The nonmagnetic layer is formed of Al2O3. The step of forming the groove in the nonmagnetic layer includes the step of taper-etching the nonmagnetic layer by reactive ion etching with an etching gas containing at least BCl3 and N2 among BCl3, Cl2 and N2.
摘要翻译：磁头包括极层和具有容纳极层的凹槽的封装层。磁头的制造方法包括以下步骤：形成将在其中形成凹槽的非磁性层，从而成为包层; 在非磁性层中形成凹槽，使得非磁性层成为包层; 以及形成所述极层，使得所述极层容纳在所述封装层的槽中。非磁性层由Al2O3形成。在非磁性层中形成槽的步骤包括通过在BCl 3，Cl 2和N 2中至少含有BCl 3和N 2的蚀刻气体的反应离子蚀刻来对非磁性层进行锥蚀刻的步骤。

2. 发明授权

US08176623B2 Method of manufacturing a magnetic head for perpendicular magnetic recording 有权
标题翻译：制造用于垂直磁记录的磁头的方法
公开(公告)号：US08176623B2
公开(公告)日：2012-05-15
申请号：US12003347
申请日：2007-12-21
申请人： Yoshitaka Sasaki , Hiroyuki Itoh , Shigeki Tanemura , Hironori Araki , Kazuo Ishizaki , Takehiro Horinaka
发明人： Yoshitaka Sasaki , Hiroyuki Itoh , Shigeki Tanemura , Hironori Araki , Kazuo Ishizaki , Takehiro Horinaka
IPC分类号： G11B5/187 , G11B5/17
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3123 , G11B5/313 , G11B5/3163 , H01L21/67069 , Y10T29/49041 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/4906 , Y10T29/49066 , Y10T428/115
摘要： A method of manufacturing the magnetic head includes the steps of: forming the pole-layer-encasing layer; forming an initial nonmagnetic layer in the groove of the pole-layer-encasing layer by physical vapor deposition, the initial nonmagnetic layer being intended to become the nonmagnetic layer later by undergoing etching of a surface thereof; etching the surface of the initial nonmagnetic layer by dry etching so that the initial nonmagnetic layer becomes the nonmagnetic layer; and forming the pole layer in the pole-layer-encasing section formed by the nonmagnetic layer.
摘要翻译：制造磁头的方法包括以下步骤：形成极层包裹层; 通过物理气相沉积在磁极层封装层的沟槽中形成初始非磁性层，最初的非磁性层随后经历其表面蚀刻而成为非磁性层; 通过干蚀刻蚀刻初始非磁性层的表面，使初始非磁性层成为非磁性层; 以及在由非磁性层形成的极层包裹部中形成极层。

3. 发明申请

US20090162699A1 Magnetic head for perpendicular magnetic recording and method of manufacturing same 有权
标题翻译：用于垂直磁记录的磁头及其制造方法
公开(公告)号：US20090162699A1
公开(公告)日：2009-06-25
申请号：US12003347
申请日：2007-12-21
申请人： Yoshitaka Sasaki , Hiroyuki Itoh , Shigeki Tanemura , Hironori Araki , Kazuo Ishizaki , Takehiro Horinaka
发明人： Yoshitaka Sasaki , Hiroyuki Itoh , Shigeki Tanemura , Hironori Araki , Kazuo Ishizaki , Takehiro Horinaka
IPC分类号： G11B5/33 , B05D5/12
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3123 , G11B5/313 , G11B5/3163 , H01L21/67069 , Y10T29/49041 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/4906 , Y10T29/49066 , Y10T428/115
摘要： A magnetic head includes: a pole layer; a pole-layer-encasing layer made of a nonmagnetic material and having a top surface and a groove that opens at the top surface; and a nonmagnetic layer that is made of a nonmagnetic metal material, disposed in the groove and forms a pole-layer-encasing section that accommodates the pole layer. A method of manufacturing the magnetic head includes the steps of: forming the pole-layer-encasing layer; forming an initial nonmagnetic layer in the groove of the pole-layer-encasing layer by physical vapor deposition, the initial nonmagnetic layer being intended to become the nonmagnetic layer later by undergoing etching of a surface thereof, etching the surface of the initial nonmagnetic layer by dry etching so that the initial nonmagnetic layer becomes the nonmagnetic layer; and forming the pole layer in the pole-layer-encasing section formed by the nonmagnetic layer.
摘要翻译：磁头包括：极层; 由非磁性材料制成的具有顶表面和在顶表面上开口的凹槽的极层包裹层; 以及由非磁性金属材料制成的非磁性层，其设置在所述凹槽中并形成容纳所述极层的极层包封部分。制造磁头的方法包括以下步骤：形成极层包裹层; 通过物理气相沉积在磁极层封装层的沟槽中形成初始非磁性层，初始非磁性层以后通过蚀刻其表面而成为非磁性层，通过以下方式蚀刻初始非磁性层的表面：使得初始非磁性层成为非磁性层; 以及在由非磁性层形成的极层包裹部中形成极层。

4. 发明申请

US20090059426A1 Magnetic head for perpendicular magnetic recording and method of manufacturing same 有权
标题翻译：用于垂直磁记录的磁头及其制造方法
公开(公告)号：US20090059426A1
公开(公告)日：2009-03-05
申请号：US11896705
申请日：2007-09-05
申请人： Yoshitaka Sasaki , Hiroyuki Itoh , Hironori Araki , Shigeki Tanemura , Kazuo Ishizaki , Takehiro Horinaka
发明人： Yoshitaka Sasaki , Hiroyuki Itoh , Hironori Araki , Shigeki Tanemura , Kazuo Ishizaki , Takehiro Horinaka
IPC分类号： G11B5/127
CPC分类号： G11B5/1278 , G11B5/3116 , G11B5/3163 , Y10T29/49046
摘要： A top surface of a pole layer of a magnetic head includes: a first portion having a first edge located in a medium facing surface and a second edge opposite thereto; and a second portion located farther from the medium facing surface than the first portion and connected to the first portion at the second edge. The distance from a substrate to an arbitrary point on the first portion increases with increasing distance from the medium facing surface to the arbitrary point. The angle of inclination of the first portion taken at the arbitrary point with respect to a direction perpendicular to the medium facing surface increases stepwise or continuously with increasing distance from the medium facing surface to the arbitrary point. The angle of inclination taken at the first edge is greater than zero degree. The second portion extends in a direction substantially perpendicular to the medium facing surface.
摘要翻译：磁头的极层的顶表面包括：第一部分，其具有位于介质相对表面中的第一边缘和与其相对的第二边缘; 以及位于比所述第一部分更远离所述介质面对表面并且在所述第二边缘处连接到所述第一部分的第二部分。从基板到第一部分的任意点的距离随着从介质面向表面到任意点的距离的增加而增加。相对于与面向介质的表面垂直的任意点处的第一部分的倾斜角度随着从介质面向表面到任意点的距离的增加而逐步或连续地增加。在第一边缘处采取的倾斜角大于零度。第二部分在基本上垂直于介质面向表面的方向上延伸。

5. 发明申请

US20080316653A1 Magnetic head for perpendicular magnetic recording and method of manufacturing same 有权
标题翻译：用于垂直磁记录的磁头及其制造方法
公开(公告)号：US20080316653A1
公开(公告)日：2008-12-25
申请号：US11812757
申请日：2007-06-21
申请人： Yoshitaka Sasaki , Hiroyuki Itoh , Hironori Araki , Shigeki Tanemura , Kazuo Ishizaki , Lijie Guan , Takehiro Horinaka
发明人： Yoshitaka Sasaki , Hiroyuki Itoh , Hironori Araki , Shigeki Tanemura , Kazuo Ishizaki , Lijie Guan , Takehiro Horinaka
IPC分类号： G11B5/10
CPC分类号： G11B5/3116 , G11B5/1278
摘要： A magnetic head includes: a pole layer; a nonmagnetic layer disposed on part of the top surface of the pole layer; a gap layer disposed on the pole layer and the nonmagnetic layer; and a shield disposed on the gap layer. The top surface of the pole layer includes: a first portion having a first edge located in a medium facing surface and a second edge opposite thereto; and a second portion located farther from the medium facing surface than the first portion and connected to the first portion at the second edge. The first portion is inclined with respect to a direction orthogonal to the medium facing surface so that the distance from a substrate increases with increasing distance from the medium facing surface. The nonmagnetic layer has a bottom surface touching the second portion, and this bottom surface has an edge located at the second edge.
摘要翻译：磁头包括：极层; 设置在所述极层的顶表面的一部分上的非磁性层; 设置在所述极层和所述非磁性层上的间隙层; 以及设置在间隙层上的屏蔽件。极层的顶表面包括：第一部分，其具有位于介质相对表面中的第一边缘和与其相对的第二边缘; 以及位于比所述第一部分更远离所述介质面对表面并且在所述第二边缘处连接到所述第一部分的第二部分。第一部分相对于与介质相对表面正交的方向倾斜，使得距衬底的距离随着距离介质面向表面的距离的增加而增加。非磁性层具有接触第二部分的底面，该底面具有位于第二边缘的边缘。

6. 发明授权

US08687320B2 Magnetic head for perpendicular magnetic recording having a pole layer including a plurality of stacked magnetic films 有权
标题翻译：用于垂直磁记录的磁头，其具有包括多个堆叠的磁性膜的极层
公开(公告)号：US08687320B2
公开(公告)日：2014-04-01
申请号：US13440554
申请日：2012-04-05
申请人： Yoshitaka Sasaki , Hiroyuki Itoh , Shigeki Tanemura , Hironori Araki , Kazuo Ishizaki , Takehiro Horinaka
发明人： Yoshitaka Sasaki , Hiroyuki Itoh , Shigeki Tanemura , Hironori Araki , Kazuo Ishizaki , Takehiro Horinaka
IPC分类号： G11B5/127
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3123 , G11B5/313 , G11B5/3163 , H01L21/67069 , Y10T29/49041 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/4906 , Y10T29/49066 , Y10T428/115
摘要： A magnetic head includes a pole layer accommodated in a groove. The pole layer has a track width defining portion and a wide portion. The pole layer includes a plurality of magnetic films stacked. At least one of the plurality of magnetic films includes a first portion included in the track width defining portion, a second portion included in the wide portion, and a third portion coupling the first and second portions to each other. In a cross section passing through the center of the pole layer taken in the track width direction, the second portion is smaller than the first portion in thickness and the top surface of the third portion is inclined with respect to a direction perpendicular to a medium facing surface.
摘要翻译：磁头包括容纳在凹槽中的极层。极层具有轨道宽度限定部分和宽部分。极层包括堆叠的多个磁性膜。多个磁性膜中的至少一个包括包括在轨道宽度限定部分中的第一部分，包括在宽部分中的第二部分和将第一部分和第二部分彼此联接的第三部分。在通过沿着磁道宽度方向取得的磁极层的中心的横截面中，第二部分的厚度小于第一部分，并且第三部分的顶表面相对于垂直于面向介质的介质的方向倾斜表面。

7. 发明授权

US08997335B2 Method of manufacturing a magnetic head for perpendicular magnetic recording 有权
标题翻译：制造用于垂直磁记录的磁头的方法
公开(公告)号：US08997335B2
公开(公告)日：2015-04-07
申请号：US13440467
申请日：2012-04-05
申请人： Yoshitaka Sasaki , Hiroyuki Itoh , Shigeki Tanemura , Hironori Araki , Kazuo Ishizaki , Takehiro Horinaka
发明人： Yoshitaka Sasaki , Hiroyuki Itoh , Shigeki Tanemura , Hironori Araki , Kazuo Ishizaki , Takehiro Horinaka
IPC分类号： G11B5/31 , H01L21/67 , G11B5/127
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3123 , G11B5/313 , G11B5/3163 , H01L21/67069 , Y10T29/49041 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/4906 , Y10T29/49066 , Y10T428/115
摘要： A method of manufacturing a magnetic head includes the steps of: forming a pole-layer-encasing layer having a pole-layer-encasing section; and forming a pole layer in the pole-layer-encasing section. The pole layer includes a first layer, and a second layer formed thereon. The step of forming the pole layer includes the steps of: forming an initial first layer by physical vapor deposition; etching the surface of the initial first layer by dry etching so that the initial first layer becomes the first layer; and forming the second layer on the first layer.
摘要翻译：一种制造磁头的方法包括以下步骤：形成具有极层包围部分的极层包裹层; 以及在极层封装部中形成极层。极层包括第一层和形成在其上的第二层。形成极层的步骤包括以下步骤：通过物理气相沉积形成初始第一层; 通过干蚀刻蚀刻初始第一层的表面，使得初始第一层成为第一层; 以及在所述第一层上形成所述第二层。

8. 发明申请

US20120210566A1 METHOD OF MANUFACTURING A MAGNETIC HEAD FOR PERPENDICULAR MAGNETIC RECORDING 审中-公开
标题翻译：用于磁性记录的磁头的制造方法
公开(公告)号：US20120210566A1
公开(公告)日：2012-08-23
申请号：US13440467
申请日：2012-04-05
申请人： Yoshitaka SASAKI , Hiroyuki Itoh , Shigeki Tanemura , Hironori Araki , Kazuo Ishizaki , Takehiro Horinaka
发明人： Yoshitaka SASAKI , Hiroyuki Itoh , Shigeki Tanemura , Hironori Araki , Kazuo Ishizaki , Takehiro Horinaka
IPC分类号： G11B5/127
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3123 , G11B5/313 , G11B5/3163 , H01L21/67069 , Y10T29/49041 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/4906 , Y10T29/49066 , Y10T428/115
摘要： A method of manufacturing a magnetic head includes the steps of: forming a pole-layer-encasing layer having a pole-layer-encasing section; and forming a pole layer in the pole-layer-encasing section. The pole layer includes a first layer, and a second layer formed thereon. The step of forming the pole layer includes the steps of: forming an initial first layer by physical vapor deposition; etching the surface of the initial first layer by dry etching so that the initial first layer becomes the first layer; and forming the second layer on the first layer.
摘要翻译：一种制造磁头的方法包括以下步骤：形成具有极层包围部分的极层包裹层; 以及在极层封装部中形成极层。极层包括第一层和形成在其上的第二层。形成极层的步骤包括以下步骤：通过物理气相沉积形成初始第一层; 通过干蚀刻蚀刻初始第一层的表面，使得初始第一层成为第一层; 以及在所述第一层上形成所述第二层。

9. 发明授权

US07924528B2 Magnetic head for perpendicular magnetic recording and method of manufacturing same 有权
标题翻译：用于垂直磁记录的磁头及其制造方法
公开(公告)号：US07924528B2
公开(公告)日：2011-04-12
申请号：US11896705
申请日：2007-09-05
申请人： Yoshitaka Sasaki , Hiroyuki Itoh , Hironori Araki , Shigeki Tanemura , Kazuo Ishizaki , Takehiro Horinaka
发明人： Yoshitaka Sasaki , Hiroyuki Itoh , Hironori Araki , Shigeki Tanemura , Kazuo Ishizaki , Takehiro Horinaka
IPC分类号： G11B5/31
CPC分类号： G11B5/1278 , G11B5/3116 , G11B5/3163 , Y10T29/49046
摘要： A top surface of a pole layer of a magnetic head includes: a first portion having a first edge located in a medium facing surface and a second edge opposite thereto; and a second portion located farther from the medium facing surface than the first portion and connected to the first portion at the second edge. The distance from a substrate to an arbitrary point on the first portion increases with increasing distance from the medium facing surface to the arbitrary point. The angle of inclination of the first portion taken at the arbitrary point with respect to a direction perpendicular to the medium facing surface increases stepwise or continuously with increasing distance from the medium facing surface to the arbitrary point. The angle of inclination taken at the first edge is greater than zero degree. The second portion extends in a direction substantially perpendicular to the medium facing surface.
摘要翻译：磁头的极层的顶表面包括：第一部分，其具有位于介质相对表面中的第一边缘和与其相对的第二边缘; 以及位于比所述第一部分更远离所述介质面对表面并且在所述第二边缘处连接到所述第一部分的第二部分。从基板到第一部分的任意点的距离随着从介质面向表面到任意点的距离的增加而增加。相对于与面向介质的表面垂直的任意点处的第一部分的倾斜角度随着从介质面向表面到任意点的距离的增加而逐步或连续地增加。在第一边缘处采取的倾斜角大于零度。第二部分在基本上垂直于介质面向表面的方向上延伸。

10. 发明授权

US07916425B2 Magnetic head having angled pole portions 有权
标题翻译：磁头具有倾斜的极部
公开(公告)号：US07916425B2
公开(公告)日：2011-03-29
申请号：US11812757
申请日：2007-06-21
申请人： Yoshitaka Sasaki , Hiroyuki Itoh , Hironori Araki , Shigeki Tanemura , Kazuo Ishizaki , Lijie Guan , Takehiro Horinaka
发明人： Yoshitaka Sasaki , Hiroyuki Itoh , Hironori Araki , Shigeki Tanemura , Kazuo Ishizaki , Lijie Guan , Takehiro Horinaka
IPC分类号： G11B5/127
CPC分类号： G11B5/3116 , G11B5/1278
摘要： A magnetic head includes: a pole layer; a nonmagnetic layer disposed on part of the top surface of the pole layer; a gap layer disposed on the pole layer and the nonmagnetic layer; and a shield disposed on the gap layer. The top surface of the pole layer includes: a first portion having a first edge located in a medium facing surface and a second edge opposite thereto; and a second portion located farther from the medium facing surface than the first portion and connected to the first portion at the second edge. The first portion is inclined with respect to a direction orthogonal to the medium facing surface so that the distance from a substrate increases with increasing distance from the medium facing surface. The nonmagnetic layer has a bottom surface touching the second portion, and this bottom surface has an edge located at the second edge.
摘要翻译：磁头包括：极层; 设置在所述极层的顶表面的一部分上的非磁性层; 设置在所述极层和所述非磁性层上的间隙层; 以及设置在间隙层上的屏蔽件。极层的顶表面包括：第一部分，其具有位于介质相对表面中的第一边缘和与其相对的第二边缘; 以及位于比所述第一部分更远离所述介质面对表面并且在所述第二边缘处连接到所述第一部分的第二部分。第一部分相对于与介质相对表面正交的方向倾斜，使得距衬底的距离随着距离介质面向表面的距离的增加而增加。非磁性层具有接触第二部分的底面，该底面具有位于第二边缘的边缘。

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