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    • 10. 发明申请
    • Thin-Film Solar Battery Module Manufacturing Method and Thin-Film Solar Battery Module
    • 薄膜太阳能电池模块制造方法和薄膜太阳能电池模块
    • US20110114161A1
    • 2011-05-19
    • US12992125
    • 2009-05-12
    • Hiroto UchidaYuko TaguchiMasashi UedaMichihiro Takayama
    • Hiroto UchidaYuko TaguchiMasashi UedaMichihiro Takayama
    • H01L31/18H01L31/0224
    • H01L31/0392H01L31/03921H01L31/046Y02E10/50
    • [Object] To provide a thin-film solar battery module manufacturing method and a thin-film solar battery module that are capable of securing dielectric breakdown voltage characteristics of high reliability.[Solving Means] A thin-film solar battery module manufacturing method according to the present invention includes: forming a first electrode layer on an insulating transparent substrate; forming first isolation trenches that isolate peripheral regions of the transparent substrate from a power generation region on an inner side thereof, to have a depth at which the first isolation trenches reach a surface of the transparent substrate; forming a semiconductor layer on the transparent substrate; forming a second electrode layer on the transparent substrate; forming second isolation trenches at positions closer to the peripheral region sides than the first isolation trenches, to have a depth at which the second isolation trenches reach the surface of the transparent substrate; and removing the first electrode layer, the semiconductor layer, and the second electrode layer formed in the peripheral regions, by performing blast treatment on the peripheral regions.
    • 提供能够确保高可靠性的介电击穿电压特性的薄膜太阳能电池模块制造方法和薄膜太阳能电池模块。 本发明的薄膜太阳能电池模块的制造方法包括:在绝缘透明基板上形成第一电极层; 形成将透明基板的周边区域与其内侧的发电区域隔离的第一隔离沟槽,具有第一隔离沟槽到达透明基板的表面的深度; 在所述透明基板上形成半导体层; 在所述透明基板上形成第二电极层; 在比第一隔离沟槽更靠近周边区域侧的位置处形成第二隔离沟槽,以具有第二隔离沟槽到达透明衬底的表面的深度; 通过在外围区域进行喷砂处理,除去形成在周边区域的第一电极层,半导体层和第二电极层。