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1. 发明授权

US4238835A Analyzing apparatus with microcomputer 失效
标题翻译：用微机分析仪器
公开(公告)号：US4238835A
公开(公告)日：1980-12-09
申请号：US947833
申请日：1978-10-02
申请人： Yoshio Fujii , Hiroshi Inomata , Yoshihiko Suenaga , Koji Nishiwaki , Yohei Takashima
发明人： Yoshio Fujii , Hiroshi Inomata , Yoshihiko Suenaga , Koji Nishiwaki , Yohei Takashima
IPC分类号： G01D1/00 , G01N30/86 , G05B19/16 , G06F17/40 , G06K7/08 , H03M5/12 , G06F1/00 , G06F7/00
CPC分类号： G06K7/084 , G05B19/16
摘要： An analyzing apparatus is controlled by a microcomputer which reads out programmed information from a magnetic card. The magnetic card does not always travel at a constant speed, and therefore, it is difficult for the microcomputer to entirely resort to the software for carrying out the signal processing required for the control of the analyzing apparatus. In order to obviate this difficulty, a hard logic circuit is provided to read out inverted bit information from the magnetic card, and the information thus read out is supplied to the microcomputer so that the microcomputer can reliably carry out the processing steps including bit counting and data reception. The hard logic circuit includes a flip-flop storing an FM signal recorded on the magnetic card and an exclusive-OR gate comparing the flip-flop output with the FM signal. A simple logic circuit is also provided for writing the FM signal on the magnetic card.
摘要翻译：分析装置由从磁卡读出编程信息的微型计算机控制。磁卡并不总是以恒定的速度行进，因此，微计算机难以完全利用软件进行分析装置的控制所需的信号处理。为了避免这种困难，提供硬逻辑电路以从磁卡读出反相位信息，并且将这样读出的信息提供给微型计算机，使得微计算机可以可靠地执行包括位计数和数据接收。硬逻辑电路包括存储记录在磁卡上的FM信号的触发器和将触发器输出与FM信号进行比较的异或门。还提供了用于将FM信号写入磁卡上的简单逻辑电路。

2. 发明授权

US4390788A Electron beam patterning method and apparatus with correction of deflection distortion 失效
标题翻译：具有矫正偏转畸变的电子束图案化方法和装置
公开(公告)号：US4390788A
公开(公告)日：1983-06-28
申请号：US239512
申请日：1981-03-02
申请人： Soichiro Hayashi , Yoshihiko Suenaga
发明人： Soichiro Hayashi , Yoshihiko Suenaga
IPC分类号： H01J37/304 , H01L21/027 , H01J37/00
CPC分类号： H01J37/3045
摘要： An electron beam pattern is formed on an object while correcting the deflection distortion of electron beam upon controlling the deflection of electron beam. Prior to pattern formation, reference marks provided on the object are scanned by electron beam to measure their positions, and a processing unit determines correction data for correcting the deflection distortion through interpolation on the basis of results by interpolation. Upon actual pattern formation, data necessary for forming a pattern is corrected by the correction data to be thus produced as a deflection signal for deflecting the electron beam. As a result, the deflection distortion can precisely be corrected for even though the physical performance of the deflector system is slightly poor.
摘要翻译：电子束图案形成在物体上，同时在控制电子束的偏转的同时校正电子束的偏转畸变。在图案形成之前，通过电子束扫描在物体上提供的参考标记以测量它们的位置，并且处理单元基于通过插值的结果，通过插值来确定用于校正偏转失真的校正数据。在实际图案形成时，通过由此产生的校正数据来校正形成图案所需的数据，作为用于偏转电子束的偏转信号。结果，即使偏转器系统的物理性能稍差，也能够精确地校正偏转变形。

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