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2. 发明授权

US5986763A Method for measuring heights of bumps and apparatus for measuring heights of bumps 失效
标题翻译：用于测量凸块高度的方法和用于测量凸块高度的装置
公开(公告)号：US5986763A
公开(公告)日：1999-11-16
申请号：US259319
申请日：1999-03-01
申请人： Mitsuji Inoue
发明人： Mitsuji Inoue
IPC分类号： G01B11/02 , G01B11/06 , G01B11/24 , G06T1/00 , H01L21/60
CPC分类号： G01B11/0608
摘要： A bump-height measuring apparatus for measuring heights of projecting bumps formed on a surface of a work comprises a holding section for holding the work and relatively positioning the work, an illuminating section for emitting light from two positions onto that region of the work held by the holding section, in which bumps to be measured in height are located, such that the bumps project shadows on the work, the two positions being opposite to each other, and each of the positions being located at a predetermined elevation angle with respect to the region, an imaging section for imaging the region onto which the light is emitted from the two positions in the illuminating step, and outputting image signals producing images including shadow images of the bumps, the shadows of each of the bumps extending in two directions, respectively, a shadow extracting section for extracting the shadow images from the images produced by the image signals output from the imaging section, and then outputting binary image signals producing the shadow images, and an arithmetic section for determining lengths between distal ends of the shadow images of the bumps on the basis of the binary image signals output from the shadow extracting section, and then determining heights of the bumps on the basis of the determined lengths and the elevation angle.
摘要翻译：用于测量形成在工件表面上的突起凸起的高度的凸块高度测量装置包括：用于保持工件并相对定位工件的保持部分，用于将两个位置的光发射到工件的该区域上的照明部分，保持部，其中要测量的高度的凸起位于，使得凸起在工件上投影阴影，两个位置彼此相对，并且每个位置相对于第二位置位于预定的仰角区域，用于在照明步骤中从两个位置对从其发射光的区域进行成像的成像部分，并且输出产生包括凸起的阴影图像的图像的图像信号，每个凸起的阴影分别沿两个方向延伸，阴影提取部分，用于从由成像部分输出的图像信号产生的图像中提取阴影图像，然后输出产生阴影图像的二进制图像信号，以及运算部分，用于基于从阴影提取部分输出的二进制图像信号确定凸起的阴影图像的末端之间的长度，然后确定凸起的高度确定长度和仰角的基础。

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