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1. 发明授权

US08016916B2 Apparatus and method for separating gas 失效
标题翻译：气体分离装置及方法
公开(公告)号：US08016916B2
公开(公告)日：2011-09-13
申请号：US12171972
申请日：2008-07-11
申请人： Yoshinori Ono , Takashi Futatsuki , Tetsuya Abe , Sadamitsu Tanzawa , Toshihisa Hatano
发明人： Yoshinori Ono , Takashi Futatsuki , Tetsuya Abe , Sadamitsu Tanzawa , Toshihisa Hatano
IPC分类号： B01D53/04 , B01D53/70
CPC分类号： B01D53/0454 , B01D53/0423 , B01D53/0446 , B01D53/30 , B01D2253/108 , B01D2257/204 , B01D2257/2066 , B01D2258/0216 , B01D2259/41
摘要： There is provided a gas separation apparatus for separating a specified gas from a gas to be treated containing a plurality of gases. The gas separation apparatus includes a plurality of serially-connected separation units that separate the specified gas from other gases by using a column, and a suction unit that controls an inside of the column to a reduced pressure. At least two of the plurality of separation units differ from each other in at least one separation condition.
摘要翻译：提供了一种用于从含有多种气体的被处理气体中分离出特定气体的气体分离装置。气体分离装置包括多个串联连接的分离单元，其通过使用塔将特定气体与其它气体分离;以及抽吸单元，其将塔内减压。多个分离单元中的至少两个在至少一个分离条件中彼此不同。

2. 发明授权

US07892322B2 Apparatus and method for separating gas 有权
标题翻译：气体分离装置及方法
公开(公告)号：US07892322B2
公开(公告)日：2011-02-22
申请号：US11912125
申请日：2006-04-19
申请人： Yoshinori Ono , Takashi Futatsuki , Tetsuya Abe , Sadamitsu Tanzawa , Seiji Hiroki
发明人： Yoshinori Ono , Takashi Futatsuki , Tetsuya Abe , Sadamitsu Tanzawa , Seiji Hiroki
IPC分类号： B01D53/04 , B01D53/70
CPC分类号： B01D53/047 , B01D53/0423 , B01D53/75 , B01D2253/102 , B01D2253/108 , B01D2256/10 , B01D2257/204 , B01D2257/2066 , B01D2258/0216 , B01D2259/40001 , B01D2259/402 , B01D2259/416 , C23C16/4412 , Y02C20/30
摘要： An apparatus and a method for separating a specified gas from a gas to be treated containing the specified gas comprising at least one ingredient, which comprises allowing the gas to be treated to flow through a column without the use of another gas for transferring the gas to be treated, while keeping the inside of the column packed with a packing material at a reduced pressure. The above apparatus and method can be suitably used for separating a specified gas having a high purity at a low cost.
摘要翻译：一种用于从含有至少一种成分的特定气体的待处理气体中分离特定气体的装置和方法，其包括使得待处理的气体在不使用另一种气体的情况下流经柱而将气体转移到同时在减压下保持填充有填料的柱的内部。上述装置和方法可以适当地用于以低成本分离具有高纯度的特定气体。

3. 发明申请

US20090056540A1 APPARATUS AND METHOD FOR SEPARATING GAS 有权
标题翻译：用于分离气体的装置和方法
公开(公告)号：US20090056540A1
公开(公告)日：2009-03-05
申请号：US11912125
申请日：2006-04-19
申请人： Yoshinori Ono , Takashi Futatsuki , Tetsuya Abe , Sadamitsu Tanzawa , Seiji Hiroki
发明人： Yoshinori Ono , Takashi Futatsuki , Tetsuya Abe , Sadamitsu Tanzawa , Seiji Hiroki
IPC分类号： B01D53/04 , B01D53/54
CPC分类号： B01D53/047 , B01D53/0423 , B01D53/75 , B01D2253/102 , B01D2253/108 , B01D2256/10 , B01D2257/204 , B01D2257/2066 , B01D2258/0216 , B01D2259/40001 , B01D2259/402 , B01D2259/416 , C23C16/4412 , Y02C20/30
摘要： An apparatus and a method for separating a specified gas from a gas to be treated containing the specified gas comprising at least one ingredient, which comprises allowing the gas to be treated to flow through a column without the use of another gas for transferring the gas to be treated, while keeping the inside of the column packed with a packing material at a reduced pressure. The above apparatus and method can be suitably used for separating a specified gas having a high purity at a low cost.
摘要翻译：一种用于从含有至少一种成分的特定气体的待处理气体中分离特定气体的装置和方法，其包括使得待处理的气体在不使用另一种气体的情况下流经柱而将气体转移到同时在减压下保持填充有填料的柱的内部。上述装置和方法可以适当地用于以低成本分离具有高纯度的特定气体。

4. 发明授权

US06551387B2 Gas separation apparatus 失效
公开(公告)号：US06551387B2
公开(公告)日：2003-04-22
申请号：US09915915
申请日：2001-07-26
申请人： Tetsuya Abe , Sadamitsu Tanzawa , Seiji Hiroki , Yoshinori Tajima , Takashi Futatsuki
发明人： Tetsuya Abe , Sadamitsu Tanzawa , Seiji Hiroki , Yoshinori Tajima , Takashi Futatsuki
IPC分类号： B01D5302
CPC分类号： B01D53/02 , B01D53/04 , B01D2253/102 , B01D2253/106 , B01D2257/2066 , B01D2259/40086 , Y02C20/30 , Y02P70/605
摘要： A discharge gas containing PFC gas including CF4 and NF3 generated from a manufacturing process (10) is adsorbed at an adsorbing device (18) and then desorbed using nitrogen as a purge gas. A desorbed gas with CF4 and NF3 concentrated can be obtained in this manner. The desorbed gas is then supplied to a chromatographic separator (20) for chromatographic separation with nitrogen as a carrier gas. In this manner, CF4 and NF3 within the PFC gas can be separated. In particular, because the gas is once concentrated at the adsorbing device (18), chromatographic separation of the gas constituents can be efficiently performed. By independently concentrating CF4 and NF3 obtained by the chromatographic separation, high purity gas constituents of the PFC gas can be obtained, and reused at the manufacturing process (10).

5. 发明授权

US07527676B2 Unit for separating gas 失效
标题翻译：用于分离气体的单元
公开(公告)号：US07527676B2
公开(公告)日：2009-05-05
申请号：US10566489
申请日：2004-06-02
申请人： Yoshinori Tajima , Takashi Futatsuki , Tetsuya Abe , Sadamitsu Tanzawa , Seiji Hiroki
发明人： Yoshinori Tajima , Takashi Futatsuki , Tetsuya Abe , Sadamitsu Tanzawa , Seiji Hiroki
IPC分类号： B01D53/02
CPC分类号： B01D53/025 , Y02C20/30 , Y02P70/605
摘要： A unit for separating an exhaust gas containing PFC gases including CF4 and C2F6 generated in a production process, wherein the exhaust gas is concentrated in a concentration device, and then separated chromatographically in a chromatographic separation device using nitrogen as a carrier gas. The chromatographic separation device is packed with molecular sieve 13X or F-9 or the like. The unit is capable of effectively separating CF4 and C2F6.
摘要翻译：一种用于分离在生产过程中产生的包含CF4和C2F6的PFC气体的排气的单元，其中废气在浓缩装置中浓缩，然后在使用氮气作为载气的色谱分离装置中色谱分离。色谱分离装置装有分子筛13X或F-9等。该单元能够有效分离CF4和C2F6。

6. 发明授权

US06530980B2 Gas separation apparatus 失效
公开(公告)号：US06530980B2
公开(公告)日：2003-03-11
申请号：US09915473
申请日：2001-07-26
申请人： Tetsuya Abe , Sadamitsu Tanzawa , Seiji Hiroki , Yoshinori Tajima , Takashi Futatsuki
发明人： Tetsuya Abe , Sadamitsu Tanzawa , Seiji Hiroki , Yoshinori Tajima , Takashi Futatsuki
IPC分类号： B01D1508
CPC分类号： B01D53/02 , Y02C20/30
摘要： A discharge gas containing PFC gas including CF4 and NF3 generated from a manufacturing process (10) is concentrated at a concentrator (18) and then chromatographically separated at a chromatographic separator (20) with nitrogen as a carrier gas. In this manner, CF4 and NF3 within the PFC gas can be separated. In particular, because the gas is once concentrated at the concentrator (18), chromatographic separation can be efficiently achieved. By independently concentrating CF4 and NF3 obtained by the chromatographic separation, high purity gas constituents of the PFC gas can be obtained, and reused at the manufacturing process (10).

7. 发明申请

US20070084345A1 Unit for separating gas 失效
标题翻译：用于分离气体的单元
公开(公告)号：US20070084345A1
公开(公告)日：2007-04-19
申请号：US10566489
申请日：2004-06-02
申请人： Yoshinori Tajima , Takashi Futatsuki , Tetsuya Abe , Sadamitsu Tanzawa , Seiji Hiroki
发明人： Yoshinori Tajima , Takashi Futatsuki , Tetsuya Abe , Sadamitsu Tanzawa , Seiji Hiroki
IPC分类号： B01D53/02
CPC分类号： B01D53/025 , Y02C20/30 , Y02P70/605
摘要： A unit for separating an exhaust gas containing PFC gases including CF4 and C2F6 generated in a production process, wherein the exhaust gas is concentrated in a concentration device, and then separated chromatographically in a chromatographic separation device using nitrogen as a carrier gas. The chromatographic separation device is packed with molecular sieve 13X or F-9 or the like. The unit is capable of effectively separating CF4 and C2F6.
摘要翻译：一种用于分离在生产过程中产生的包含CF 4和C 2 F 6 F 6的PFC气体的废气的单元，其中废气是浓缩在浓缩装置中，然后在使用氮气作为载气的色谱分离装置中色谱分离。色谱分离装置装有分子筛13X或F-9等。该单元能够有效地分离CF 4和C 2 H 6 F 6。

8. 发明授权

US06461410B1 Method and apparatus for separating, removing, and recovering gas components 失效
标题翻译：用于分离，除去和回收气体组分的方法和装置
公开(公告)号：US06461410B1
公开(公告)日：2002-10-08
申请号：US09640833
申请日：2000-08-17
申请人： Tetsuya Abe , Sadamitsu Tanzawa , Takayuki Masuda
发明人： Tetsuya Abe , Sadamitsu Tanzawa , Takayuki Masuda
IPC分类号： B01D53047
CPC分类号： B01D53/04 , B01D53/0423 , B01D2257/2066 , B01D2257/504 , B01D2257/7022 , B01D2259/40086 , B01D2259/403 , B01D2259/404 , Y02C10/08 , Y02C20/20
摘要： A raw gas containing a gas component A with low affinity with an adsorbent and a gas component C with high affinity with the adsorbent are sequentially supplied to at least three adsorption columns, while a desorption gas containing a gas component D which differs from the gas components A and C is supplied to each of the adsorption columns other than the one to which the raw gas is being supplied. When the raw gas is supplied to the adsorption columns, the gas component A having lower affinity with the adsorbent exits the adsorption columns earlier than the gas component C having higher affinity. The gas components A and C can thus be separated from each other. When a gas including an enriched gas component A is discharged from the outlet of each adsorption column, the full amount is extracted out of the system. When a gas including an enriched gas component C is discharged from the outlet of each adsorption column, the full amount is extracted out of the system. When the gas mixture containing the gas components A and C is discharged from the exit of each adsorption column, all the discharged gas is fed back to the inlet of the adsorption column to which the raw gas is being supplied. It is possible to efficiently and sequentially separate the gas components A and C with this simple structure.
摘要翻译：含有与吸附剂亲和性低的气体成分A和与吸附剂具有高亲和性的气体成分C的原料气体依次供给至少3个吸附塔，同时含有与气体成分不同的气体成分D的解吸气体 A和C被供给到除了供给原料气体的吸附塔之外的每个吸附塔。当原料气体被供应到吸附塔时，与吸附剂具有较低亲和力的气体组分A比具有较高亲和力的气体组分C早于吸附塔。因此，气体成分A和C可以彼此分离。当从吸附塔的出口排出含有富集气体成分A的气体时，将全部量从系统中抽出。当从吸附塔的出口排出含有富集气体成分C的气体时，将全部量从系统中抽出。当含有气体组分A和C的气体混合物从每个吸附塔的出口排出时，所有排出的气体被反馈到被供应原料气体的吸附塔的入口。可以用这种简单的结构有效地和依次地分离气体组分A和C.

9. 发明申请

US20090178460A1 GAS AMOUNT MEASUREMENT DEVICE 有权
标题翻译：气体测量装置
公开(公告)号：US20090178460A1
公开(公告)日：2009-07-16
申请号：US12252940
申请日：2008-10-16
申请人： Tetsuya Abe , Toshihisa Hatano , Hajime Hiratsuka , Koichi Hasegawa , Yasuhide Tajima , Soichiro Omachi
发明人： Tetsuya Abe , Toshihisa Hatano , Hajime Hiratsuka , Koichi Hasegawa , Yasuhide Tajima , Soichiro Omachi
IPC分类号： G01N33/20 , G01N7/00
CPC分类号： G01N7/14
摘要： A gas amount measuring device including a vacuum container, a first pipe, an air release valve being attached to the first pipe, a second pipe, a calibration gas generator being attached to the first pipe, a third pipe, a vacuum gauge, a first valve, a leak valve, a second valve, a turbomolecular pump, a third valve, and a roughing pump being attached to the third pipe in order from a vacuum container side, a first bypass pipe connecting the third pipe between the vacuum container and the first valve to the third pipe between the leak valve and the second valve, a fourth valve being attached to the first bypass pipe, and a second bypass pipe connecting the third pipe between the leak valve and the second valve to the third pipe between the third valve and the roughing pump, a fifth valve being attached to the second bypass pipe.
摘要翻译：一种气体量测量装置，包括真空容器，第一管，安装在第一管上的排气阀，第二管，附接到第一管的校准气体发生器，第三管，真空计，第一管阀，泄漏阀，第二阀，涡轮分子泵，第三阀和粗抽泵，从真空容器侧依次附接到第三管，第一旁通管，将第三管连接在真空容器和第一阀到泄漏阀和第二阀之间的第三管，第四阀连接到第一旁通管，以及第二旁通管，将第二管和第二阀连接到第三管之间，第三管在第三管之间，阀和粗抽泵，第五阀连接到第二旁通管。

10. 发明授权

US08042378B2 Gas amount measurement device 有权
标题翻译：气量测量装置
公开(公告)号：US08042378B2
公开(公告)日：2011-10-25
申请号：US12252940
申请日：2008-10-16
申请人： Tetsuya Abe , Toshihisa Hatano , Hajime Hiratsuka , Koichi Hasegawa , Yasuhide Tajima , Soichiro Omachi
发明人： Tetsuya Abe , Toshihisa Hatano , Hajime Hiratsuka , Koichi Hasegawa , Yasuhide Tajima , Soichiro Omachi
IPC分类号： G01N33/20
CPC分类号： G01N7/14
摘要： A gas amount measuring device including a vacuum container, a first pipe, an air release valve being attached to the first pipe, a second pipe, a calibration gas generator being attached to the first pipe, a third pipe, a vacuum gauge, a first valve, a leak valve, a second valve, a turbomolecular pump, a third valve, and a roughing pump being attached to the third pipe in order from a vacuum container side, a first bypass pipe connecting the third pipe between the vacuum container and the first valve to the third pipe between the leak valve and the second valve, a fourth valve being attached to the first bypass pipe, and a second bypass pipe connecting the third pipe between the leak valve and the second valve to the third pipe between the third valve and the roughing pump, a fifth valve being attached to the second bypass pipe.
摘要翻译：一种气体量测量装置，包括真空容器，第一管，安装在第一管上的排气阀，第二管，附接到第一管的校准气体发生器，第三管，真空计，第一管阀，泄漏阀，第二阀，涡轮分子泵，第三阀和粗抽泵，从真空容器侧依次附接到第三管，第一旁通管，将第三管连接在真空容器和第一阀到泄漏阀和第二阀之间的第三管，第四阀连接到第一旁通管，以及第二旁通管，将第二管和第二阀连接到第三管之间，第三管在第三管之间，阀和粗抽泵，第五阀连接到第二旁通管。

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