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    • 1. 发明授权
    • Workpiece stage of a resist curing device
    • 抗蚀剂固化装置的工件台
    • US06897415B2
    • 2005-05-24
    • US10180295
    • 2002-06-27
    • Yoshinori FujiwaraYasuhiko KenjoYoshihiko Watanabe
    • Yoshinori FujiwaraYasuhiko KenjoYoshihiko Watanabe
    • G03F7/20G03F7/38G03F7/40H01L21/027H05B3/74H05B3/68
    • G03F7/38G03F7/2024G03F7/40H01L21/67109
    • A workpiece stage of a resist curing device is devised in which a workpiece on which a resist has been applied is held on a workpiece stage by vacuum suction, in which the workpiece is irradiated with UV radiation with a simultaneous temperature increase, in which it is cooled after UV radiation and by which the resist is cured, the workpiece stage having heating and cooling arrangements, major warping of the carrier is avoided and reliable holding of the workpiece on the carrier surface by vacuum suction obtained by the carrier being made of an aluminum alloy or a copper alloy which meets the following condition: σ/σy3.1 σ labeling the thermal stress which is determined using the following formula: where E is Young's modulus (N/mm2) at 200° C., α is the coefficient of linear expansion (1/° C.) at 200° C. and ΔT is a temperature difference (° C.) of 120° C., and σy is the fracture point at 200° C.
    • 设计抗蚀剂固化装置的工件台,其中已经施加有抗蚀剂的工件通过真空吸附被保持在工件台上,其中工件被同时升温的UV辐射照射,其中它是 紫外线辐射后冷却,抗蚀剂固化,工件台具有加热和冷却布置,避免了载体的主要翘曲,并且通过由载体由铝制成的真空抽吸可靠地将工件保持在载体表面上 合金或铜合金,满足以下条件:<?in-line-formula description =“In-line formula”end =“lead”?> sigma / sigma -formulae description =“In-line Formulas”end =“tail”?> sigma标注使用下列公式确定的热应力:其中E是200时的杨氏模量(N / mm 2) °C,在200°C时,α是线性膨胀系数(1 /℃),而DeltaT是Te 温度差(°C)为120°C,σσ为200°C时的断裂点。
    • 4. 发明授权
    • Slipping torque changing apparatus for impact tool
    • 用于冲击工具的滑动扭矩改变装置
    • US5346023A
    • 1994-09-13
    • US16310
    • 1993-02-11
    • Toshiaki TakagiYoshihiko Watanabe
    • Toshiaki TakagiYoshihiko Watanabe
    • B23B45/16B25D16/00B25D17/10
    • B25D16/003
    • A slipping torque changing mechanism for an impact tool includes a driving source for generating a rotational motion. A motion converting mechanism is connected with this driving source for converting the rotational motion of the driving source into a reciprocating motion. An impact mechanism is connected with this motion converting mechanism for transmitting the reciprocating motion to a tool end. A rotational motion transmitting mechanism is disposed separately from the motion converting mechanism for transmitting the rotational motion of the driving source to the tool end. A plurality of clutches, having different slipping torques, are disposed at different portions on the rotational motion transmitting mechanism.
    • 用于冲击工具的滑动转矩改变机构包括用于产生旋转运动的驱动源。 运动转换机构与该驱动源连接,用于将驱动源的旋转运动转换成往复运动。 冲击机构与该运动转换机构连接,用于将往复运动传递到工具端。 旋转运动传递机构与运动转换机构分开布置,用于将驱动源的旋转运动传递到工具端。 具有不同滑动转矩的多个离合器设置在旋转运动传递机构的不同部分。
    • 6. 发明授权
    • NMR imaging apparatus
    • NMR成像装置
    • US4733187A
    • 1988-03-22
    • US023558
    • 1987-01-23
    • Toru ShimazakiYoshihiko WatanabeYasuo Imanishi
    • Toru ShimazakiYoshihiko WatanabeYasuo Imanishi
    • G09G5/00A61B5/055A61B10/00G01N24/08G01R33/48G01R33/54G06Q50/22G06Q50/24G06T1/00G09G5/36G01R33/20
    • G01R33/4835
    • An NMR imaging apparatus of the present invention which is provided with an improved data acquiring means 16 and which is useful for enhancement of the speed of reconstruction of an image in NMR imaging by a multislice multiecho method is characterized in that a raw data memory 18 which is provided for storing raw data for the maximum number of slices that can be acquired in one scanning separately from the memory 10 of a computer system 6, and an address converter 19 for converting the addressses of the measured data supplied subsequently in accordance with the sequence of the multislice multiecho method and for storing the measured data in the raw data memory 18 in the arrangement different from the order of acquisition are disposed in a data acquiring device, so that a data block for each slice is formed in the raw data memory 18.
    • PCT No.PCT / JP86 / 00294 Sec。 371日期1987年1月23日 102(e)日期1987年1月23日PCT申请1986年6月12日PCT公布。 出版物WO86 / 07460 日本特开1986年12月18日。具有改进数据获取装置16的本发明的一种NMR成像装置的特征在于用于通过多层多重方法提高NMR成像中的图像的重建速度。 原始数据存储器18被提供用于存储与计算机系统6的存储器10分开的一次扫描中可以获取的最大数量的片的原始数据,以及用于转换测量数据的地址的地址转换器19 随后根据多层多层方法的顺序提供,并且在不同于采集顺序的布置中将原始数据存储器18中的测量数据存储在数据获取装置中,使得每个切片的数据块为 形成在原始数据存储器18中。
    • 9. 发明授权
    • Method of recycling household waste
    • 回收家庭垃圾的方法
    • US06655530B2
    • 2003-12-02
    • US09891243
    • 2001-06-27
    • Koichi NakamuraYoshihiko WatanabeKazufumi Watabe
    • Koichi NakamuraYoshihiko WatanabeKazufumi Watabe
    • B03B100
    • B03B9/06C05F9/02Y02A40/215Y10S71/903Y10S209/93
    • The household waste treatment requires neither incineration nor disposal in landfills. Two processing sub-systems, first one for combustibles and the other or second one for incombustibles, cooperate with each other as a single system for recycling the waste. The first sub-system deals with combustible waste to yields products for fertilizing and/or conditioning soil. In the process, what are inappropriate to the production of the soil fertilizing and/or conditioning products are sent to the second sub-system, which deals with incombustible waste. This sub-system sorts the incombustible waste materials into various kinds of recyclable products. Combustibles among the incombustible waste materials are sent to the first sub-system.
    • 家庭废物处理既不要求焚化也不需要在垃圾填埋场处置。 两个处理子系统,第一个可燃物,另一个或第二个用于不可燃物,彼此配合作为一个循环使用废物的系统。 第一个子系统处理可燃废物,以产生用于施肥和/或调理土壤的产品。 在此过程中,不适当的土壤肥料和/或调理产品的生产被送到第二个处理不可燃废物的子系统。 该子系统将不燃废物分类成各种可回收产品。 不燃废物中的可燃物被送到第一子系统。
    • 10. 发明授权
    • Substrate transport apparatus and transport teaching system
    • 基板运输装备和运输教学系统
    • US06438449B2
    • 2002-08-20
    • US09725553
    • 2000-11-29
    • Yasuo KawamatsuYoshihiko WatanabeYasuhiko Hashimoto
    • Yasuo KawamatsuYoshihiko WatanabeYasuhiko Hashimoto
    • G06F700
    • H01L21/6835B25J19/025H01L21/681H01L21/68707H01L2924/3025
    • To provide a substrate transport device and a transport teaching system which can automatically perform a teaching processing in order to reduce the burden of an operator and to eliminate a positional shift accurately and efficiently in a short time. Optical connectors 251, 252, 253 and 254 of a jig 200 and optical connectors 256, 257, 258 and 259 fixedly provided on a substrate transport device are opposed to each other and optical axes are coincident with each other. A lens having a high condensation ratio is provided in each optical connector. A light signal is output from optical sensor heads 231 and 241 through an optical fiber F2, each optical connector and an optical fiber F1, and a light signal input to optical sensor heads 232 and 242 is guided into the substrate transport device. Then, an arm 31b is automatically moved in a three-axis direction. Thus, an edge position of a detected portion 122 is detected to acquire positional information so that teaching information is obtained.
    • 为了提供能够自动执行教学处理的基板输送装置和运输教学系统,以减少操作者的负担,并在短时间内精确有效地消除位置偏移。 固定设置在基板输送装置上的夹具200的光连接器251,252,253和254以及固定地设置在基板输送装置上的光连接器256,257,258,259彼此相对并且光轴彼此重合。 在每个光学连接器中设置具有高冷凝率的透镜。 光信号通过光纤F2从光学传感器头231和241输出,每个光学连接器和光纤F1以及输入到光学传感器头232和242的光信号被引导到基板输送装置中。 然后,臂31b沿三轴方向自动移动。 因此,检测到检测部分122的边缘位置以获取位置信息,从而获得教学信息。